JP2008511173A5 - - Google Patents

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Publication number
JP2008511173A5
JP2008511173A5 JP2007529871A JP2007529871A JP2008511173A5 JP 2008511173 A5 JP2008511173 A5 JP 2008511173A5 JP 2007529871 A JP2007529871 A JP 2007529871A JP 2007529871 A JP2007529871 A JP 2007529871A JP 2008511173 A5 JP2008511173 A5 JP 2008511173A5
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JP
Japan
Prior art keywords
layer
substrate
lattice constant
silicon
channel region
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JP2007529871A
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English (en)
Japanese (ja)
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JP5060296B2 (ja
JP2008511173A (ja
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Priority claimed from US10/925,108 external-priority patent/US7288448B2/en
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Publication of JP2008511173A publication Critical patent/JP2008511173A/ja
Publication of JP2008511173A5 publication Critical patent/JP2008511173A5/ja
Application granted granted Critical
Publication of JP5060296B2 publication Critical patent/JP5060296B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007529871A 2004-08-24 2005-07-27 移動度を半導体素子において増加させる方法及び装置 Expired - Lifetime JP5060296B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/925,108 US7288448B2 (en) 2004-08-24 2004-08-24 Method and apparatus for mobility enhancement in a semiconductor device
US10/925,108 2004-08-24
PCT/US2005/026543 WO2006023219A2 (en) 2004-08-24 2005-07-27 Method and apparatus for mobility enhancement in a semiconductor device

Publications (3)

Publication Number Publication Date
JP2008511173A JP2008511173A (ja) 2008-04-10
JP2008511173A5 true JP2008511173A5 (enExample) 2008-09-18
JP5060296B2 JP5060296B2 (ja) 2012-10-31

Family

ID=35943818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007529871A Expired - Lifetime JP5060296B2 (ja) 2004-08-24 2005-07-27 移動度を半導体素子において増加させる方法及び装置

Country Status (7)

Country Link
US (2) US7288448B2 (enExample)
EP (1) EP1784854A2 (enExample)
JP (1) JP5060296B2 (enExample)
KR (1) KR101218841B1 (enExample)
CN (1) CN100533690C (enExample)
TW (1) TWI423342B (enExample)
WO (1) WO2006023219A2 (enExample)

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JP4327104B2 (ja) * 2005-01-20 2009-09-09 富士通マイクロエレクトロニクス株式会社 Ｍｏｓ型電界効果トランジスタの製造方法及びｍｏｓ型電界効果トランジスタ
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KR101576529B1 (ko) * 2010-02-12 2015-12-11 삼성전자주식회사 습식 식각을 이용한 실리콘 파셋트를 갖는 반도체 장치 및 제조방법
US8659054B2 (en) * 2010-10-15 2014-02-25 International Business Machines Corporation Method and structure for pFET junction profile with SiGe channel
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CN103367430B (zh) * 2012-03-29 2016-11-02 中芯国际集成电路制造(上海)有限公司 晶体管以及形成方法
KR20150020845A (ko) * 2013-08-19 2015-02-27 에스케이하이닉스 주식회사 수직 채널을 갖는 반도체 장치, 그를 포함하는 저항 변화 메모리 장치 및 그 제조방법
FR3011119B1 (fr) * 2013-09-23 2017-09-29 Commissariat Energie Atomique Procede de realisation d'un transistor
FR3023411B1 (fr) * 2014-07-07 2017-12-22 Commissariat Energie Atomique Generation localisee de contrainte dans un substrat soi
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