JP2007322428A5 - - Google Patents
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- Publication number
- JP2007322428A5 JP2007322428A5 JP2007141890A JP2007141890A JP2007322428A5 JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5 JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5
- Authority
- JP
- Japan
- Prior art keywords
- frame
- prober
- assembly
- contact head
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80359506P | 2006-05-31 | 2006-05-31 | |
US82190406P | 2006-08-09 | 2006-08-09 | |
US11/746,530 US7786742B2 (en) | 2006-05-31 | 2007-05-09 | Prober for electronic device testing on large area substrates |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014222921A Division JP2015057605A (ja) | 2006-05-31 | 2014-10-31 | 大面積基板上での電子デバイス検査のためのプローバ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007322428A JP2007322428A (ja) | 2007-12-13 |
JP2007322428A5 true JP2007322428A5 (pt) | 2013-10-24 |
Family
ID=39142022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007141890A Pending JP2007322428A (ja) | 2006-05-31 | 2007-05-29 | 大面積基板上での電子デバイス検査のためのプローバ |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007322428A (pt) |
KR (2) | KR101088566B1 (pt) |
CN (1) | CN101082637B (pt) |
TW (1) | TWI339730B (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7085042B2 (ja) | 2015-11-24 | 2022-06-15 | オルボテック リミテッド | プローブシステム |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8907277B2 (en) | 2008-03-07 | 2014-12-09 | Carl Zeiss Microscopy, Llc | Reducing particle implantation |
EP2180327A1 (en) * | 2008-10-21 | 2010-04-28 | Applied Materials, Inc. | Apparatus and method for active voltage compensation |
CN101943744A (zh) * | 2009-07-06 | 2011-01-12 | 应用材料股份有限公司 | 干型高电位测试器以及太阳模拟工具 |
KR101162912B1 (ko) * | 2009-10-27 | 2012-07-06 | 주식회사 탑 엔지니어링 | 어레이기판 검사장치 및 어레이기판 검사방법 |
TWI503548B (zh) * | 2010-01-08 | 2015-10-11 | Photon Dynamics Inc | 探針系統 |
KR101129195B1 (ko) * | 2010-12-20 | 2012-03-27 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
KR101191343B1 (ko) * | 2010-12-30 | 2012-10-16 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
KR101234088B1 (ko) * | 2010-12-30 | 2013-02-19 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
CN102621731B (zh) * | 2012-04-17 | 2014-11-19 | 深圳市华星光电技术有限公司 | 液晶基板的电压施加装置 |
WO2015010714A1 (en) * | 2013-07-22 | 2015-01-29 | Applied Materials, Inc. | Apparatus and method for processing a large area substrate |
US9472410B2 (en) * | 2014-03-05 | 2016-10-18 | Applied Materials, Inc. | Pixelated capacitance controlled ESC |
JP2017003484A (ja) * | 2015-06-12 | 2017-01-05 | 株式会社ジャパンディスプレイ | 表示装置の検査装置、表示装置用マザー基板の検査方法、及び、表示装置 |
KR102612272B1 (ko) * | 2016-12-15 | 2023-12-11 | 세메스 주식회사 | 프로브 모듈 및 이를 포함하는 어레이 테스트 장치 |
TWI718610B (zh) * | 2018-08-09 | 2021-02-11 | 日商歐姆龍股份有限公司 | 探針單元 |
CN108982931A (zh) * | 2018-09-21 | 2018-12-11 | 京东方科技集团股份有限公司 | 探针单元、探针治具 |
CN112285446B (zh) * | 2019-07-12 | 2024-05-31 | 瑞昱半导体股份有限公司 | 执行多种测试的测试系统、传送装置与接收装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3592831B2 (ja) * | 1996-02-26 | 2004-11-24 | 株式会社日本マイクロニクス | プローブユニット及びその調節方法 |
JPH11174108A (ja) * | 1997-12-12 | 1999-07-02 | Dainippon Printing Co Ltd | 電極配線の検査装置 |
US6744268B2 (en) * | 1998-08-27 | 2004-06-01 | The Micromanipulator Company, Inc. | High resolution analytical probe station |
US7355418B2 (en) * | 2004-02-12 | 2008-04-08 | Applied Materials, Inc. | Configurable prober for TFT LCD array test |
JP4790997B2 (ja) * | 2004-03-26 | 2011-10-12 | 株式会社日本マイクロニクス | プローブ装置 |
JP2006085235A (ja) | 2004-09-14 | 2006-03-30 | Agilent Technol Inc | 移動型操作装置および移動型操作装置を制御するための方法 |
-
2007
- 2007-05-16 TW TW096117479A patent/TWI339730B/zh active
- 2007-05-23 KR KR1020070050207A patent/KR101088566B1/ko active IP Right Grant
- 2007-05-28 CN CN2007101052709A patent/CN101082637B/zh active Active
- 2007-05-29 JP JP2007141890A patent/JP2007322428A/ja active Pending
-
2009
- 2009-10-23 KR KR1020090101382A patent/KR20090120444A/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7085042B2 (ja) | 2015-11-24 | 2022-06-15 | オルボテック リミテッド | プローブシステム |
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