ATE524744T1 - Gradträger-baugruppe - Google Patents

Gradträger-baugruppe

Info

Publication number
ATE524744T1
ATE524744T1 AT04798772T AT04798772T ATE524744T1 AT E524744 T1 ATE524744 T1 AT E524744T1 AT 04798772 T AT04798772 T AT 04798772T AT 04798772 T AT04798772 T AT 04798772T AT E524744 T1 ATE524744 T1 AT E524744T1
Authority
AT
Austria
Prior art keywords
cantilever
carrier assembly
grade carrier
recessed shape
grade
Prior art date
Application number
AT04798772T
Other languages
English (en)
Inventor
Hans J Hug
Bart Hoogenboom
Sascha Martin
Jinling Yang
Original Assignee
Nano World Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nano World Ag filed Critical Nano World Ag
Application granted granted Critical
Publication of ATE524744T1 publication Critical patent/ATE524744T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
AT04798772T 2003-11-04 2004-11-04 Gradträger-baugruppe ATE524744T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03025187A EP1530220A1 (de) 2003-11-04 2003-11-04 Ausleger Anordnung
PCT/IB2004/003599 WO2005043551A1 (en) 2003-11-04 2004-11-04 Cantilever assembly

Publications (1)

Publication Number Publication Date
ATE524744T1 true ATE524744T1 (de) 2011-09-15

Family

ID=34429250

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04798772T ATE524744T1 (de) 2003-11-04 2004-11-04 Gradträger-baugruppe

Country Status (6)

Country Link
US (1) US8109135B2 (de)
EP (4) EP1530220A1 (de)
JP (1) JP4839220B2 (de)
CN (2) CN1871665B (de)
AT (1) ATE524744T1 (de)
WO (1) WO2005043551A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530220A1 (de) * 2003-11-04 2005-05-11 SwissProbe AG Ausleger Anordnung
EP2657710A1 (de) * 2012-04-25 2013-10-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Charakterisierungsstruktur für eine Atomkraftmikroskopspitze
EP3591410A1 (de) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Sondenchip, abtastkopf, rastersondenmikroskopievorrichtung und verwendung eines sondenchips

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
JP2945725B2 (ja) * 1990-07-20 1999-09-06 オリンパス光学工業株式会社 原子プローブ顕微鏡
JPH0470506A (ja) * 1990-07-11 1992-03-05 Olympus Optical Co Ltd 原子プローブ顕微鏡
JP2967308B2 (ja) 1991-09-09 1999-10-25 キヤノン株式会社 微小カンチレバー型プローブ及びその製造方法、それを備えた表面観察装置及び情報処理装置
US5319961A (en) * 1991-09-17 1994-06-14 Olympus Optical Co., Ltd. Cantilever chip for use in scanning probe microscope
JPH08297129A (ja) 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
JPH08313541A (ja) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
JPH09105755A (ja) 1995-10-11 1997-04-22 Olympus Optical Co Ltd Ａｆｍカンチレバー及びその製造方法
JPH09159680A (ja) 1995-12-05 1997-06-20 Nikon Corp カンチレバーホルダー及びこれを用いた加熱装置、並びにこれを用いた加熱・形状計測装置
JPH09196933A (ja) 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
JP3599880B2 (ja) 1996-03-12 2004-12-08 オリンパス株式会社 カンチレバーチップ
JPH09304410A (ja) 1996-05-20 1997-11-28 Olympus Optical Co Ltd Ａｆｍカンチレバー
US5982009A (en) 1997-03-01 1999-11-09 Korea Advanced Institute Of Science & Technology Integrated device of cantilever and light source
JP3222410B2 (ja) 1997-09-29 2001-10-29 セイコーインスツルメンツ株式会社 カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡
JP3309816B2 (ja) * 1998-01-22 2002-07-29 松下電器産業株式会社 微細表面形状測定装置及び触針製造方法
JP2001188035A (ja) 1999-03-17 2001-07-10 Seiko Instruments Inc 走査型プローブ顕微鏡
JP2002116132A (ja) 2000-10-04 2002-04-19 Canon Inc 信号検出装置、該信号検出装置によって構成した走査型原子間力顕微鏡、および信号検出方法
JP2002162335A (ja) * 2000-11-26 2002-06-07 Yoshikazu Nakayama 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ
WO2002080186A1 (en) * 2001-03-30 2002-10-10 Johns Hopkins University Afm cantilevers and methods for making and using same
JP4646049B2 (ja) 2001-07-30 2011-03-09 国立大学法人金沢大学 走査型プローブ顕微鏡
US7313828B2 (en) * 2001-09-04 2007-12-25 Nokia Corporation Method and apparatus for protecting software against unauthorized use
JP2004198134A (ja) * 2002-12-16 2004-07-15 Olympus Corp 走査型プローブ顕微鏡用カンチレバー
EP1530220A1 (de) * 2003-11-04 2005-05-11 SwissProbe AG Ausleger Anordnung

Also Published As

Publication number Publication date
CN101286373A (zh) 2008-10-15
JP2007510896A (ja) 2007-04-26
EP1680788B1 (de) 2011-09-14
JP4839220B2 (ja) 2011-12-21
CN1871665A (zh) 2006-11-29
CN1871665B (zh) 2011-09-21
US8109135B2 (en) 2012-02-07
WO2005043551A1 (en) 2005-05-12
EP1993103A1 (de) 2008-11-19
EP1530220A1 (de) 2005-05-11
EP1680788A1 (de) 2006-07-19
US20070271996A1 (en) 2007-11-29
EP1993102A1 (de) 2008-11-19

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Legal Events

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