JP2008523623A - 窒化物系発光ヘテロ構造 - Google Patents
窒化物系発光ヘテロ構造 Download PDFInfo
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- 150000004767 nitrides Chemical class 0.000 title claims abstract description 45
- 230000004888 barrier function Effects 0.000 claims abstract description 65
- 239000000203 mixture Substances 0.000 claims abstract description 58
- 229910002704 AlGaN Inorganic materials 0.000 claims description 29
- 230000000903 blocking effect Effects 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 18
- 230000006798 recombination Effects 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 10
- 230000005283 ground state Effects 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 10
- 238000005215 recombination Methods 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 239000004038 photonic crystal Substances 0.000 claims description 2
- 238000010276 construction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 14
- 239000011777 magnesium Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 229910052749 magnesium Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000005428 wave function Effects 0.000 description 5
- 238000005253 cladding Methods 0.000 description 4
- 229910052790 beryllium Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910017109 AlON Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/11—Comprising a photonic bandgap structure
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
- H01S5/3216—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities quantum well or superlattice cladding layers
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- H01S5/3407—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers characterised by special barrier layers
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3415—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers containing details related to carrier capture times into wells or barriers
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- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34346—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser characterised by the materials of the barrier layers
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Abstract
【選択図】図1
Description
E0=π2h2/(2med2)
(この値は、バンド曲がりが基底状態を押し上げるため実際にはさらに高い)
で近似でき、式中、hはプランク定数であり、meは電子の有効質量である(GaNの場合0.228m0と推定され得、式中、m0は自由電子の静止質量である)。この場合、dの関数としてバンド曲がりとdの関数としてのGaNの基底状態エネルギーとを比較すると、量子井戸32の幅は、電子基底状態エネルギーがバンド曲がりエネルギーより確実に高くなるように、およそ4.5ナノメートルよりも小さくなければならない。
Claims (22)
- 電子供給層と、
正孔供給層と、
前記電子供給層と前記正孔供給層との間に配置された光発生構造と
を備え、前記光発生構造が、
各々が傾斜組成を含むバリア層のセットと、
各々が前記バリア層と隣接し、非輻射再結合の原因である少なくとも1つの欠陥の特性半径より小さい厚みを有する量子井戸のセットと
を含む、窒化物系発光ヘテロ構造。 - 前記量子井戸の各々の厚みが、該各量子井戸の電子基底状態が、分極効果のセットによって生じるエネルギーのバンド曲がり範囲より高くなるような厚みである、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記量子井戸の各々の厚みが、該各量子井戸の電子基底状態が、対応する該各量子井戸の伝導バンドの底より高いエネルギーになるような厚みである、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記バリア層の各々が、AlGaNまたはAlGaInNの組成の1つを含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記光発生構造と前記正孔供給層との間に配置された電子阻止層をさらに含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記電子阻止層が、正孔供給層組成から電子阻止層組成へ遷移する傾斜組成を含む、請求項5に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層が、正孔供給層組成から前記光発生構造により近い電子阻止層組成へ遷移する傾斜組成を含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 基板と、
