JP2007510896A5 - - Google Patents
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- Publication number
- JP2007510896A5 JP2007510896A5 JP2006537478A JP2006537478A JP2007510896A5 JP 2007510896 A5 JP2007510896 A5 JP 2007510896A5 JP 2006537478 A JP2006537478 A JP 2006537478A JP 2006537478 A JP2006537478 A JP 2006537478A JP 2007510896 A5 JP2007510896 A5 JP 2007510896A5
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- support
- region
- assembly
- high reflectivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 21
- 239000000523 sample Substances 0.000 claims 14
- 238000002310 reflectometry Methods 0.000 claims 12
- 238000000576 coating method Methods 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP03025187.0 | 2003-11-04 | ||
| EP03025187A EP1530220A1 (en) | 2003-11-04 | 2003-11-04 | Cantilever assembly |
| PCT/IB2004/003599 WO2005043551A1 (en) | 2003-11-04 | 2004-11-04 | Cantilever assembly |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007510896A JP2007510896A (ja) | 2007-04-26 |
| JP2007510896A5 true JP2007510896A5 (https=) | 2008-04-17 |
| JP4839220B2 JP4839220B2 (ja) | 2011-12-21 |
Family
ID=34429250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006537478A Expired - Fee Related JP4839220B2 (ja) | 2003-11-04 | 2004-11-04 | カンチレバー組立品 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8109135B2 (https=) |
| EP (4) | EP1530220A1 (https=) |
| JP (1) | JP4839220B2 (https=) |
| CN (2) | CN1871665B (https=) |
| AT (1) | ATE524744T1 (https=) |
| WO (1) | WO2005043551A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1530220A1 (en) * | 2003-11-04 | 2005-05-11 | SwissProbe AG | Cantilever assembly |
| EP2657710A1 (en) * | 2012-04-25 | 2013-10-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Characterization structure for an atomic force microscope tip |
| EP3591410A1 (en) * | 2018-07-06 | 2020-01-08 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Probe chip, scan head, scanning probe microscopy device and use of a probe chip |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5245863A (en) * | 1990-07-11 | 1993-09-21 | Olympus Optical Co., Ltd. | Atomic probe microscope |
| JP2945725B2 (ja) * | 1990-07-20 | 1999-09-06 | オリンパス光学工業株式会社 | 原子プローブ顕微鏡 |
| JPH0470506A (ja) * | 1990-07-11 | 1992-03-05 | Olympus Optical Co Ltd | 原子プローブ顕微鏡 |
| JP2967308B2 (ja) | 1991-09-09 | 1999-10-25 | キヤノン株式会社 | 微小カンチレバー型プローブ及びその製造方法、それを備えた表面観察装置及び情報処理装置 |
| US5319961A (en) * | 1991-09-17 | 1994-06-14 | Olympus Optical Co., Ltd. | Cantilever chip for use in scanning probe microscope |
| JPH08297129A (ja) * | 1995-04-26 | 1996-11-12 | Nikon Corp | 原子間力顕微鏡用カンチレバー及びその製造方法 |
| JPH08313541A (ja) * | 1995-05-16 | 1996-11-29 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡用カンチレバー及びその製造方法 |
| JPH09105755A (ja) | 1995-10-11 | 1997-04-22 | Olympus Optical Co Ltd | Afmカンチレバー及びその製造方法 |
| JPH09159680A (ja) | 1995-12-05 | 1997-06-20 | Nikon Corp | カンチレバーホルダー及びこれを用いた加熱装置、並びにこれを用いた加熱・形状計測装置 |
| JPH09196933A (ja) | 1996-01-19 | 1997-07-31 | Canon Inc | プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 |
| JP3599880B2 (ja) * | 1996-03-12 | 2004-12-08 | オリンパス株式会社 | カンチレバーチップ |
| JPH09304410A (ja) | 1996-05-20 | 1997-11-28 | Olympus Optical Co Ltd | Afmカンチレバー |
| US5982009A (en) | 1997-03-01 | 1999-11-09 | Korea Advanced Institute Of Science & Technology | Integrated device of cantilever and light source |
| JP3222410B2 (ja) | 1997-09-29 | 2001-10-29 | セイコーインスツルメンツ株式会社 | カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡 |
| JP3309816B2 (ja) * | 1998-01-22 | 2002-07-29 | 松下電器産業株式会社 | 微細表面形状測定装置及び触針製造方法 |
| JP2001188035A (ja) | 1999-03-17 | 2001-07-10 | Seiko Instruments Inc | 走査型プローブ顕微鏡 |
| JP2002116132A (ja) | 2000-10-04 | 2002-04-19 | Canon Inc | 信号検出装置、該信号検出装置によって構成した走査型原子間力顕微鏡、および信号検出方法 |
| JP2002162335A (ja) * | 2000-11-26 | 2002-06-07 | Yoshikazu Nakayama | 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ |
| US7441444B2 (en) * | 2001-03-30 | 2008-10-28 | The Johns Hopkins University | AFM cantilevers and methods for making and using same |
| JP4646049B2 (ja) * | 2001-07-30 | 2011-03-09 | 国立大学法人金沢大学 | 走査型プローブ顕微鏡 |
| US7313828B2 (en) * | 2001-09-04 | 2007-12-25 | Nokia Corporation | Method and apparatus for protecting software against unauthorized use |
| JP2004198134A (ja) * | 2002-12-16 | 2004-07-15 | Olympus Corp | 走査型プローブ顕微鏡用カンチレバー |
| EP1530220A1 (en) * | 2003-11-04 | 2005-05-11 | SwissProbe AG | Cantilever assembly |
-
2003
- 2003-11-04 EP EP03025187A patent/EP1530220A1/en not_active Withdrawn
-
2004
- 2004-11-04 CN CN200480030683XA patent/CN1871665B/zh not_active Expired - Fee Related
- 2004-11-04 US US10/595,690 patent/US8109135B2/en not_active Expired - Fee Related
- 2004-11-04 WO PCT/IB2004/003599 patent/WO2005043551A1/en not_active Ceased
- 2004-11-04 AT AT04798772T patent/ATE524744T1/de not_active IP Right Cessation
- 2004-11-04 CN CNA200810094453XA patent/CN101286373A/zh active Pending
- 2004-11-04 EP EP08003535A patent/EP1993102A1/en not_active Ceased
- 2004-11-04 JP JP2006537478A patent/JP4839220B2/ja not_active Expired - Fee Related
- 2004-11-04 EP EP08003536A patent/EP1993103A1/en not_active Ceased
- 2004-11-04 EP EP04798772A patent/EP1680788B1/en not_active Expired - Lifetime
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