JP2008511142A5 - - Google Patents

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Publication number
JP2008511142A5
JP2008511142A5 JP2007528083A JP2007528083A JP2008511142A5 JP 2008511142 A5 JP2008511142 A5 JP 2008511142A5 JP 2007528083 A JP2007528083 A JP 2007528083A JP 2007528083 A JP2007528083 A JP 2007528083A JP 2008511142 A5 JP2008511142 A5 JP 2008511142A5
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JP
Japan
Prior art keywords
substrate
casing
detector
holding
substrate transfer
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Granted
Application number
JP2007528083A
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English (en)
Japanese (ja)
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JP2008511142A (ja
JP5386082B2 (ja
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Priority claimed from US11/207,231 external-priority patent/US8888433B2/en
Publication of JP2008511142A publication Critical patent/JP2008511142A/ja
Publication of JP2008511142A5 publication Critical patent/JP2008511142A5/ja
Application granted granted Critical
Publication of JP5386082B2 publication Critical patent/JP5386082B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007528083A 2004-08-19 2005-08-19 低収容力のキャリア及びその使用方法 Expired - Lifetime JP5386082B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US60336104P 2004-08-19 2004-08-19
US60/603,361 2004-08-19
US11/207,231 2005-08-19
US11/207,231 US8888433B2 (en) 2004-08-19 2005-08-19 Reduced capacity carrier and method of use
PCT/US2005/029757 WO2006023838A2 (en) 2004-08-19 2005-08-19 Reduced capacity carrier and method of use

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011221201A Division JP2012015550A (ja) 2004-08-19 2011-10-05 低収容キャリアの使用方法

Publications (3)

Publication Number Publication Date
JP2008511142A JP2008511142A (ja) 2008-04-10
JP2008511142A5 true JP2008511142A5 (OSRAM) 2013-10-03
JP5386082B2 JP5386082B2 (ja) 2014-01-15

Family

ID=35968256

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007528083A Expired - Lifetime JP5386082B2 (ja) 2004-08-19 2005-08-19 低収容力のキャリア及びその使用方法
JP2011221201A Pending JP2012015550A (ja) 2004-08-19 2011-10-05 低収容キャリアの使用方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011221201A Pending JP2012015550A (ja) 2004-08-19 2011-10-05 低収容キャリアの使用方法

Country Status (6)

Country Link
US (2) US8888433B2 (OSRAM)
EP (1) EP1786710A4 (OSRAM)
JP (2) JP5386082B2 (OSRAM)
KR (1) KR101233101B1 (OSRAM)
CN (2) CN101044074B (OSRAM)
WO (1) WO2006023838A2 (OSRAM)

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TWI746204B (zh) 2015-08-04 2021-11-11 日商昕芙旎雅股份有限公司 門開閉系統及具備門開閉系統之載入埠
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JP6969936B2 (ja) * 2017-08-29 2021-11-24 株式会社ディスコ ウエーハ収容カセット
JP7009194B2 (ja) * 2017-12-12 2022-01-25 株式会社ディスコ ウエーハ生成装置および搬送トレー
JP7164396B2 (ja) * 2018-10-29 2022-11-01 株式会社ディスコ ウエーハ生成装置
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KR102015485B1 (ko) * 2019-02-18 2019-08-28 주식회사 윈텍 오엘이디 제조 챔버 장비용 오토 리드 장치
JP6721852B2 (ja) * 2019-07-16 2020-07-15 シンフォニアテクノロジー株式会社 ロードポート
KR102278078B1 (ko) * 2019-10-17 2021-07-19 세메스 주식회사 기판 반송 장치 및 기판 처리 장치
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