JP2007510382A - パッケージを単純化した圧電薄膜共振器(fbar)デバイス - Google Patents
パッケージを単純化した圧電薄膜共振器(fbar)デバイス Download PDFInfo
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Abstract
Description
1以上の圧電薄膜共振器(FBAR)が組み込まれたFBARデバイスは、かつてないほど様々な電子製品の一部を形成し、特に無線製品の一部を形成している。例えば、最近の携帯電話は送受切り換え器を内蔵していて、各バンドパスフィルタははしご型回路を含み、はしご型回路の各要素がFBARになっている。FBARを内蔵した送受切り換え器は、ブラッドレイ他により、「Duplexer Incorporating Thin-film Bulk Acoustic Resonators (FBARs)」と題する、米国特許第6,262,637号に開示されている。こうした送受切り換え器は、送信機の出力とアンテナとの間に直列に接続された送信機バンドパスフィルタと、アンテナと受信機の入力との間に90度位相シフタと共に直列に接続された受信機バンドパスフィルタとから構成される。送信機バンドパスフィルタと受信機バンドパスフィルタの通過帯域の中心周波数は、互いにオフセットされている。FBARを利用したはしご型フィルタは、他の用途にも使用されている。
第1の態様において、本発明は、基板、基板の上に積み重ねられたFBARスタック、FBARスタックを基板から音響的に分離する要素、FBARスタックを覆うカプセル材料、及び、FBARスタックの上面とカプセル材料との間に配置された音響ブラッグ反射器からなるカプセル化圧電薄膜共振器(FBAR)デバイスを提供する。FBARスタックはFBARを含み、基板から離れた上面を有する。FBARは、対向する2枚の平坦な電極と、それらの電極間に配置された圧電素子とを有する。音響ブラッグ反射器は、金属ブラッグ層と、その金属ブラッグ層に近接配置されたプラスチックブラッグ層とを有する。
図4A及び図4Bはそれぞれ、本発明によるカプセル化FBARデバイスの第1の実施形態100の平面図及び断面図である。カプセル化FBARデバイス100は、FBAR110を含むFBARスタック111を有する。FBAR110は、図1に示したようなFBARはしご型フィルタのFBAR、又は、送受切り換え器のFBARの一例である。このようなはしご型フィルタや送受信切り換え器の残りのFBARも、FBARスタック111の一部を形成している。ただし、図を単純化するために、図4A及び図4Bでは、残りのFBARは省略している。
ただし、Zpは第1のブラッグ層の材料の音響インピーダンス、Zmは他の層の音響インピーダンスである。
Claims (18)
- 基板と、
前記基板の上に積み重ねられたFBARスタックであって、FBARと、前記基板から離れたところにある上面とを有し、前記FBARが、対向する2枚の平坦な電極と、それらの電極間に配置された圧電素子とを含む、FBARスタックと、
前記FBARスタックを前記基板から音響的に分離する手段と、
前記FBARスタックを覆うカプセル材料と、
前記FBARスタックと前記カプセル材料との間に配置された音響ブラッグ反射器であって、金属ブラッグ層と、該金属ブラッグ層に近接配置されたプラスチックブラッグ層とを含む、音響ブラッグ反射器と
からなる、カプセル化圧電薄膜共振器(FBAR)デバイス。 - 前記FBARは下側FBARであり、
前記FBARデバイスは、
前記下側FBARの上に積み重ねられた上側FBARであって、対向する2枚の平坦な電極と、それらの電極間に配置された圧電素子とを含む上側FBARと、
前記FBAR間の音響減結合器と
を更に含む、請求項1に記載のカプセル化FBARデバイス。 - 前記下側FBAR、前記上側FBAR、及び、前記音響減結合器は、第1の減結合積層型圧電薄膜共振器(DSBAR)を構成し、
前記FBARスタックは、下側FBAR、上側FBAR、及び、それらのFBAR間に配置された音響減結合器からなる第2のDSBARを更に含み、
前記FBARデバイスは、
前記下側FBAR間を相互接続する第1の電気回路と、
前記上側FBAR間を相互接続する第2の電気回路と
を更に含む、請求項2に記載のカプセル化FBARデバイス。 - 前記FBARは第1のFBARであり、
前記FBARスタックは、1以上の更に別のFBARを更に含み、
前記FBARは、はしご型フィルタとして相互接続される、請求項1に記載のカプセル化FBARデバイス。 - 前記FBARデバイスは、中心周波数を有する帯域通過特性を有し、
