JP2007515785A - 二段階のウェーハ塗布アンダフィル - Google Patents
二段階のウェーハ塗布アンダフィル Download PDFInfo
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- JP2007515785A JP2007515785A JP2006541112A JP2006541112A JP2007515785A JP 2007515785 A JP2007515785 A JP 2007515785A JP 2006541112 A JP2006541112 A JP 2006541112A JP 2006541112 A JP2006541112 A JP 2006541112A JP 2007515785 A JP2007515785 A JP 2007515785A
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- JP
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- Prior art keywords
- underfill
- acrylate
- wafer
- underfill composition
- photoinitiator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 39
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- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 10
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- APZPSKFMSWZPKL-UHFFFAOYSA-N [3-hydroxy-2,2-bis(hydroxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(CO)CO APZPSKFMSWZPKL-UHFFFAOYSA-N 0.000 claims description 2
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- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 25
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- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 10
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000032798 delamination Effects 0.000 description 6
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- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
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- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
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- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
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- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- JZMPIUODFXBXSC-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.CCOC(N)=O JZMPIUODFXBXSC-UHFFFAOYSA-N 0.000 description 4
- 238000009472 formulation Methods 0.000 description 4
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- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 3
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 3
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- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 2
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical compound CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 2
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- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 2
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- 125000000217 alkyl group Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 2
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- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 2
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- MLKIVXXYTZKNMI-UHFFFAOYSA-N 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one Chemical compound CCCCCCCCCCCCC1=CC=C(C(=O)C(C)(C)O)C=C1 MLKIVXXYTZKNMI-UHFFFAOYSA-N 0.000 description 1
- CKFQIYSINORIFY-UHFFFAOYSA-N 1-[4-(2-methylprop-2-enoyl)piperazin-1-yl]butane-1,3-dione Chemical compound CC(=O)CC(=O)N1CCN(C(=O)C(C)=C)CC1 CKFQIYSINORIFY-UHFFFAOYSA-N 0.000 description 1
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- IQRXEGCBJWNCHY-UHFFFAOYSA-N 2,6-dihydroxyheptan-4-one Chemical compound CC(O)CC(=O)CC(C)O IQRXEGCBJWNCHY-UHFFFAOYSA-N 0.000 description 1
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- ZHZIKFVMPFWPJE-UHFFFAOYSA-N 2-(2-methylprop-2-enoylamino)ethyl 3-oxopentanoate Chemical compound CCC(=O)CC(=O)OCCNC(=O)C(C)=C ZHZIKFVMPFWPJE-UHFFFAOYSA-N 0.000 description 1
- IBDVWXAVKPRHCU-UHFFFAOYSA-N 2-(2-methylprop-2-enoyloxy)ethyl 3-oxobutanoate Chemical compound CC(=O)CC(=O)OCCOC(=O)C(C)=C IBDVWXAVKPRHCU-UHFFFAOYSA-N 0.000 description 1
- WZWXRQASCOKEEG-UHFFFAOYSA-N 2-(prop-2-enoylamino)ethyl 2-cyanoacetate Chemical compound C=CC(=O)NCCOC(=O)CC#N WZWXRQASCOKEEG-UHFFFAOYSA-N 0.000 description 1
- FIQBJLHOPOSODG-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxycarbonyl]benzoic acid Chemical compound CC(=C)C(=O)OCCOC(=O)C1=CC=CC=C1C(O)=O FIQBJLHOPOSODG-UHFFFAOYSA-N 0.000 description 1
- FQGBNAQGHQSREJ-UHFFFAOYSA-N 2-[butyl(3-oxobutanoyl)amino]ethyl prop-2-enoate Chemical compound CCCCN(C(=O)CC(C)=O)CCOC(=O)C=C FQGBNAQGHQSREJ-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical compound CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
