JP4847440B2 - ウエハレベルでの光−電子テスト装置および方法 - Google Patents

ウエハレベルでの光−電子テスト装置および方法 Download PDF

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Publication number
JP4847440B2
JP4847440B2 JP2007502910A JP2007502910A JP4847440B2 JP 4847440 B2 JP4847440 B2 JP 4847440B2 JP 2007502910 A JP2007502910 A JP 2007502910A JP 2007502910 A JP2007502910 A JP 2007502910A JP 4847440 B2 JP4847440 B2 JP 4847440B2
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optical
wafer
electronic
opto
level test
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Japanese (ja)
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JP2007528129A (ja
JP2007528129A5 (https=
Inventor
ゴートスカー，プラカシュ
ギロン，マーガレット
モンゴメリー，ロバート，キース
パテル，ヴィプルクマー
シャスリ，カルペンドゥ
パサク，ソハム
ピエド，デーヴィッド
ヤヌシェフスキ，キャサリン，エー．
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シオプティカル インコーポレーテッド
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Optical Integrated Circuits (AREA)
JP2007502910A 2004-03-08 2005-03-08 ウエハレベルでの光−電子テスト装置および方法 Expired - Fee Related JP4847440B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US55131604P 2004-03-08 2004-03-08
US60/551,316 2004-03-08
US11/075,430 US7109739B2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
PCT/US2005/007473 WO2005086786A2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
US11/075,430 2005-03-08

Publications (3)

Publication Number Publication Date
JP2007528129A JP2007528129A (ja) 2007-10-04
JP2007528129A5 JP2007528129A5 (https=) 2008-04-03
JP4847440B2 true JP4847440B2 (ja) 2011-12-28

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JP2007502910A Expired - Fee Related JP4847440B2 (ja) 2004-03-08 2005-03-08 ウエハレベルでの光−電子テスト装置および方法

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Country Link
US (1) US7109739B2 (https=)
JP (1) JP4847440B2 (https=)
KR (1) KR101141014B1 (https=)
CA (1) CA2558483C (https=)
WO (1) WO2005086786A2 (https=)

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CN108152864A (zh) * 2017-12-14 2018-06-12 深圳市帝迈生物技术有限公司 样本试管类型的识别设备及样本试管类型的检测方法
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Also Published As

Publication number Publication date
CA2558483C (en) 2015-01-06
US20050194990A1 (en) 2005-09-08
CA2558483A1 (en) 2005-09-22
US7109739B2 (en) 2006-09-19
KR101141014B1 (ko) 2012-05-02
JP2007528129A (ja) 2007-10-04
KR20060130679A (ko) 2006-12-19
WO2005086786A3 (en) 2006-06-22
WO2005086786A2 (en) 2005-09-22

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