JP2008252118A - ドープされた金属酸化物誘電体材料を有する電子部品及びドープされた金属酸化物誘電体材料を有する電子部品の作製プロセス - Google Patents
ドープされた金属酸化物誘電体材料を有する電子部品及びドープされた金属酸化物誘電体材料を有する電子部品の作製プロセス Download PDFInfo
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- 239000003989 dielectric material Substances 0.000 title claims abstract description 47
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 43
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title description 8
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910021480 group 4 element Inorganic materials 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 abstract description 23
- 239000000463 material Substances 0.000 abstract description 14
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 229910052726 zirconium Inorganic materials 0.000 abstract description 8
- 229910052735 hafnium Inorganic materials 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 62
- 239000010409 thin film Substances 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 239000003990 capacitor Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000013590 bulk material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
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- Semiconductor Memories (AREA)
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Abstract
【解決手段】 ドープされた金属酸化物誘電体材料及びこの材料で作られた電子部品が明らかにされている。金属酸化物はIII族又はV族金属酸化物(たとえば、Al2O3、Y2O3、Ta2O5またはV2O5)で、金属ドーパントはIV族元素(Zr、Si、TiおよびHf)である。金属酸化物は約0.1重量パーセントないし約30重量パーセントのドーパントを含む。本発明のドープされた金属酸化物誘電体は、多くの異なる電子部品及びデバイス中で用いられる。たとえば、ドープされた金属酸化物誘電体は、MOSデバイスのゲート誘電体として用いられる。ドープされた金属酸化物誘電体はまた、フラッシュメモリデバイスのポリ間誘電体材料としても用いられる。
【選択図】 図1
Description
本発明は半導体デバイス及び部品、より具体的には、半導体デバイス及び要素中で用いるための金属酸化物誘電体材料に係る。
本出願は1997年6月6日に出願された米国特許出願第08/871,024号と一部連続したものであり、この特許出願は1996年10月10日に出願された米国暫定出願60/027612号の利点を、特許請求の範囲としたものである。米国特許出願第08/871,024号が、ここに参照文献として含まれている。
本発明は誘電体材料層を有する集積回路デバイス及び線形容量のような集積又は個別部品のような電子部品に係る。誘電体材料はIV族元素をドープしたIII族金属又はVB族金属の金属酸化物に係る。III族(族はここで用いるように、メンデレーフ周期律表の族を意味する)金属酸化物の例には、アルミニウム酸化物(Al2O3)及びイットリウム酸化物(Y2O3)が含まれる。VB族金属酸化物の例は、五酸化タンタル(Ta2O5)及び五酸化バナジウム(V2O5)である。適当なIV族ドーパントの例には、ジルコニウム(Zr)、シリコン(Si)、チタン(Ti)及びハフニウム(Hf)が含まれる。ドーパントは金属酸化物の約0.1重量パーセントないし約30重量パーセントである。もし、ドーパントが金属酸化物の約0.1重量パーセントないし約10重量パーセントであると有利である。
本発明はドープされた金属酸化物材料に係る。これらのドープされた金属酸化物は、MOSデバイス、フラッシュEPROMデバイス、DRAM用容量、線形容量及び他の容量といった各種デバイス部品中の誘電体材料層を形成するために用いられる。本発明のドープされた金属酸化物誘電体材料は、IV族元素をドープしたIII族金属又はVB族金属の金属酸化物である。与えられた金属とドーパントの組合せに対し、もしドーパントに対する酸化物形成のエネルギーが、ドープされる金属酸化物に対する酸化物形成のエネルギーより小さければ有利である。III族(族はここではメンデレーフの周期律表の族を意味する)金属酸化物の例には、アルミニウム酸化物(Al2O3)及びイットリウム酸化物(Y2O3)が含まれる。VB族金属酸化物の例は、五酸化タンタル(Ta2O5)及び五酸化バナジウム(V2O5)である。適当なIV族ドーパントの例には、ジルコニウム(Zr)、シリコン(Si)、チタン(Ti)及びハフニウム(Hf)が含まれる。ドープされた金属酸化物は、約0.1重量パーセントないし約30重量パーセントのドーパントを含む。もし、ドープされた金属酸化物が約0.1重量パーセントないし約10重量パーセントのドーパントを含むと有利である。
ドープ及びアンドープアルミニウム酸化物のいくつかの薄膜を形成した。用いたドーパントはジルコニウム及びシリコンである。薄膜は6インチシリコンウエハ上に形成した。金属酸化物薄膜を基板上に形成する前に、フッ化水素酸の水溶液(15:1HF)を用いて、基板を清浄化した。清浄化後、それ以上自然の酸化物が成長しないように、シリコン基板をロードロック真空容器中に置いた。
11 ソース
12 ドレイン
13 ゲート
14,15 側壁スペーサ
16,17 フィールド酸化物領域
110 基板
112 ソース
114 ドレイン
116 チャネル領域
120 ゲート酸化物層
122 フローティングゲート,ポリシリコン層
124 IPD,IPD層
126 制御ゲート
Claims (1)
- 0.1重量パーセントないし30重量パーセントになるように少なくとも1種類のIV族元素をドープしたIII族金属又はVB族金属の金属酸化物である誘電体材料含む電子部品。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/041,434 US5923056A (en) | 1996-10-10 | 1998-03-12 | Electronic components with doped metal oxide dielectric materials and a process for making electronic components with doped metal oxide dielectric materials |
Related Parent Applications (1)
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JP11065742A Division JPH11297867A (ja) | 1998-03-12 | 1999-03-12 | ド―プされた金属酸化物誘電体材料を有する電子部品及びド―プされた金属酸化物誘電体材料を有する電子部品の作製プロセス |
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JP2012269037A Division JP5650185B2 (ja) | 1998-03-12 | 2012-12-10 | 誘電体材料を含む個別要素又は半導体デバイスを含む集積回路デバイス |
