KR101141014B1 - 웨이퍼-레벨 광-전자 테스트 장치 및 방법 - Google Patents

웨이퍼-레벨 광-전자 테스트 장치 및 방법 Download PDF

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Publication number
KR101141014B1
KR101141014B1 KR1020067019862A KR20067019862A KR101141014B1 KR 101141014 B1 KR101141014 B1 KR 101141014B1 KR 1020067019862 A KR1020067019862 A KR 1020067019862A KR 20067019862 A KR20067019862 A KR 20067019862A KR 101141014 B1 KR101141014 B1 KR 101141014B1
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South Korea
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opto
optical
electronic
test
soi
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KR1020067019862A
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English (en)
Korean (ko)
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KR20060130679A (ko
Inventor
프라카쉬 고스오스카
마가랫 지히론
로버트 키스 몬트고매리
비풀쿠마 파탤
칼팬두 샤스트리
소햄 팻학
데비드 파이디
캐더린 에이. 야누쉬프스키
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시옵티컬 인코포레이티드
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Publication of KR20060130679A publication Critical patent/KR20060130679A/ko
Application granted granted Critical
Publication of KR101141014B1 publication Critical patent/KR101141014B1/ko
Assigned to 씨스코 시스템즈, 인코포레이티드 reassignment 씨스코 시스템즈, 인코포레이티드 권리의 전부이전등록 Assignors: 라이트와이어, 엘엘씨.
Assigned to 씨스코 테크놀러지, 인코포레이티드 reassignment 씨스코 테크놀러지, 인코포레이티드 권리의 전부이전등록 Assignors: 씨스코 시스템즈, 인코포레이티드
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Optical Integrated Circuits (AREA)
KR1020067019862A 2004-03-08 2005-03-08 웨이퍼-레벨 광-전자 테스트 장치 및 방법 Expired - Fee Related KR101141014B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US55131604P 2004-03-08 2004-03-08
US60/551,316 2004-03-08
US11/075,430 US7109739B2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
PCT/US2005/007473 WO2005086786A2 (en) 2004-03-08 2005-03-08 Wafer-level opto-electronic testing apparatus and method
US11/075,430 2005-03-08

Publications (2)

Publication Number Publication Date
KR20060130679A KR20060130679A (ko) 2006-12-19
KR101141014B1 true KR101141014B1 (ko) 2012-05-02

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KR1020067019862A Expired - Fee Related KR101141014B1 (ko) 2004-03-08 2005-03-08 웨이퍼-레벨 광-전자 테스트 장치 및 방법

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Country Link
US (1) US7109739B2 (https=)
JP (1) JP4847440B2 (https=)
KR (1) KR101141014B1 (https=)
CA (1) CA2558483C (https=)
WO (1) WO2005086786A2 (https=)

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CN108152864A (zh) * 2017-12-14 2018-06-12 深圳市帝迈生物技术有限公司 样本试管类型的识别设备及样本试管类型的检测方法
DE102018108283A1 (de) * 2018-04-09 2019-10-10 Carl Zeiss Smt Gmbh Elektro-optische Leiterplatte zur Kontaktierung von photonischen integrierten Schaltungen
US10429582B1 (en) 2018-05-02 2019-10-01 Globalfoundries Inc. Waveguide-to-waveguide couplers with multiple tapers
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JP7107094B2 (ja) 2018-08-23 2022-07-27 富士通オプティカルコンポーネンツ株式会社 光デバイスおよび光送受信モジュール
KR102594414B1 (ko) * 2018-10-24 2023-10-30 삼성전자주식회사 프로브 장치 및 이를 포함하는 테스트 장치
US12072445B2 (en) * 2018-11-27 2024-08-27 Wuhan Vanjee Optoelectronic Technology Co., Ltd. Phased array LiDAR transmitting chip of multi-layer materials, manufacturing method thereof, and LiDAR device
TWI672480B (zh) 2018-12-03 2019-09-21 財團法人工業技術研究院 光學量測裝置與方法
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Also Published As

Publication number Publication date
CA2558483C (en) 2015-01-06
US20050194990A1 (en) 2005-09-08
CA2558483A1 (en) 2005-09-22
US7109739B2 (en) 2006-09-19
JP2007528129A (ja) 2007-10-04
KR20060130679A (ko) 2006-12-19
WO2005086786A3 (en) 2006-06-22
JP4847440B2 (ja) 2011-12-28
WO2005086786A2 (en) 2005-09-22

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