JP2007507725A5 - - Google Patents

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Publication number
JP2007507725A5
JP2007507725A5 JP2006526110A JP2006526110A JP2007507725A5 JP 2007507725 A5 JP2007507725 A5 JP 2007507725A5 JP 2006526110 A JP2006526110 A JP 2006526110A JP 2006526110 A JP2006526110 A JP 2006526110A JP 2007507725 A5 JP2007507725 A5 JP 2007507725A5
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JP
Japan
Prior art keywords
sensitive layer
cylindrical platform
radiation
rotation
radiation beam
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Application number
JP2006526110A
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English (en)
Japanese (ja)
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JP2007507725A (ja
JP4607881B2 (ja
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Priority claimed from US10/661,916 external-priority patent/US7190387B2/en
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Publication of JP2007507725A publication Critical patent/JP2007507725A/ja
Publication of JP2007507725A5 publication Critical patent/JP2007507725A5/ja
Application granted granted Critical
Publication of JP4607881B2 publication Critical patent/JP4607881B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006526110A 2003-09-11 2004-08-20 シリンダ形プラットフォームおよびラスタ走査される放射線ビームを使用して光学的微細構造体を形成するためのシステムおよび方法 Expired - Fee Related JP4607881B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/661,916 US7190387B2 (en) 2003-09-11 2003-09-11 Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
PCT/US2004/027208 WO2005036216A2 (en) 2003-09-11 2004-08-20 Systems and methods for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam

Publications (3)

Publication Number Publication Date
JP2007507725A JP2007507725A (ja) 2007-03-29
JP2007507725A5 true JP2007507725A5 (enExample) 2007-10-04
JP4607881B2 JP4607881B2 (ja) 2011-01-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006526110A Expired - Fee Related JP4607881B2 (ja) 2003-09-11 2004-08-20 シリンダ形プラットフォームおよびラスタ走査される放射線ビームを使用して光学的微細構造体を形成するためのシステムおよび方法

Country Status (7)

Country Link
US (2) US7190387B2 (enExample)
EP (1) EP1664859B1 (enExample)
JP (1) JP4607881B2 (enExample)
KR (1) KR101060324B1 (enExample)
AT (1) ATE440298T1 (enExample)
DE (1) DE602004022682D1 (enExample)
WO (1) WO2005036216A2 (enExample)

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