前記基板上のバッファ層と、
前記バッファ層上にわたるストレインリリーフ構造と
をさらに含む、請求項1に記載の窒化物系発光ヘテロ構造。 - 前記電子供給層が、n型のコンタクト層を含み、前記正孔供給層が、p型のコンタクト層を含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記電子供給層に隣接した少なくとも1つのバリア層をさらに備え、前記少なくとも1つのバリア層が、前記光発生構造に入る電子が、極性光学フォノンのエネルギーとほぼ同じエネルギーを有するバンド構造プロファイルを生じる傾斜組成を含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層に隣接した少なくとも1つのバリア層をさらに備え、前記少なくとも1つのバリア層が、前記光発生構造に入る正孔が、極性光学フォノンのエネルギーとほぼ同じエネルギーを有するバンド構造プロファイルを生じる傾斜組成を含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層が、ドープされた短周期超格子を含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記光発生構造と前記正孔供給層との間に配置されたp型の層をさらに含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記光発生構造上にわたって配置された分布ブラッグ反射器(DBR)構造をさらに含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記DBR構造が、ドープされたp型組成を含む、請求項14に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層上にわたって配置された陽極酸化アルミニウム層をさらに含む、請求項1に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層および前記陽極酸化アルミニウム層が、光結晶を形成する複数の正孔を含む、請求項16に記載の窒化物系発光ヘテロ構造。
- 前記正孔供給層が、正孔のセットを含み、前記正孔の各々が、陽極酸化アルミニウム層にある正孔に整列される、請求項16に記載の窒化物系発光ヘテロ構造。
- 前記正孔のセットの少なくとも1つが、p型層の組成とは異なる屈折率を有する材料を含む、請求項18に記載の窒化物系発光ヘテロ構造。
- 基板と、
前記基板上のバッファ層と、
前記バッファ層上にわたるストレインリリーフ構造と、
前記ストレインリリーフ構造上にわたる電子供給層と、
正孔供給層と、
前記電子供給層と前記正孔供給層との間に配置された光発生構造と
を備え、前記光発生構造が、
各々が傾斜組成を含むバリア層のセットと、
各々が前記バリア層と隣接し、非輻射再結合の原因である少なくとも1つの欠陥の特性半径より小さい厚みを有する量子井戸のセットと
を含む、窒化物系発光デバイス。 - 発光ダイオードまたはレーザの1つとして動作するように構成された、請求項20に記載の窒化物系発光デバイス。
- 基板を獲得するステップと、
前記基板上にわたる電子供給層を形成するステップと、
各々が傾斜組成を含むバリア層のセットを形成する工程と、各々が前記バリア層と隣接し、非輻射再結合の原因である少なくとも1つの欠陥の特性半径より小さい厚みを有する量子井戸のセットを形成する工程とを含む、前記電子供給層上にわたって光発生構造を形成するステップと、
前記光発生構造上にわたる正孔供給層を形成するステップと
を含む、窒化物系発光ヘテロ構造の発生方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63382804P | 2004-12-06 | 2004-12-06 | |
US60/633,828 | 2004-12-06 | ||
US11/292,519 US7326963B2 (en) | 2004-12-06 | 2005-12-02 | Nitride-based light emitting heterostructure |
US11/292,519 | 2005-12-02 | ||
PCT/US2005/043866 WO2006062880A2 (en) | 2004-12-06 | 2005-12-05 | Nitride-based light emitting heterostructure |
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JP2012091174A Division JP5526181B2 (ja) | 2004-12-06 | 2012-04-12 | 窒化物系発光ヘテロ構造 |
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JP2020167321A (ja) * | 2019-03-29 | 2020-10-08 | 旭化成株式会社 | 窒化物半導体発光素子 |
JP2021057528A (ja) * | 2019-10-01 | 2021-04-08 | 旭化成株式会社 | 紫外線発光素子 |
JP7405554B2 (ja) | 2019-10-01 | 2023-12-26 | 旭化成株式会社 | 紫外線発光素子 |
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Publication number | Publication date |
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EP1831933A4 (en) | 2011-05-25 |
US20060118820A1 (en) | 2006-06-08 |
US7326963B2 (en) | 2008-02-05 |
US20080081390A1 (en) | 2008-04-03 |
JP5526181B2 (ja) | 2014-06-18 |
WO2006062880A3 (en) | 2009-06-04 |
JP5342780B2 (ja) | 2013-11-13 |
JP2012165002A (ja) | 2012-08-30 |
WO2006062880A2 (en) | 2006-06-15 |
EP1831933A2 (en) | 2007-09-12 |
US7537950B2 (en) | 2009-05-26 |
EP1831933B1 (en) | 2015-02-18 |
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