JP2008091880A5 - - Google Patents

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Publication number
JP2008091880A5
JP2008091880A5 JP2007216427A JP2007216427A JP2008091880A5 JP 2008091880 A5 JP2008091880 A5 JP 2008091880A5 JP 2007216427 A JP2007216427 A JP 2007216427A JP 2007216427 A JP2007216427 A JP 2007216427A JP 2008091880 A5 JP2008091880 A5 JP 2008091880A5
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JP2007216427A
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Japanese (ja)
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JP2008091880A (ja
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Priority claimed from SG200605650-1A external-priority patent/SG140481A1/en
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Publication of JP2008091880A publication Critical patent/JP2008091880A/ja
Publication of JP2008091880A5 publication Critical patent/JP2008091880A5/ja
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JP2007216427A 2006-08-22 2007-08-22 マイクロおよびナノ構造の作製方法 Pending JP2008091880A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200605650-1A SG140481A1 (en) 2006-08-22 2006-08-22 A method for fabricating micro and nano structures

Publications (2)

Publication Number Publication Date
JP2008091880A JP2008091880A (ja) 2008-04-17
JP2008091880A5 true JP2008091880A5 (enExample) 2012-10-18

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Family Applications (1)

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JP2007216427A Pending JP2008091880A (ja) 2006-08-22 2007-08-22 マイクロおよびナノ構造の作製方法

Country Status (4)

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US (2) US7833425B2 (enExample)
JP (1) JP2008091880A (enExample)
KR (1) KR20080018137A (enExample)
SG (1) SG140481A1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG140481A1 (en) * 2006-08-22 2008-03-28 Agency Science Tech & Res A method for fabricating micro and nano structures
JP2011526074A (ja) * 2008-06-26 2011-09-29 スリーエム イノベイティブ プロパティズ カンパニー 半導体光変換構成体
KR20110031957A (ko) * 2008-06-26 2011-03-29 쓰리엠 이노베이티브 프로퍼티즈 컴파니 광 변환 구조물
US20110101402A1 (en) * 2008-06-26 2011-05-05 Jun-Ying Zhang Semiconductor light converting construction
US8324000B2 (en) * 2008-06-26 2012-12-04 3M Innovative Properties Company Method of fabricating light extractor
JP5690348B2 (ja) * 2009-11-17 2015-03-25 スリーエム イノベイティブ プロパティズ カンパニー 光吸収性基板の表面の微細構造化
JP5298035B2 (ja) * 2010-01-14 2013-09-25 パナソニック株式会社 基板の加工方法
CN102259832A (zh) 2010-05-27 2011-11-30 清华大学 三维纳米结构阵列的制备方法
CN102259831A (zh) * 2010-05-27 2011-11-30 清华大学 三维纳米结构阵列
CN101859856B (zh) * 2010-06-04 2016-06-15 清华大学 发光二极管
TWI449658B (zh) * 2010-06-07 2014-08-21 Hon Hai Prec Ind Co Ltd 三維奈米結構陣列之製備方法
KR101795020B1 (ko) 2010-07-30 2017-11-07 엘지이노텍 주식회사 표면적 향상 나노 임프린트용 스탬프 및 그 제조 방법
CN102097518B (zh) * 2010-12-15 2012-12-19 清华大学 太阳能电池及其制备方法
KR101340845B1 (ko) * 2011-01-13 2013-12-13 한국기계연구원 기능성 표면의 제조방법
JP5862354B2 (ja) * 2011-04-15 2016-02-16 三菱化学株式会社 窒化物系発光ダイオード素子とその製造方法
US9515223B2 (en) 2012-08-21 2016-12-06 Oji Holdings Corporation Semiconductor light emitting device substrate including an uneven structure having convex portions, and a flat surface therebetween
US8852974B2 (en) 2012-12-06 2014-10-07 Epistar Corporation Semiconductor light-emitting device and method for manufacturing the same
CN103107251A (zh) * 2013-02-27 2013-05-15 中国科学院半导体研究所 一种具有六棱锥形p型氮化镓的发光二极管制备方法
JP6256220B2 (ja) * 2013-06-17 2018-01-10 王子ホールディングス株式会社 半導体発光素子用基板、半導体発光素子、半導体発光素子用基板の製造方法、および、半導体発光素子の製造方法
TWI548113B (zh) 2014-03-11 2016-09-01 國立臺灣大學 半導體發光元件及其製造方法
EP3187908A4 (en) * 2014-08-29 2018-05-09 National Institute for Materials Science Electromagnetic wave absorbing/radiating material, method for manufacturing same, and infrared source
CN107293625B (zh) * 2017-06-19 2019-02-22 南京大学 AlGaN异质结纳米柱阵列发光器件及其制备方法
JP6841198B2 (ja) * 2017-09-28 2021-03-10 豊田合成株式会社 発光素子の製造方法
US11037794B2 (en) * 2018-09-26 2021-06-15 The Regents Of The University Of California Methods for multiple-patterning nanosphere lithography for fabrication of periodic three-dimensional hierarchical nanostructures

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136460A (ja) * 1991-06-19 1993-06-01 Matsushita Electric Ind Co Ltd マイクロレンズ形成方法
JPH10320772A (ja) * 1997-05-22 1998-12-04 Hitachi Ltd 高密度磁気記録媒体作製法およびこれによる高密度磁気記録媒体
JP5019664B2 (ja) * 1998-07-28 2012-09-05 アイメック 高効率で光を発するデバイスおよびそのようなデバイスの製造方法
US6504180B1 (en) 1998-07-28 2003-01-07 Imec Vzw And Vrije Universiteit Method of manufacturing surface textured high-efficiency radiating devices and devices obtained therefrom
US6350388B1 (en) 1999-08-19 2002-02-26 Micron Technology, Inc. Method for patterning high density field emitter tips
DE19943406C2 (de) 1999-09-10 2001-07-19 Osram Opto Semiconductors Gmbh Lichtemissionsdiode mit Oberflächenstrukturierung
JP3802424B2 (ja) 2002-01-15 2006-07-26 株式会社東芝 半導体発光素子及びその製造方法
JP3782357B2 (ja) * 2002-01-18 2006-06-07 株式会社東芝 半導体発光素子の製造方法
WO2004061980A1 (de) * 2002-12-30 2004-07-22 Osram Opto Semiconductors Gmbh Verfahren zum aufrauhen einer oberfläche eines körpers und optoelektronisches bauelement
US7419912B2 (en) * 2004-04-01 2008-09-02 Cree, Inc. Laser patterning of light emitting devices
JP2006261659A (ja) * 2005-02-18 2006-09-28 Sumitomo Chemical Co Ltd 半導体発光素子の製造方法
SG140481A1 (en) 2006-08-22 2008-03-28 Agency Science Tech & Res A method for fabricating micro and nano structures

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