JP2008108849A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
【解決手段】電極パッドが形成された半導体チップと、前記電極パッド上に形成された、突起部を有するバンプと、前記半導体チップ上に形成された絶縁層と、前記バンプに接続される導電パターンと、を有する半導体装置であって、前記突起部の先端が前記導電パターンに挿入されているとともに、挿入された前記先端が扁平した構造となっていることを特徴とする半導体装置。
【選択図】図1
Description
101 半導体チップ
101A 基板
101a 領域
101b デバイス面
102 保護層
103 電極パッド
104 バンプ
104A バンプ本体
104B 突起部
104C 接続部
104D 先端部
105 絶縁層
106 導電パターン
107 第1の導電パターン
107A 導電層
108 第2の導電パターン
108A 導電層
109 ソルダーレジスト層
110 はんだバンプ
Claims (7)
- 基板の半導体チップに相当する領域に形成された電極パッド上に、突起部を有するバンプを形成する第1の工程と、
前記基板上に絶縁層と導電層を形成する第2の工程と、
前記導電層を押圧し、該導電層から露出した前記突起部の先端を圧延する第3の工程と、
前記導電層を給電層とした電解メッキにより、前記バンプに接続される導電パターンを形成する第4の工程と、
前記基板を個片化する第5の工程と、を有することを特徴とする半導体装置の製造方法。 - 前記第2の工程は、
前記基板上に前記絶縁層を形成する工程と、
前記絶縁層上に、支持層と積層された前記導電層を貼り付ける工程と、
前記支持層を除去する工程と、を有することを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第2の工程は、支持層上に積層された前記絶縁層と前記導電層を前記基板に貼り付ける工程と、
前記支持層を除去する工程と、を有することを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第3の工程では、前記導電層とともに前記絶縁層が押圧されて加熱されることで当該絶縁層が硬化されることを特徴とする請求項1乃至3のいずれか1項記載の半導体装置の製造方法。
- 前記第1の工程では、ボンディングワイヤによって前記バンプが形成されることを特徴とする請求項1乃至4のいずれか1項記載の半導体装置の製造方法。
- 電極パッドが形成された半導体チップと、
前記電極パッド上に形成された、突起部を有するバンプと、
前記半導体チップ上に形成された絶縁層と、
前記バンプに接続される導電パターンと、を有する半導体装置であって、
前記突起部の先端が前記導電パターンに挿入されているとともに、挿入された前記先端が扁平した構造となっていることを特徴とする半導体装置。 - 前記先端は、前記導電パターンを構成する、積層された第1の導電パターンと第2の導電パターンの間で扁平した構造であることを特徴とする請求項6記載の半導体装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006289149A JP2008108849A (ja) | 2006-10-24 | 2006-10-24 | 半導体装置および半導体装置の製造方法 |
US11/870,743 US7786580B2 (en) | 2006-10-24 | 2007-10-11 | Semiconductor device and method for manufacturing the same |
TW096138960A TW200820358A (en) | 2006-10-24 | 2007-10-18 | Semiconductor device and method for manufacturing the same |
KR1020070105325A KR20080036925A (ko) | 2006-10-24 | 2007-10-19 | 반도체 장치 및 그 제조 방법 |
DE602007014000T DE602007014000D1 (de) | 2006-10-24 | 2007-10-24 | Halbleiterbauelement und Herstellungsverfahren dafür |
CN2007101514892A CN101170072B (zh) | 2006-10-24 | 2007-10-24 | 半导体器件及其制造方法 |
EP07020813A EP1933377B1 (en) | 2006-10-24 | 2007-10-24 | Semiconductor device and method for manufacturing the same |
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JP2006289149A JP2008108849A (ja) | 2006-10-24 | 2006-10-24 | 半導体装置および半導体装置の製造方法 |
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Publication Number | Publication Date |
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JP2008108849A true JP2008108849A (ja) | 2008-05-08 |
JP2008108849A5 JP2008108849A5 (ja) | 2009-10-22 |
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JP2006289149A Pending JP2008108849A (ja) | 2006-10-24 | 2006-10-24 | 半導体装置および半導体装置の製造方法 |
Country Status (7)
Country | Link |
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US (1) | US7786580B2 (ja) |
EP (1) | EP1933377B1 (ja) |
JP (1) | JP2008108849A (ja) |
KR (1) | KR20080036925A (ja) |
CN (1) | CN101170072B (ja) |
DE (1) | DE602007014000D1 (ja) |
TW (1) | TW200820358A (ja) |
Cited By (1)
