JP2008041648A5 - - Google Patents
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- Publication number
- JP2008041648A5 JP2008041648A5 JP2007162555A JP2007162555A JP2008041648A5 JP 2008041648 A5 JP2008041648 A5 JP 2008041648A5 JP 2007162555 A JP2007162555 A JP 2007162555A JP 2007162555 A JP2007162555 A JP 2007162555A JP 2008041648 A5 JP2008041648 A5 JP 2008041648A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mass spectrometry
- inorganic material
- material film
- porous membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 17
- 239000010408 film Substances 0.000 claims 15
- 229910010272 inorganic material Inorganic materials 0.000 claims 12
- 239000011147 inorganic material Substances 0.000 claims 12
- 238000004949 mass spectrometry Methods 0.000 claims 12
- 239000012528 membrane Substances 0.000 claims 10
- 239000000463 material Substances 0.000 claims 4
- 229920000642 polymer Polymers 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007162555A JP5147307B2 (ja) | 2006-07-11 | 2007-06-20 | 質量分析用基板及び質量分析用基板の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006190418 | 2006-07-11 | ||
| JP2006190418 | 2006-07-11 | ||
| JP2007162555A JP5147307B2 (ja) | 2006-07-11 | 2007-06-20 | 質量分析用基板及び質量分析用基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008041648A JP2008041648A (ja) | 2008-02-21 |
| JP2008041648A5 true JP2008041648A5 (enExample) | 2010-07-15 |
| JP5147307B2 JP5147307B2 (ja) | 2013-02-20 |
Family
ID=39176396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007162555A Expired - Fee Related JP5147307B2 (ja) | 2006-07-11 | 2007-06-20 | 質量分析用基板及び質量分析用基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5147307B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5129628B2 (ja) * | 2008-03-25 | 2013-01-30 | 財団法人神奈川科学技術アカデミー | 質量分析法に用いられる試料ターゲットおよびその製造方法、並びに当該試料ターゲットを用いた質量分析装置 |
| WO2013098606A1 (en) * | 2011-12-28 | 2013-07-04 | Dh Technologies Development Pte. Ltd. | Gas diffuser ion inlet |
| JP6398096B2 (ja) * | 2014-03-05 | 2018-10-03 | 三菱瓦斯化学株式会社 | 樹脂構造体、並びにそれを用いたプリプレグ、樹脂シート、金属箔張積層板、及びプリント配線板 |
| CN107076705B (zh) * | 2015-09-03 | 2019-11-26 | 浜松光子学株式会社 | 表面辅助激光解吸电离法、质量分析方法和质量分析装置 |
| EP3214437B1 (en) * | 2015-09-03 | 2020-02-26 | Hamamatsu Photonics K.K. | Sample supporting body and method of manufacturing sample supporting body |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3940546B2 (ja) * | 1999-06-07 | 2007-07-04 | 株式会社東芝 | パターン形成方法およびパターン形成材料 |
| JP2001119003A (ja) * | 1999-10-22 | 2001-04-27 | Toyota Central Res & Dev Lab Inc | 多結晶半導体膜の製造方法 |
| JP2003081625A (ja) * | 2001-09-10 | 2003-03-19 | Canon Inc | 多孔質膜の製造方法 |
| JP2005059132A (ja) * | 2003-08-11 | 2005-03-10 | Canon Inc | 多孔質体、及びその作製方法 |
| JP4512589B2 (ja) * | 2004-02-26 | 2010-07-28 | 独立行政法人科学技術振興機構 | 表面加工が施された試料保持面を有する試料ターゲットおよびその製造方法、並びに当該試料ターゲットを用いた質量分析装置 |
| DE602005025401D1 (de) * | 2004-10-29 | 2011-01-27 | Japan Science & Tech Agency | Hes verfahren unter verwendung davon |
| JP4563162B2 (ja) * | 2004-12-10 | 2010-10-13 | 旭化成株式会社 | ミクロ相分離構造体及びミクロ相分離体の製造方法 |
| WO2007046162A1 (ja) * | 2005-10-20 | 2007-04-26 | Japan Science And Technology Agency | 質量分析法に用いられる試料ターゲットおよびその製造方法、並びに当該試料ターゲットを用いた質量分析装置 |
-
2007
- 2007-06-20 JP JP2007162555A patent/JP5147307B2/ja not_active Expired - Fee Related
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