JP2008306180A5 - - Google Patents

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Publication number
JP2008306180A5
JP2008306180A5 JP2008132105A JP2008132105A JP2008306180A5 JP 2008306180 A5 JP2008306180 A5 JP 2008306180A5 JP 2008132105 A JP2008132105 A JP 2008132105A JP 2008132105 A JP2008132105 A JP 2008132105A JP 2008306180 A5 JP2008306180 A5 JP 2008306180A5
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JP
Japan
Prior art keywords
substrate
edge
backing plate
film
profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008132105A
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English (en)
Japanese (ja)
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JP2008306180A (ja
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Publication date
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Publication of JP2008306180A publication Critical patent/JP2008306180A/ja
Publication of JP2008306180A5 publication Critical patent/JP2008306180A5/ja
Pending legal-status Critical Current

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JP2008132105A 2007-05-21 2008-05-20 膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置 Pending JP2008306180A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93934307P 2007-05-21 2007-05-21

Publications (2)

Publication Number Publication Date
JP2008306180A JP2008306180A (ja) 2008-12-18
JP2008306180A5 true JP2008306180A5 (enrdf_load_stackoverflow) 2011-06-23

Family

ID=40072855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008132105A Pending JP2008306180A (ja) 2007-05-21 2008-05-20 膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置

Country Status (3)

Country Link
US (1) US20080293336A1 (enrdf_load_stackoverflow)
JP (1) JP2008306180A (enrdf_load_stackoverflow)
TW (1) TW200908123A (enrdf_load_stackoverflow)

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* Cited by examiner, † Cited by third party
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JP2008288600A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 基板の縁部除外領域の大きさを制御する方法及び装置
US20080293337A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for polishing a notch of a substrate by substrate vibration
JP2008284684A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 研磨アームを使用して基板の縁部を研磨する方法及び装置
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
TW200908122A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a rolling backing pad for substrate polishing
US20080291448A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for finding a substrate notch center
US8142260B2 (en) * 2007-05-21 2012-03-27 Applied Materials, Inc. Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads
TW200908124A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a bevel polishing head with an efficient tape routing arrangement
JP2009119537A (ja) * 2007-11-12 2009-06-04 Toshiba Corp 基板処理方法及び基板処理装置
JP5393039B2 (ja) 2008-03-06 2014-01-22 株式会社荏原製作所 研磨装置
US20090264053A1 (en) * 2008-04-21 2009-10-22 Applied Materials, Inc. Apparatus and methods for using a polishing tape cassette
US20100105290A1 (en) * 2008-10-24 2010-04-29 Applied Materials, Inc. Methods and apparatus for indicating a polishing tape end
JP5663295B2 (ja) * 2010-01-15 2015-02-04 株式会社荏原製作所 研磨装置、研磨方法、研磨具を押圧する押圧部材
JP2011224680A (ja) * 2010-04-16 2011-11-10 Ebara Corp 研磨方法及び研磨装置
US8968537B2 (en) 2011-02-09 2015-03-03 Applied Materials, Inc. PVD sputtering target with a protected backing plate
JP5886602B2 (ja) 2011-03-25 2016-03-16 株式会社荏原製作所 研磨装置および研磨方法
US9457447B2 (en) 2011-03-28 2016-10-04 Ebara Corporation Polishing apparatus and polishing method
JP6223873B2 (ja) * 2014-03-14 2017-11-01 株式会社荏原製作所 研磨装置及び研磨方法
EP3567139B1 (en) 2018-05-11 2021-04-07 SiCrystal GmbH Chamfered silicon carbide substrate and method of chamfering
EP3567138B1 (en) 2018-05-11 2020-03-25 SiCrystal GmbH Chamfered silicon carbide substrate and method of chamfering
JP2021037585A (ja) * 2019-09-03 2021-03-11 株式会社荏原製作所 研磨装置

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WO2006116263A1 (en) * 2005-04-25 2006-11-02 Applied Materials, Inc. Methods and apparatus for cleaning and edge of a substrate
US20070131653A1 (en) * 2005-12-09 2007-06-14 Ettinger Gary C Methods and apparatus for processing a substrate
JP2008036783A (ja) * 2006-08-08 2008-02-21 Sony Corp 研磨方法および研磨装置
TW200908122A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a rolling backing pad for substrate polishing
JP2008284684A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 研磨アームを使用して基板の縁部を研磨する方法及び装置
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
US8142260B2 (en) * 2007-05-21 2012-03-27 Applied Materials, Inc. Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads
TW200908125A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for polishing a notch of a substrate using a polishing pad
TW200908124A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a bevel polishing head with an efficient tape routing arrangement
JP2008290233A (ja) * 2007-05-21 2008-12-04 Applied Materials Inc 半導体製造における基板斜面及び縁部の研磨用の高性能及び低価格の研磨テープのための方法及び装置
JP2008288600A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 基板の縁部除外領域の大きさを制御する方法及び装置
US20080291448A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for finding a substrate notch center
US20080293337A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for polishing a notch of a substrate by substrate vibration

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