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US52400703P | 2003-11-21 | 2003-11-21 | |
PCT/US2004/017749 WO2005056675A1 (fr) | 2003-11-21 | 2004-06-02 | Agents d'encapsulation appliques a une plaquette a deux etages |
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JP (1) | JP2007515785A (fr) |
KR (1) | KR100975088B1 (fr) |
CN (1) | CN1946795B (fr) |
WO (1) | WO2005056675A1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012509961A (ja) * | 2008-11-21 | 2012-04-26 | ヘンケル コーポレイション | 相分離硬化性組成物 |
JP2016506978A (ja) * | 2013-01-23 | 2016-03-07 | ヘンケル アイピー アンド ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング | アンダーフィル組成物およびそれを使用したパッケージング工程 |
JP2016117853A (ja) * | 2014-12-22 | 2016-06-30 | 日立化成株式会社 | アンダーフィル材、電子部品装置の製造方法及び電子部品装置 |
JP2018021163A (ja) * | 2016-08-05 | 2018-02-08 | スリーエム イノベイティブ プロパティズ カンパニー | 放熱用樹脂組成物、その硬化物、及びこれらの使用方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7326369B2 (en) | 2005-03-07 | 2008-02-05 | National Starch And Chemical Investment Holding Corporation | Low stress conductive adhesive |
JP4699189B2 (ja) * | 2005-12-01 | 2011-06-08 | 日東電工株式会社 | 半導体装置の製造方法及び電子部品 |
JP4846406B2 (ja) * | 2006-03-28 | 2011-12-28 | リンテック株式会社 | チップ用保護膜形成用シート |
DE102006042032A1 (de) * | 2006-09-07 | 2008-03-27 | Infineon Technologies Ag | Halbleiterbauelement |
WO2009079122A1 (fr) * | 2007-12-18 | 2009-06-25 | 3M Innovative Properties Company | Procédé de revêtement de fils fins et composition durcissable à cet effet |
CN101768316B (zh) * | 2010-03-04 | 2011-09-14 | 陕西科技大学 | 一种聚苯胺/p(mma-ba-hea)导电复合材料的制备方法 |
WO2011114935A1 (fr) * | 2010-03-18 | 2011-09-22 | 新日鐵化学株式会社 | Composition de résine époxyde et substance durcie |
CN102408679B (zh) * | 2011-08-29 | 2012-12-26 | 天威新能源控股有限公司 | 一种环氧树脂复合材料 |
US20150147533A1 (en) * | 2012-05-25 | 2015-05-28 | Soken Chemical & Engineering Co., Ltd. | Photocurable Resin Composition for Imprinting, Production Method and Structure Thereof |
CN106995584B (zh) * | 2016-10-27 | 2019-08-23 | 武汉市三选科技有限公司 | 电容膜组成物和电容膜及该电容膜之制备和封装方法 |
JP2020105253A (ja) * | 2018-12-26 | 2020-07-09 | スリーエム イノベイティブ プロパティズ カンパニー | シール材形成用組成物、シール材、シール材の熱硬化物及び接着構造体の製造方法 |
CN111635493B (zh) * | 2019-06-26 | 2022-09-20 | 苏州太湖电工新材料股份有限公司 | 一种高导热的改性环氧树脂的制备方法 |
IT202000023443A1 (it) | 2020-10-05 | 2022-04-05 | Prolab Mat S R L | Rete sequenziale polimerica compenetrante o semi-compenetrante e processo per ottenerla |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11228610A (ja) * | 1998-02-18 | 1999-08-24 | Jsr Corp | 光硬化性樹脂組成物 |
WO2003052813A2 (fr) * | 2001-12-14 | 2003-06-26 | National Starch And Chemical Investment Holding Corporation | Matiere de remplissage sous-jacent pouvant passer a l'etat b a double traitement thermique pour plaquette |
JP2003204148A (ja) * | 2001-10-29 | 2003-07-18 | Fujitsu Ltd | 電極間接続構造体の形成方法および電極間接続構造体 |
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DE69940916D1 (de) * | 1998-02-18 | 2009-07-09 | Dsm Ip Assets Bv | Fotohärtbare flüssige Harzzusammensetzung |
US20050256219A1 (en) * | 2002-03-11 | 2005-11-17 | Hideaki Takase | Photocurable resin composition and optical component |
JP4213043B2 (ja) * | 2002-03-15 | 2009-01-21 | 太陽インキ製造株式会社 | 硬化性樹脂及びそれを含有する硬化性樹脂組成物 |
US7176044B2 (en) * | 2002-11-25 | 2007-02-13 | Henkel Corporation | B-stageable die attach adhesives |
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- 2004-06-02 EP EP04754369A patent/EP1694769A4/fr not_active Withdrawn
Patent Citations (3)
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JP2012509961A (ja) * | 2008-11-21 | 2012-04-26 | ヘンケル コーポレイション | 相分離硬化性組成物 |
JP2016506978A (ja) * | 2013-01-23 | 2016-03-07 | ヘンケル アイピー アンド ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング | アンダーフィル組成物およびそれを使用したパッケージング工程 |
JP2016117853A (ja) * | 2014-12-22 | 2016-06-30 | 日立化成株式会社 | アンダーフィル材、電子部品装置の製造方法及び電子部品装置 |
JP2018021163A (ja) * | 2016-08-05 | 2018-02-08 | スリーエム イノベイティブ プロパティズ カンパニー | 放熱用樹脂組成物、その硬化物、及びこれらの使用方法 |
Also Published As
Publication number | Publication date |
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KR20070000399A (ko) | 2007-01-02 |
WO2005056675A1 (fr) | 2005-06-23 |
CN1946795A (zh) | 2007-04-11 |
KR100975088B1 (ko) | 2010-08-11 |
CN1946795B (zh) | 2010-06-23 |
EP1694769A1 (fr) | 2006-08-30 |
EP1694769A4 (fr) | 2007-08-29 |
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