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JP2012074461A (ja) * | 2010-09-28 | 2012-04-12 | Teramikros Inc | 半導体装置およびその製造方法 |
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JP5048420B2 (ja) | 2007-08-17 | 2012-10-17 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
JP5064158B2 (ja) | 2007-09-18 | 2012-10-31 | 新光電気工業株式会社 | 半導体装置とその製造方法 |
CN104599987A (zh) * | 2014-12-19 | 2015-05-06 | 南通富士通微电子股份有限公司 | 半导体圆片级封装工艺 |
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JP2001267359A (ja) * | 2000-03-14 | 2001-09-28 | Toshiba Corp | 半導体装置の製造方法及び半導体装置 |
JP2004047725A (ja) * | 2002-07-11 | 2004-02-12 | Sumitomo Bakelite Co Ltd | 半導体装置及び製造方法 |
JP2004193497A (ja) * | 2002-12-13 | 2004-07-08 | Nec Electronics Corp | チップサイズパッケージおよびその製造方法 |
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JP3313547B2 (ja) | 1995-08-30 | 2002-08-12 | 沖電気工業株式会社 | チップサイズパッケージの製造方法 |
JP3801300B2 (ja) * | 1997-03-21 | 2006-07-26 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP3252745B2 (ja) * | 1997-03-31 | 2002-02-04 | 関西日本電気株式会社 | 半導体装置およびその製造方法 |
JP2002050716A (ja) * | 2000-08-02 | 2002-02-15 | Dainippon Printing Co Ltd | 半導体装置及びその作製方法 |
KR100378285B1 (en) * | 2001-06-15 | 2003-03-29 | Dongbu Electronics Co Ltd | Semiconductor package and fabricating method thereof |
WO2003067656A1 (fr) * | 2002-02-06 | 2003-08-14 | Ibiden Co., Ltd. | Carte de montage pour puce a semiconducteur, realisation correspondante, et module a semiconducteur |
JP2004247530A (ja) * | 2003-02-14 | 2004-09-02 | Renesas Technology Corp | 半導体装置及びその製造方法 |
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2006
- 2006-10-24 JP JP2006289149A patent/JP2008108849A/ja active Pending
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- 2007-10-18 TW TW096138960A patent/TW200820358A/zh unknown
- 2007-10-19 KR KR1020070105325A patent/KR20080036925A/ko not_active Application Discontinuation
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- 2007-10-24 CN CN2007101514892A patent/CN101170072B/zh not_active Expired - Fee Related
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001267359A (ja) * | 2000-03-14 | 2001-09-28 | Toshiba Corp | 半導体装置の製造方法及び半導体装置 |
JP2004047725A (ja) * | 2002-07-11 | 2004-02-12 | Sumitomo Bakelite Co Ltd | 半導体装置及び製造方法 |
JP2004193497A (ja) * | 2002-12-13 | 2004-07-08 | Nec Electronics Corp | チップサイズパッケージおよびその製造方法 |
Cited By (1)
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JP2012074461A (ja) * | 2010-09-28 | 2012-04-12 | Teramikros Inc | 半導体装置およびその製造方法 |
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DE602007014000D1 (de) | 2011-06-01 |
CN101170072A (zh) | 2008-04-30 |
EP1933377A3 (en) | 2009-10-21 |
EP1933377A2 (en) | 2008-06-18 |
CN101170072B (zh) | 2011-02-16 |
KR20080036925A (ko) | 2008-04-29 |
TW200820358A (en) | 2008-05-01 |
US20090001569A1 (en) | 2009-01-01 |
US7786580B2 (en) | 2010-08-31 |
EP1933377B1 (en) | 2011-04-20 |
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