CN1871665B - 悬臂组件 - Google Patents

悬臂组件 Download PDF

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Publication number
CN1871665B
CN1871665B CN200480030683XA CN200480030683A CN1871665B CN 1871665 B CN1871665 B CN 1871665B CN 200480030683X A CN200480030683X A CN 200480030683XA CN 200480030683 A CN200480030683 A CN 200480030683A CN 1871665 B CN1871665 B CN 1871665B
Authority
CN
China
Prior art keywords
cantilever
support
edge
high reflectivity
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200480030683XA
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English (en)
Chinese (zh)
Other versions
CN1871665A (zh
Inventor
汉斯·J·胡格
巴尔特·霍根博姆
萨沙·马丁
杨晋玲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NanoWorld AG
Original Assignee
Swiss Discovery Ag
Nano World AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swiss Discovery Ag, Nano World AG filed Critical Swiss Discovery Ag
Publication of CN1871665A publication Critical patent/CN1871665A/zh
Application granted granted Critical
Publication of CN1871665B publication Critical patent/CN1871665B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

Landscapes

  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
CN200480030683XA 2003-11-04 2004-11-04 悬臂组件 Expired - Fee Related CN1871665B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03025187.0 2003-11-04
EP03025187A EP1530220A1 (en) 2003-11-04 2003-11-04 Cantilever assembly
PCT/IB2004/003599 WO2005043551A1 (en) 2003-11-04 2004-11-04 Cantilever assembly

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA200810094453XA Division CN101286373A (zh) 2003-11-04 2004-11-04 悬臂组件

Publications (2)

Publication Number Publication Date
CN1871665A CN1871665A (zh) 2006-11-29
CN1871665B true CN1871665B (zh) 2011-09-21

Family

ID=34429250

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200480030683XA Expired - Fee Related CN1871665B (zh) 2003-11-04 2004-11-04 悬臂组件
CNA200810094453XA Pending CN101286373A (zh) 2003-11-04 2004-11-04 悬臂组件

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA200810094453XA Pending CN101286373A (zh) 2003-11-04 2004-11-04 悬臂组件

Country Status (6)

Country Link
US (1) US8109135B2 (https=)
EP (4) EP1530220A1 (https=)
JP (1) JP4839220B2 (https=)
CN (2) CN1871665B (https=)
AT (1) ATE524744T1 (https=)
WO (1) WO2005043551A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530220A1 (en) * 2003-11-04 2005-05-11 SwissProbe AG Cantilever assembly
EP2657710A1 (en) * 2012-04-25 2013-10-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Characterization structure for an atomic force microscope tip
EP3591410A1 (en) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Probe chip, scan head, scanning probe microscopy device and use of a probe chip

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
CN1397011A (zh) * 2000-11-26 2003-02-12 大研化学工业株式会社 垂直式扫描型显微镜用悬臂及使用该悬臂的垂直式扫描型显微镜用探针
CN1328634C (zh) * 2001-09-04 2007-07-25 诺基亚有限公司 防止未被授权使用软件的方法
CN101286373A (zh) * 2003-11-04 2008-10-15 纳诺世界股份公司 悬臂组件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2945725B2 (ja) * 1990-07-20 1999-09-06 オリンパス光学工業株式会社 原子プローブ顕微鏡
JPH0470506A (ja) * 1990-07-11 1992-03-05 Olympus Optical Co Ltd 原子プローブ顕微鏡
JP2967308B2 (ja) 1991-09-09 1999-10-25 キヤノン株式会社 微小カンチレバー型プローブ及びその製造方法、それを備えた表面観察装置及び情報処理装置
US5319961A (en) * 1991-09-17 1994-06-14 Olympus Optical Co., Ltd. Cantilever chip for use in scanning probe microscope
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
JPH08313541A (ja) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
JPH09105755A (ja) 1995-10-11 1997-04-22 Olympus Optical Co Ltd Ａｆｍカンチレバー及びその製造方法
JPH09159680A (ja) 1995-12-05 1997-06-20 Nikon Corp カンチレバーホルダー及びこれを用いた加熱装置、並びにこれを用いた加熱・形状計測装置
JPH09196933A (ja) 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
JP3599880B2 (ja) * 1996-03-12 2004-12-08 オリンパス株式会社 カンチレバーチップ
JPH09304410A (ja) 1996-05-20 1997-11-28 Olympus Optical Co Ltd Ａｆｍカンチレバー
US5982009A (en) 1997-03-01 1999-11-09 Korea Advanced Institute Of Science & Technology Integrated device of cantilever and light source
JP3222410B2 (ja) 1997-09-29 2001-10-29 セイコーインスツルメンツ株式会社 カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡
JP3309816B2 (ja) * 1998-01-22 2002-07-29 松下電器産業株式会社 微細表面形状測定装置及び触針製造方法
JP2001188035A (ja) 1999-03-17 2001-07-10 Seiko Instruments Inc 走査型プローブ顕微鏡
JP2002116132A (ja) 2000-10-04 2002-04-19 Canon Inc 信号検出装置、該信号検出装置によって構成した走査型原子間力顕微鏡、および信号検出方法
US7441444B2 (en) * 2001-03-30 2008-10-28 The Johns Hopkins University AFM cantilevers and methods for making and using same
JP4646049B2 (ja) * 2001-07-30 2011-03-09 国立大学法人金沢大学 走査型プローブ顕微鏡
JP2004198134A (ja) * 2002-12-16 2004-07-15 Olympus Corp 走査型プローブ顕微鏡用カンチレバー

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
CN1397011A (zh) * 2000-11-26 2003-02-12 大研化学工业株式会社 垂直式扫描型显微镜用悬臂及使用该悬臂的垂直式扫描型显微镜用探针
CN1328634C (zh) * 2001-09-04 2007-07-25 诺基亚有限公司 防止未被授权使用软件的方法
CN101286373A (zh) * 2003-11-04 2008-10-15 纳诺世界股份公司 悬臂组件

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
VIANI M B ET AL.Small cantilevers for force spectroscopy of single molecules.Journal of Applied Physics86 4.1999,2258-2259.
VIANI M B ET AL.Small cantilevers for force spectroscopy of single molecules.Journal of Applied Physics86 4.1999,2258-2259. *

Also Published As

Publication number Publication date
EP1680788A1 (en) 2006-07-19
US8109135B2 (en) 2012-02-07
EP1530220A1 (en) 2005-05-11
EP1993103A1 (en) 2008-11-19
EP1993102A1 (en) 2008-11-19
JP2007510896A (ja) 2007-04-26
US20070271996A1 (en) 2007-11-29
EP1680788B1 (en) 2011-09-14
JP4839220B2 (ja) 2011-12-21
ATE524744T1 (de) 2011-09-15
CN101286373A (zh) 2008-10-15
WO2005043551A1 (en) 2005-05-12
CN1871665A (zh) 2006-11-29

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: NANOWORLD STOCK CO., LTD.

Free format text: FORMER OWNER: SWISSPROBE AG

Effective date: 20070831

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20070831

Address after: Neuchatel, Switzerland

Applicant after: Nanoworld AG

Address before: Basel

Applicant before: Swissprobe AG

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110921

Termination date: 20201104

CF01 Termination of patent right due to non-payment of annual fee