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JP2008252118A true JP2008252118A (ja) | 2008-10-16 |
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JP11065742A Pending JPH11297867A (ja) | 1998-03-12 | 1999-03-12 | ド―プされた金属酸化物誘電体材料を有する電子部品及びド―プされた金属酸化物誘電体材料を有する電子部品の作製プロセス |
JP2008139084A Pending JP2008252118A (ja) | 1998-03-12 | 2008-05-28 | ドープされた金属酸化物誘電体材料を有する電子部品及びドープされた金属酸化物誘電体材料を有する電子部品の作製プロセス |
JP2012269037A Expired - Fee Related JP5650185B2 (ja) | 1998-03-12 | 2012-12-10 | 誘電体材料を含む個別要素又は半導体デバイスを含む集積回路デバイス |
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JP11065742A Pending JPH11297867A (ja) | 1998-03-12 | 1999-03-12 | ド―プされた金属酸化物誘電体材料を有する電子部品及びド―プされた金属酸化物誘電体材料を有する電子部品の作製プロセス |
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JP2012269037A Expired - Fee Related JP5650185B2 (ja) | 1998-03-12 | 2012-12-10 | 誘電体材料を含む個別要素又は半導体デバイスを含む集積回路デバイス |
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JP (3) | JPH11297867A (ja) |
KR (1) | KR100319571B1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100604536B1 (ko) * | 1999-12-24 | 2006-07-24 | 주식회사 하이닉스반도체 | 반도체 소자의 게이트 산화막 형성방법 |
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AU2001245388A1 (en) * | 2000-03-07 | 2001-09-17 | Asm America, Inc. | Graded thin films |
US7419903B2 (en) | 2000-03-07 | 2008-09-02 | Asm International N.V. | Thin films |
JP2001257344A (ja) | 2000-03-10 | 2001-09-21 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
KR100390831B1 (ko) * | 2000-12-18 | 2003-07-10 | 주식회사 하이닉스반도체 | 플라즈마 원자층 증착법에 의한 탄탈륨옥사이드 유전막형성 방법 |
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US20060180851A1 (en) | 2001-06-28 | 2006-08-17 | Samsung Electronics Co., Ltd. | Non-volatile memory devices and methods of operating the same |
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KR100440777B1 (ko) * | 2001-11-12 | 2004-07-21 | 주식회사 하이닉스반도체 | 반도체 소자의 캐패시터 제조방법 |
KR100655780B1 (ko) | 2004-12-20 | 2006-12-08 | 삼성전자주식회사 | 플래시 메모리 장치 및 그 제조 방법 |
KR100648632B1 (ko) | 2005-01-25 | 2006-11-23 | 삼성전자주식회사 | 높은 유전율을 갖는 유전체 구조물의 제조 방법 및 이를 포함하는 반도체 소자의 제조 방법 |
KR100623177B1 (ko) | 2005-01-25 | 2006-09-13 | 삼성전자주식회사 | 높은 유전율을 갖는 유전체 구조물, 이의 제조 방법, 이를포함하는 불휘발성 반도체 메모리 장치 및 그 제조 방법 |
JP4719035B2 (ja) | 2006-03-13 | 2011-07-06 | 株式会社東芝 | 不揮発性半導体メモリ装置及びその製造方法 |
JP2007053392A (ja) * | 2006-10-02 | 2007-03-01 | Toshiba Corp | Mis型電界効果トランジスタの製造方法及び半導体記憶装置の製造方法 |
JP5060110B2 (ja) | 2006-11-27 | 2012-10-31 | 株式会社東芝 | 不揮発性半導体メモリ装置及びその製造方法 |
CN102037547B (zh) * | 2008-04-28 | 2014-05-14 | 台湾积体电路制造股份有限公司 | 形成含纳米丛集介电层的方法及包括上述介电层的装置 |
KR102014132B1 (ko) | 2017-11-28 | 2019-08-26 | 광운대학교 산학협력단 | 고성능 igzo tft를 위한 저온 용액 공정 기반의 고품질 al2o3 bn 절연막 제조 방법 및 그 igzo tft |
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1999
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- 1999-03-12 JP JP11065742A patent/JPH11297867A/ja active Pending
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2008
- 2008-05-28 JP JP2008139084A patent/JP2008252118A/ja active Pending
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JPS5861634A (ja) * | 1981-10-09 | 1983-04-12 | Fujitsu Ltd | 半導体装置用誘電体層の製造方法 |
JPS61156865A (ja) * | 1984-12-28 | 1986-07-16 | Nec Corp | 半導体装置 |
JPS632363A (ja) * | 1986-06-20 | 1988-01-07 | Nec Corp | 容量膜 |
JPS6450428A (en) * | 1987-08-20 | 1989-02-27 | Tokyo Noukou Univ | Oxide thin film having high permittivity and formation thereof |
JPS6471166A (en) | 1987-09-10 | 1989-03-16 | Sharp Kk | Manufacture of tantalum oxide thin film |
JPH06188420A (ja) * | 1992-12-16 | 1994-07-08 | Matsushita Electric Ind Co Ltd | 絶縁層薄膜、及びそれを用いたtft液晶表示装置 |
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JP2013093589A (ja) | 2013-05-16 |
KR19990077767A (ko) | 1999-10-25 |
KR100319571B1 (ko) | 2002-01-09 |
JPH11297867A (ja) | 1999-10-29 |
JP5650185B2 (ja) | 2015-01-07 |
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