JP2007322428A5 - - Google Patents

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Publication number
JP2007322428A5
JP2007322428A5 JP2007141890A JP2007141890A JP2007322428A5 JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5 JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5
Authority
JP
Japan
Prior art keywords
frame
prober
assembly
contact head
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007141890A
Other languages
English (en)
Japanese (ja)
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JP2007322428A (ja
Filing date
Publication date
Priority claimed from US11/746,530 external-priority patent/US7786742B2/en
Application filed filed Critical
Publication of JP2007322428A publication Critical patent/JP2007322428A/ja
Publication of JP2007322428A5 publication Critical patent/JP2007322428A5/ja
Pending legal-status Critical Current

Links

JP2007141890A 2006-05-31 2007-05-29 大面積基板上での電子デバイス検査のためのプローバ Pending JP2007322428A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US80359506P 2006-05-31 2006-05-31
US82190406P 2006-08-09 2006-08-09
US11/746,530 US7786742B2 (en) 2006-05-31 2007-05-09 Prober for electronic device testing on large area substrates

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014222921A Division JP2015057605A (ja) 2006-05-31 2014-10-31 大面積基板上での電子デバイス検査のためのプローバ

Publications (2)

Publication Number Publication Date
JP2007322428A JP2007322428A (ja) 2007-12-13
JP2007322428A5 true JP2007322428A5 (pt) 2013-10-24

Family

ID=39142022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007141890A Pending JP2007322428A (ja) 2006-05-31 2007-05-29 大面積基板上での電子デバイス検査のためのプローバ

Country Status (4)

Country Link
JP (1) JP2007322428A (pt)
KR (2) KR101088566B1 (pt)
CN (1) CN101082637B (pt)
TW (1) TWI339730B (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7085042B2 (ja) 2015-11-24 2022-06-15 オルボテック リミテッド プローブシステム

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8907277B2 (en) 2008-03-07 2014-12-09 Carl Zeiss Microscopy, Llc Reducing particle implantation
EP2180327A1 (en) * 2008-10-21 2010-04-28 Applied Materials, Inc. Apparatus and method for active voltage compensation
CN101943744A (zh) * 2009-07-06 2011-01-12 应用材料股份有限公司 干型高电位测试器以及太阳模拟工具
KR101162912B1 (ko) * 2009-10-27 2012-07-06 주식회사 탑 엔지니어링 어레이기판 검사장치 및 어레이기판 검사방법
TWI503548B (zh) * 2010-01-08 2015-10-11 Photon Dynamics Inc 探針系統
KR101129195B1 (ko) * 2010-12-20 2012-03-27 주식회사 탑 엔지니어링 어레이 테스트 장치
KR101191343B1 (ko) * 2010-12-30 2012-10-16 주식회사 탑 엔지니어링 어레이 테스트 장치
KR101234088B1 (ko) * 2010-12-30 2013-02-19 주식회사 탑 엔지니어링 어레이 테스트 장치
CN102621731B (zh) * 2012-04-17 2014-11-19 深圳市华星光电技术有限公司 液晶基板的电压施加装置
WO2015010714A1 (en) * 2013-07-22 2015-01-29 Applied Materials, Inc. Apparatus and method for processing a large area substrate
US9472410B2 (en) * 2014-03-05 2016-10-18 Applied Materials, Inc. Pixelated capacitance controlled ESC
JP2017003484A (ja) * 2015-06-12 2017-01-05 株式会社ジャパンディスプレイ 表示装置の検査装置、表示装置用マザー基板の検査方法、及び、表示装置
KR102612272B1 (ko) * 2016-12-15 2023-12-11 세메스 주식회사 프로브 모듈 및 이를 포함하는 어레이 테스트 장치
TWI718610B (zh) * 2018-08-09 2021-02-11 日商歐姆龍股份有限公司 探針單元
CN108982931A (zh) * 2018-09-21 2018-12-11 京东方科技集团股份有限公司 探针单元、探针治具
CN112285446B (zh) * 2019-07-12 2024-05-31 瑞昱半导体股份有限公司 执行多种测试的测试系统、传送装置与接收装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3592831B2 (ja) * 1996-02-26 2004-11-24 株式会社日本マイクロニクス プローブユニット及びその調節方法
JPH11174108A (ja) * 1997-12-12 1999-07-02 Dainippon Printing Co Ltd 電極配線の検査装置
US6744268B2 (en) * 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP4790997B2 (ja) * 2004-03-26 2011-10-12 株式会社日本マイクロニクス プローブ装置
JP2006085235A (ja) 2004-09-14 2006-03-30 Agilent Technol Inc 移動型操作装置および移動型操作装置を制御するための方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7085042B2 (ja) 2015-11-24 2022-06-15 オルボテック リミテッド プローブシステム

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