JP4839220B2 - カンチレバー組立品 - Google Patents

カンチレバー組立品 Download PDF

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Publication number
JP4839220B2
JP4839220B2 JP2006537478A JP2006537478A JP4839220B2 JP 4839220 B2 JP4839220 B2 JP 4839220B2 JP 2006537478 A JP2006537478 A JP 2006537478A JP 2006537478 A JP2006537478 A JP 2006537478A JP 4839220 B2 JP4839220 B2 JP 4839220B2
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JP
Japan
Prior art keywords
cantilever
support
region
high reflectivity
range
Prior art date
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Expired - Fee Related
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JP2006537478A
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English (en)
Japanese (ja)
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JP2007510896A5 (https=
JP2007510896A (ja
Inventor
ヨット． ハグ、ハンス
ホーゲンボーム、バルト
マルティン、サシャ
ヤン、ジンリン
Original Assignee
ナノ ワールド アーゲー
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Publication of JP2007510896A5 publication Critical patent/JP2007510896A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP2006537478A 2003-11-04 2004-11-04 カンチレバー組立品 Expired - Fee Related JP4839220B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03025187.0 2003-11-04
EP03025187A EP1530220A1 (en) 2003-11-04 2003-11-04 Cantilever assembly
PCT/IB2004/003599 WO2005043551A1 (en) 2003-11-04 2004-11-04 Cantilever assembly

Publications (3)

Publication Number Publication Date
JP2007510896A JP2007510896A (ja) 2007-04-26
JP2007510896A5 JP2007510896A5 (https=) 2008-04-17
JP4839220B2 true JP4839220B2 (ja) 2011-12-21

Family

ID=34429250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006537478A Expired - Fee Related JP4839220B2 (ja) 2003-11-04 2004-11-04 カンチレバー組立品

Country Status (6)

Country Link
US (1) US8109135B2 (https=)
EP (4) EP1530220A1 (https=)
JP (1) JP4839220B2 (https=)
CN (2) CN1871665B (https=)
AT (1) ATE524744T1 (https=)
WO (1) WO2005043551A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530220A1 (en) * 2003-11-04 2005-05-11 SwissProbe AG Cantilever assembly
EP2657710A1 (en) * 2012-04-25 2013-10-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Characterization structure for an atomic force microscope tip
EP3591410A1 (en) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Probe chip, scan head, scanning probe microscopy device and use of a probe chip

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0470506A (ja) * 1990-07-11 1992-03-05 Olympus Optical Co Ltd 原子プローブ顕微鏡
JPH0477611A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 原子プローブ顕微鏡
JPH0566127A (ja) * 1991-09-09 1993-03-19 Canon Inc 微小カンチレバー型プローブ及びその製造方法、それを備えた表面観察装置及び情報処理装置
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
JPH09159680A (ja) * 1995-12-05 1997-06-20 Nikon Corp カンチレバーホルダー及びこれを用いた加熱装置、並びにこれを用いた加熱・形状計測装置
JPH09196933A (ja) * 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
JPH09304410A (ja) * 1996-05-20 1997-11-28 Olympus Optical Co Ltd Ａｆｍカンチレバー
JPH11101810A (ja) * 1997-09-29 1999-04-13 Seiko Instruments Inc カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡
JP2001188035A (ja) * 1999-03-17 2001-07-10 Seiko Instruments Inc 走査型プローブ顕微鏡
JP2002116132A (ja) * 2000-10-04 2002-04-19 Canon Inc 信号検出装置、該信号検出装置によって構成した走査型原子間力顕微鏡、および信号検出方法
JP2003042931A (ja) * 2001-07-30 2003-02-13 Univ Kanazawa 走査型プローブ顕微鏡
JP2004198134A (ja) * 2002-12-16 2004-07-15 Olympus Corp 走査型プローブ顕微鏡用カンチレバー

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5319961A (en) * 1991-09-17 1994-06-14 Olympus Optical Co., Ltd. Cantilever chip for use in scanning probe microscope
JPH08313541A (ja) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
JPH09105755A (ja) 1995-10-11 1997-04-22 Olympus Optical Co Ltd Ａｆｍカンチレバー及びその製造方法
JP3599880B2 (ja) * 1996-03-12 2004-12-08 オリンパス株式会社 カンチレバーチップ
US5982009A (en) 1997-03-01 1999-11-09 Korea Advanced Institute Of Science & Technology Integrated device of cantilever and light source
JP3309816B2 (ja) * 1998-01-22 2002-07-29 松下電器産業株式会社 微細表面形状測定装置及び触針製造方法
JP2002162335A (ja) * 2000-11-26 2002-06-07 Yoshikazu Nakayama 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ
US7441444B2 (en) * 2001-03-30 2008-10-28 The Johns Hopkins University AFM cantilevers and methods for making and using same
US7313828B2 (en) * 2001-09-04 2007-12-25 Nokia Corporation Method and apparatus for protecting software against unauthorized use
EP1530220A1 (en) * 2003-11-04 2005-05-11 SwissProbe AG Cantilever assembly

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
JPH0470506A (ja) * 1990-07-11 1992-03-05 Olympus Optical Co Ltd 原子プローブ顕微鏡
JP2945725B2 (ja) * 1990-07-20 1999-09-06 オリンパス光学工業株式会社 原子プローブ顕微鏡
JPH0477611A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 原子プローブ顕微鏡
JPH0566127A (ja) * 1991-09-09 1993-03-19 Canon Inc 微小カンチレバー型プローブ及びその製造方法、それを備えた表面観察装置及び情報処理装置
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
JPH09159680A (ja) * 1995-12-05 1997-06-20 Nikon Corp カンチレバーホルダー及びこれを用いた加熱装置、並びにこれを用いた加熱・形状計測装置
JPH09196933A (ja) * 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
JPH09304410A (ja) * 1996-05-20 1997-11-28 Olympus Optical Co Ltd Ａｆｍカンチレバー
JPH11101810A (ja) * 1997-09-29 1999-04-13 Seiko Instruments Inc カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡
JP2001188035A (ja) * 1999-03-17 2001-07-10 Seiko Instruments Inc 走査型プローブ顕微鏡
JP2002116132A (ja) * 2000-10-04 2002-04-19 Canon Inc 信号検出装置、該信号検出装置によって構成した走査型原子間力顕微鏡、および信号検出方法
JP2003042931A (ja) * 2001-07-30 2003-02-13 Univ Kanazawa 走査型プローブ顕微鏡
JP2004198134A (ja) * 2002-12-16 2004-07-15 Olympus Corp 走査型プローブ顕微鏡用カンチレバー

Also Published As

Publication number Publication date
CN1871665B (zh) 2011-09-21
EP1680788A1 (en) 2006-07-19
US8109135B2 (en) 2012-02-07
EP1530220A1 (en) 2005-05-11
EP1993103A1 (en) 2008-11-19
EP1993102A1 (en) 2008-11-19
JP2007510896A (ja) 2007-04-26
US20070271996A1 (en) 2007-11-29
EP1680788B1 (en) 2011-09-14
ATE524744T1 (de) 2011-09-15
CN101286373A (zh) 2008-10-15
WO2005043551A1 (en) 2005-05-12
CN1871665A (zh) 2006-11-29

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