前記ブラッグ層のうちの少なくとも1つは、前記中心周波数に等しい周波数の音響信号の、該ブラッグ層の材料中における波長の四分の一に等しい公称厚を有する、請求項1〜4のうちのいずれか一項に記載のカプセル化FBARデバイス。 - 前記金属ブラッグ層は、前記公称厚よりも薄い、請求項5に記載のカプセル化FBARデバイス。
- 前記プラスチックブラッグ層はポリイミドからなる、請求項1〜6のうちのいずれか一項に記載のカプラル化FBARデバイス。
- 前記プラスチックブラッグ層はパリレンからなる、請求項1〜6のうちのいずれか一項に記載のカプセル化FBARデバイス。
- 前記プラスチックブラッグ層は架橋ポリフェニレンポリマーからなる、請求項1〜6のうちのいずれか一項に記載のカプセル化FBARデバイス。
- 前記架橋ポリフェニレンポリマーは、Dow Chemical CompanyからSiLKという登録商標で市販されている前駆体溶液から形成される、請求項9に記載のカプセル化FBARデバイス。
- 前記金属ブラッグ層は耐火性金属からなる、請求項1〜10のうちのいずれか一項に記載のカプセル化FBARデバイス。
- 前記金属ブラッグ層は前記カプセル材料に近接配置される、請求項1〜11のうちのいずれか一項に記載のカプセル化FBARデバイス。
- 前記金属ブラッグ層は第1の金属ブラッグ層であり、
前記音響ブラッグ反射器は、前記第1の金属ブラッグ層の反対側に前記プラスチックブラッグ層に近接配置された第2の金属ブラッグ層を更に含む、
請求項12に記載のカプセル化FBARデバイス。 - 前記プラスチックブラッグ層は第1のプラスチックブラッグ層であり、
前記音響ブラッグ反射器は、前記第1のプラスチックブラッグ層の反対側に前記第2の金属層に近接配置された第2のプラスチックブラッグ層を更に含む、請求項13に記載のカプセル化FBARデバイス。 - 前記FBARスタックを基板から音響的に分離する手段は、前記基板に形成されたキャビティからなり、前記FBARスタックは該キャビティの上に浮かんでいる、請求項1〜14のうちのいずれか一項に記載のカプセル化FBARデバイス。
- 前記音響ブラッグ反射器は第1の音響ブラッグ反射器であり、
前記FBARスタックを基板から音響的に分離する手段は、第2の音響ブラッグ反射器からなり、該第2の音響ブラッグ反射器は、プラスチックブラッグ層に近接配置された金属ブラッグ層を含む、請求項1〜14のうちのいずれか一項に記載のカプセル化FBARデバイス。 - 前記プラスチックブラッグ層は、5メガレーリー未満の音響インピーダンスのプラスチック材料からなり、
前記金属ブラッグ層は、50メガレーリー未満の音響インピーダンスの金属からなる、請求項1〜16のうちのいずれか一項に記載のカプセル化FBARデバイス。 - 前記プラスチックブラッグ層は、第1の音響インピーダンスのプラスチック材料からなり、
前記金属ブラッグ層は、第2の音響インピーダンスの金属からなり、
前記第2の音響インピーダンスと前記第1の音響インピーダンスの比が、10よりも大きい、請求項1〜16のうちのいずれか一項に記載のカプセル化FBARデバイス。
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US20050104690A1 (en) | 2005-05-19 |
GB2421646A (en) | 2006-06-28 |
DE112004002004B4 (de) | 2018-03-29 |
US20050110597A1 (en) | 2005-05-26 |
GB2423428A (en) | 2006-08-23 |
DE112004002004T5 (de) | 2006-08-31 |
US7358831B2 (en) | 2008-04-15 |
DE112004002068B4 (de) | 2016-09-01 |
WO2005043754A1 (en) | 2005-05-12 |
GB0605779D0 (en) | 2006-05-03 |
WO2005043751A1 (en) | 2005-05-12 |
GB2423428B (en) | 2007-09-05 |
GB0610006D0 (en) | 2006-06-28 |
JP4676440B2 (ja) | 2011-04-27 |
DE112004002068T5 (de) | 2006-08-17 |
GB2422969B (en) | 2007-04-11 |
JP2007514341A (ja) | 2007-05-31 |
US7332985B2 (en) | 2008-02-19 |
GB2422969A (en) | 2006-08-09 |
WO2005043756A1 (en) | 2005-05-12 |
GB0609024D0 (en) | 2006-06-14 |
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