JP2008272806A5 - - Google Patents

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Publication number
JP2008272806A5
JP2008272806A5 JP2007120812A JP2007120812A JP2008272806A5 JP 2008272806 A5 JP2008272806 A5 JP 2008272806A5 JP 2007120812 A JP2007120812 A JP 2007120812A JP 2007120812 A JP2007120812 A JP 2007120812A JP 2008272806 A5 JP2008272806 A5 JP 2008272806A5
Authority
JP
Japan
Prior art keywords
optical
optical block
objective lens
processing apparatus
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007120812A
Other languages
English (en)
Japanese (ja)
Other versions
JP5086687B2 (ja
JP2008272806A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007120812A priority Critical patent/JP5086687B2/ja
Priority claimed from JP2007120812A external-priority patent/JP5086687B2/ja
Priority to TW097114836A priority patent/TWI405633B/zh
Priority to KR1020080038670A priority patent/KR101523293B1/ko
Priority to CN2008100960621A priority patent/CN101298117B/zh
Publication of JP2008272806A publication Critical patent/JP2008272806A/ja
Publication of JP2008272806A5 publication Critical patent/JP2008272806A5/ja
Application granted granted Critical
Publication of JP5086687B2 publication Critical patent/JP5086687B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007120812A 2007-05-01 2007-05-01 レーザ加工装置 Expired - Fee Related JP5086687B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007120812A JP5086687B2 (ja) 2007-05-01 2007-05-01 レーザ加工装置
TW097114836A TWI405633B (zh) 2007-05-01 2008-04-23 雷射加工裝置
KR1020080038670A KR101523293B1 (ko) 2007-05-01 2008-04-25 레이저 가공 장치
CN2008100960621A CN101298117B (zh) 2007-05-01 2008-04-30 激光加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007120812A JP5086687B2 (ja) 2007-05-01 2007-05-01 レーザ加工装置

Publications (3)

Publication Number Publication Date
JP2008272806A JP2008272806A (ja) 2008-11-13
JP2008272806A5 true JP2008272806A5 (enExample) 2010-06-24
JP5086687B2 JP5086687B2 (ja) 2012-11-28

Family

ID=40051446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007120812A Expired - Fee Related JP5086687B2 (ja) 2007-05-01 2007-05-01 レーザ加工装置

Country Status (4)

Country Link
JP (1) JP5086687B2 (enExample)
KR (1) KR101523293B1 (enExample)
CN (1) CN101298117B (enExample)
TW (1) TWI405633B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5301955B2 (ja) * 2008-11-13 2013-09-25 オリンパス株式会社 欠陥修正装置
JP5346690B2 (ja) * 2009-05-26 2013-11-20 オリンパス株式会社 レーザ照射装置
DE102010020183B4 (de) * 2010-05-11 2013-07-11 Precitec Kg Laserschneidkopf und Verfahren zum Schneiden eines Werkstücks mittels eines Laserschneidkopfes
TWI642507B (zh) 2011-12-16 2018-12-01 應用材料股份有限公司 用於雷射處理設備的輻射源及多重光束組合器
CN102608875A (zh) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 基于修补机台的玻璃基板补刻号方法及玻璃基板补刻号装置
CN103203541B (zh) * 2013-02-04 2015-05-13 张立国 一种激光加工装置
CN104375383B (zh) * 2013-08-13 2017-08-29 上海微电子装备有限公司 用于光刻设备的调焦调平检测装置及方法
JP6321932B2 (ja) * 2013-09-24 2018-05-09 株式会社小糸製作所 車両用前照灯
CN104227243A (zh) * 2014-09-11 2014-12-24 深圳英诺激光科技有限公司 一种硬质材料激光深加工设备及加工方法
CN106141457B (zh) * 2016-07-19 2018-01-12 张立国 一种激光钻孔系统及激光钻孔方法
CN106735875B (zh) * 2017-02-20 2019-01-18 湖北工业大学 一种基于液晶空间光调制器的激光柔性微加工系统及方法
CN107824968A (zh) * 2017-11-08 2018-03-23 深圳泰德激光科技有限公司 Ccd视觉定位的激光焊接装置
KR102710198B1 (ko) * 2018-10-30 2024-09-27 하마마츠 포토닉스 가부시키가이샤 레이저 가공 헤드 및 레이저 가공 장치
CN111098043B (zh) * 2020-01-19 2024-12-27 中国科学院宁波材料技术与工程研究所 水导激光加工装置和加工系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2220936Y (zh) * 1995-04-07 1996-02-28 中国科学院长春光学精密机械研究所 一种新型激光照排机
JPH09206965A (ja) * 1996-01-26 1997-08-12 Keyence Corp レーザマーク装置
JP2006227198A (ja) * 2005-02-16 2006-08-31 Olympus Corp レーザ加工装置
TWI367800B (en) * 2005-06-17 2012-07-11 Olympus Corp Laser beam machining method and apparatus
JP4429974B2 (ja) * 2005-06-17 2010-03-10 オリンパス株式会社 レーザ加工方法および装置
JP4947933B2 (ja) * 2005-07-26 2012-06-06 オリンパス株式会社 レーザリペア装置

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