JP2008268788A5 - - Google Patents
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- Publication number
- JP2008268788A5 JP2008268788A5 JP2007115131A JP2007115131A JP2008268788A5 JP 2008268788 A5 JP2008268788 A5 JP 2008268788A5 JP 2007115131 A JP2007115131 A JP 2007115131A JP 2007115131 A JP2007115131 A JP 2007115131A JP 2008268788 A5 JP2008268788 A5 JP 2008268788A5
- Authority
- JP
- Japan
- Prior art keywords
- registered trademark
- epolite
- manufactured
- trade name
- denacol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 description 3
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007115131A JP5061703B2 (ja) | 2007-04-25 | 2007-04-25 | 感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007115131A JP5061703B2 (ja) | 2007-04-25 | 2007-04-25 | 感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008268788A JP2008268788A (ja) | 2008-11-06 |
| JP2008268788A5 true JP2008268788A5 (https=) | 2010-05-13 |
| JP5061703B2 JP5061703B2 (ja) | 2012-10-31 |
Family
ID=40048338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007115131A Expired - Fee Related JP5061703B2 (ja) | 2007-04-25 | 2007-04-25 | 感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5061703B2 (https=) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5589187B2 (ja) * | 2008-04-23 | 2014-09-17 | 株式会社 マイクロプロセス | 感光性樹脂組成物およびパターン形成方法 |
| KR101113063B1 (ko) * | 2008-05-22 | 2012-02-15 | 주식회사 엘지화학 | 폴리이미드와 노볼락 수지를 포함하는 감광성 수지 조성물 |
| CN103091987B (zh) | 2008-12-26 | 2016-11-23 | 日立化成株式会社 | 正型感光性树脂组合物、抗蚀图形的制造方法、半导体装置以及电子器件 |
| JP2010256034A (ja) * | 2009-04-21 | 2010-11-11 | Jsr Corp | 樹脂組成物及びバイオチップの製造方法 |
| JP5691645B2 (ja) * | 2011-02-28 | 2015-04-01 | 住友ベークライト株式会社 | 感光性樹脂組成物、硬化膜、保護膜、絶縁膜、半導体装置、および表示体装置 |
| JP5831092B2 (ja) * | 2011-09-27 | 2015-12-09 | 東レ株式会社 | ポジ型感光性樹脂組成物 |
| KR101882217B1 (ko) * | 2011-10-18 | 2018-07-26 | 주식회사 동진쎄미켐 | 오엘이디용 폴리이미드 감광성 수지 조성물 |
| JP2013134346A (ja) * | 2011-12-26 | 2013-07-08 | Hitachi Chemical Co Ltd | 感光性樹脂組成物、パターン硬化膜の製造方法、半導体装置及び電子部品 |
| JP2014059463A (ja) * | 2012-09-18 | 2014-04-03 | Asahi Kasei E-Materials Corp | 感光性樹脂組成物 |
| WO2014046062A1 (ja) * | 2012-09-18 | 2014-03-27 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
| JP6255740B2 (ja) * | 2013-06-24 | 2018-01-10 | 住友ベークライト株式会社 | ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜、半導体装置、表示体装置、およびポジ型感光性樹脂組成物の製造方法 |
| CN107430335B (zh) * | 2015-04-01 | 2021-04-02 | 东丽株式会社 | 感光性着色树脂组合物 |
| WO2017057281A1 (ja) * | 2015-09-30 | 2017-04-06 | 東レ株式会社 | ネガ型感光性樹脂組成物、硬化膜、硬化膜を具備する素子及び表示装置、並びにその製造方法 |
| JP6513596B2 (ja) * | 2016-04-04 | 2019-05-15 | 日立化成株式会社 | 感光性樹脂組成物、パターン硬化膜の製造方法、半導体装置及び電子部品 |
| DE112017002428T5 (de) * | 2016-05-12 | 2019-01-31 | Quingzhou Cui | Polysulfonamide-redistributionszusammensetzungen und verfahren zu ihrer verwendung |
| JP6259033B2 (ja) * | 2016-09-01 | 2018-01-10 | 旭化成株式会社 | 感光性樹脂組成物 |
| US11739215B2 (en) * | 2017-02-21 | 2023-08-29 | Zeon Corporation | Photosensitive resin composition |
| JP2018028690A (ja) * | 2017-10-31 | 2018-02-22 | 日立化成株式会社 | 感光性樹脂組成物、パターン硬化膜の製造方法、半導体装置及び電子部品 |
| JP6523419B2 (ja) * | 2017-12-07 | 2019-05-29 | 旭化成株式会社 | 感光性樹脂組成物 |
| CN112654927B (zh) | 2018-09-18 | 2024-02-27 | 东丽株式会社 | 感光性树脂组合物、树脂片、固化膜、有机el显示装置、半导体电子部件、半导体器件、及有机el显示装置的制造方法 |
| CN111458978B (zh) * | 2020-04-17 | 2024-08-30 | 北京北旭电子材料有限公司 | 一种光刻胶组合物 |
| JPWO2022181419A1 (https=) * | 2021-02-26 | 2022-09-01 | ||
| KR20240110932A (ko) | 2021-11-26 | 2024-07-16 | 도레이 카부시키가이샤 | 감광성 수지 조성물, 경화물, 유기 el 표시 장치, 반도체 장치 및 경화물의 제조 방법 |
| JP2023118158A (ja) * | 2022-02-15 | 2023-08-25 | 日鉄ケミカル＆マテリアル株式会社 | ジヒドロキシ樹脂、エポキシ樹脂、その製造方法、及びエポキシ樹脂組成物並びに硬化物 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005250160A (ja) * | 2004-03-04 | 2005-09-15 | Kyocera Chemical Corp | ポジ型感光性樹脂組成物及びその硬化物 |
| WO2005121895A1 (ja) * | 2004-06-08 | 2005-12-22 | Nissan Chemical Industries, Ltd. | ポジ型感光性樹脂組成物 |
| JP4677887B2 (ja) * | 2004-11-24 | 2011-04-27 | 東レ株式会社 | 感光性樹脂組成物 |
-
2007
- 2007-04-25 JP JP2007115131A patent/JP5061703B2/ja not_active Expired - Fee Related
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