JP2016212154A5 - - Google Patents

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Publication number
JP2016212154A5
JP2016212154A5 JP2015093223A JP2015093223A JP2016212154A5 JP 2016212154 A5 JP2016212154 A5 JP 2016212154A5 JP 2015093223 A JP2015093223 A JP 2015093223A JP 2015093223 A JP2015093223 A JP 2015093223A JP 2016212154 A5 JP2016212154 A5 JP 2016212154A5
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JP
Japan
Prior art keywords
scanning microscope
microscope system
scanning
observation object
photodetector
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Application number
JP2015093223A
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English (en)
Japanese (ja)
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JP2016212154A (ja
JP6342842B2 (ja
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Priority to JP2015093223A priority Critical patent/JP6342842B2/ja
Priority claimed from JP2015093223A external-priority patent/JP6342842B2/ja
Priority to US15/132,698 priority patent/US10191263B2/en
Publication of JP2016212154A publication Critical patent/JP2016212154A/ja
Publication of JP2016212154A5 publication Critical patent/JP2016212154A5/ja
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Publication of JP6342842B2 publication Critical patent/JP6342842B2/ja
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JP2015093223A 2015-04-30 2015-04-30 走査型顕微鏡システム Active JP6342842B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015093223A JP6342842B2 (ja) 2015-04-30 2015-04-30 走査型顕微鏡システム
US15/132,698 US10191263B2 (en) 2015-04-30 2016-04-19 Scanning microscopy system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015093223A JP6342842B2 (ja) 2015-04-30 2015-04-30 走査型顕微鏡システム

Publications (3)

Publication Number Publication Date
JP2016212154A JP2016212154A (ja) 2016-12-15
JP2016212154A5 true JP2016212154A5 (enExample) 2017-12-28
JP6342842B2 JP6342842B2 (ja) 2018-06-13

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Family Applications (1)

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JP2015093223A Active JP6342842B2 (ja) 2015-04-30 2015-04-30 走査型顕微鏡システム

Country Status (2)

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US (1) US10191263B2 (enExample)
JP (1) JP6342842B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6447148B2 (ja) * 2015-01-09 2019-01-09 株式会社ブイ・テクノロジー 投影露光装置
EP4465115A3 (en) 2016-09-27 2025-02-12 Intuitive Surgical Operations, Inc. Micro optic assemblies and optical interrogation systems
JP6784603B2 (ja) * 2017-01-05 2020-11-11 東レエンジニアリング株式会社 分光測定方法および分光測定装置
WO2018226836A1 (en) * 2017-06-06 2018-12-13 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Multi-focal structured illumination microscopy systems and methods
US11086113B2 (en) 2017-06-06 2021-08-10 The United States Of America Multi-focal structured illumination microscopy systems and methods
JP7256604B2 (ja) * 2018-03-16 2023-04-12 株式会社ディスコ 非破壊検出方法
JP7134727B2 (ja) * 2018-06-13 2022-09-12 横河電機株式会社 ディスク走査型顕微鏡
US11543640B2 (en) * 2020-04-21 2023-01-03 Laxco Incorporated Confocal optical system and components thereof
DE102022108448B3 (de) * 2022-04-07 2023-05-04 Till I.D. Gmbh Superauflösende Mikroskopvorrichtung mit rotierender Scheibe

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3327432B2 (ja) * 1994-10-11 2002-09-24 横河電機株式会社 共焦点光スキャナ
JP3350918B2 (ja) * 1996-03-26 2002-11-25 株式会社高岳製作所 2次元配列型共焦点光学装置
JP3159006B2 (ja) * 1995-11-10 2001-04-23 横河電機株式会社 共焦点光スキャナ
JP3816632B2 (ja) * 1997-05-14 2006-08-30 オリンパス株式会社 走査型顕微鏡
JP5000839B2 (ja) 2000-09-18 2012-08-15 ヴァンサン・ロウエ 共焦点用光学走査装置
FR2826736A1 (fr) 2001-06-28 2003-01-03 Vincent Lauer Dispositif a balayage optique confocal
US6639201B2 (en) * 2001-11-07 2003-10-28 Applied Materials, Inc. Spot grid array imaging system
US6934079B2 (en) * 2002-05-03 2005-08-23 Max-Planck-Gesellschaft zur Förderung der Wissen-schaften e. V. Confocal microscope comprising two microlens arrays and a pinhole diaphragm array
JP2004239627A (ja) * 2003-02-03 2004-08-26 Olympus Corp 分光器及びこれを備えた共焦点顕微鏡
US7142340B2 (en) 2003-10-31 2006-11-28 Hewlett-Packard Development Company, L.P. Optical scanner apparatuses and optical scanning methods
DE102007009551B3 (de) 2007-02-27 2008-08-21 Ludwig-Maximilian-Universität Vorrichtung für die konfokale Beleuchtung einer Probe
EP2225598A1 (en) * 2007-12-21 2010-09-08 Koninklijke Philips Electronics N.V. Scanning microscope and method of imaging a sample.
JP2011085759A (ja) * 2009-10-15 2011-04-28 Yokogawa Electric Corp 共焦点光スキャナ
JP5495740B2 (ja) * 2009-12-02 2014-05-21 オリンパス株式会社 共焦点走査型顕微鏡
JP5412394B2 (ja) * 2010-09-30 2014-02-12 オリンパス株式会社 標本観察装置
JP5955574B2 (ja) * 2012-02-03 2016-07-20 株式会社東光高岳 立体形状計測装置
WO2013126762A1 (en) 2012-02-23 2013-08-29 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Office Of Technology Transfer, National Institutes Of Health Multi-focal structured illumination microscopy systems and methods
DE102013001238B4 (de) * 2013-01-25 2020-06-10 Carl Zeiss Microscopy Gmbh Lichtmikroskop und Mikroskopieverfahren
DE102013005563A1 (de) 2013-03-28 2014-10-02 Carl Zeiss Microscopy Gmbh Lichtmikroskop und verfahren zum untersuchen einer mikroskopischen probe
US20150131148A1 (en) * 2013-11-12 2015-05-14 Intelligent Imaging Innovations, Inc. Spinning disk confocal using paired microlens disks
JP5999121B2 (ja) * 2014-02-17 2016-09-28 横河電機株式会社 共焦点光スキャナ
JP6090607B2 (ja) * 2014-12-08 2017-03-08 横河電機株式会社 共焦点スキャナ、共焦点顕微鏡
US9766442B2 (en) 2014-12-08 2017-09-19 Yokogawa Electric Corporation Confocal scanner and confocal microscope

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