JP2007528129A5 - - Google Patents

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Publication number
JP2007528129A5
JP2007528129A5 JP2007502910A JP2007502910A JP2007528129A5 JP 2007528129 A5 JP2007528129 A5 JP 2007528129A5 JP 2007502910 A JP2007502910 A JP 2007502910A JP 2007502910 A JP2007502910 A JP 2007502910A JP 2007528129 A5 JP2007528129 A5 JP 2007528129A5
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JP
Japan
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wafer
optical
level test
test arrangement
opto
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JP2007502910A
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English (en)
Japanese (ja)
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JP2007528129A (ja
JP4847440B2 (ja
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Priority claimed from US11/075,430 external-priority patent/US7109739B2/en
Publication of JP2007528129A publication Critical patent/JP2007528129A/ja
Publication of JP2007528129A5 publication Critical patent/JP2007528129A5/ja
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Publication of JP4847440B2 publication Critical patent/JP4847440B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2007502910A 2004-03-08 2005-03-08 ウエハレベルでの光−電子テスト装置および方法 Expired - Fee Related JP4847440B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US55131604P 2004-03-08 2004-03-08
US60/551,316 2004-03-08
US11/075,430 US7109739B2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
PCT/US2005/007473 WO2005086786A2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
US11/075,430 2005-03-08

Publications (3)

Publication Number Publication Date
JP2007528129A JP2007528129A (ja) 2007-10-04
JP2007528129A5 true JP2007528129A5 (https=) 2008-04-03
JP4847440B2 JP4847440B2 (ja) 2011-12-28

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JP2007502910A Expired - Fee Related JP4847440B2 (ja) 2004-03-08 2005-03-08 ウエハレベルでの光−電子テスト装置および方法

Country Status (5)

Country Link
US (1) US7109739B2 (https=)
JP (1) JP4847440B2 (https=)
KR (1) KR101141014B1 (https=)
CA (1) CA2558483C (https=)
WO (1) WO2005086786A2 (https=)

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