JP2007322428A5 - - Google Patents

Description

Embodiments described herein provide at least two prober loads for use in inspection operations in the inspection chamber 110 while opening the inspection chamber to a clean room environment typically at or near atmospheric pressure. Various embodiments described herein provide at least two probers in the inspection chamber 110 for use in storage and / or inspection operations to minimize ventilation and pump down time and improve throughput. Testing chamber 110 is under vacuum near while seeking, with respect to the arrangement of the different substrates display and / or contact pads can be constructed prober remotely.

Claims (27)

A frame having a length exceeding the width of the substrate;
A plurality of contact heads movably coupled along the length of the frame and remotely operable during use , each contact head having a plurality of prober pins coupled to the underside, and a plurality of contacts on the substrate A prober assembly for contacting an electronic device on a substrate, positioned in a posture configured to align with a pad, wherein a plurality of contact pads are aligned in a direction orthogonal to the frame. A support member disposed on the inspection system, wherein the frame includes a tubular member having at least one motor at opposite ends, the at least one motor being operably connected to at least one of the plurality of contact heads; The prober assembly of claim 1, wherein the prober assembly is operably coupled to move the frame relative to the support member. The prober assembly of claim 2, wherein the motor is operably coupled to at least one of the plurality of contact heads. 2. The prober assembly according to claim 1, wherein the frame includes a plurality of motors, and each motor is connected to at least one of the plurality of contact heads by a belt. 2. The prober assembly of claim 1, wherein the frame includes a motor and each contact head is oriented in a parallel direction relative to the frame and is movable by the motor with the contact head oriented in a parallel direction relative to the frame. The prober assembly of claim 1, wherein the frame includes a motor, and each contact head is oriented in an orthogonal direction relative to the frame and is movable by the motor with the contact head oriented in an orthogonal direction relative to the frame. Each contact head includes a pin, and the frame includes at least one step portion having a plurality of stops adapted to receive the pin and switch orientation relative to the frame of the at least one contact head. The prober assembly according to claim 1. Frame,
A plurality of contact head assemblies movably coupled to the frame and independently movable along the length of the frame;
Each contact head assembly that can be remotely operated during use
A housing,
A movable contact head having a plurality of prober pins disposed on the lower surface;
Each contact head is a prober assembly in which the contact head is arranged in a first position aligned perpendicular to the length of the frame. 9. The prober assembly of claim 8 , wherein each contact head is disposed in a second position where the contact head is aligned parallel to the length of the frame. The prober assembly of claim 8, wherein each contact head is coupled to at least one motor. 9. The prober assembly of claim 8, wherein each contact head is connected to at least one motor by a belt. The frame includes a plurality of stops disposed adjacent to the channel, each stop receiving a pin disposed on each contact head as the housing moves along the channel, relative to the housing. 9. The apparatus of claim 8 , wherein the apparatus is adapted to redirect the direction of the contact head. The prober assembly of claim 8, wherein the frame includes at least six contact head assemblies . An inspection table sized to receive a substrate having a plurality of electronic devices thereon defining a plurality of displays on the substrate , each of the plurality of displays having one or more shorting bars disposed around it Table ,
A plurality of test columns arranged on a test table;
A prober assembly having a plurality of individual contact heads adapted to selectively contact a shorting bar on the substrate, the prober assembly including a motor for moving the prober assembly along the length of the inspection table An inspection system for inspecting a large area substrate in which a plurality of contact heads are coupled to at least one motor for moving the contact heads in a direction orthogonal to the length of the inspection table. The system of claim 14 , wherein each of the plurality of contact heads moves independently of each other. 15. The system of claim 14, wherein the prober assembly includes a frame having a longitudinal member with a motor at each end. 15. The system of claim 14, wherein the prober assembly further includes a frame, and each of the plurality of contact heads moves independently relative to the frame. 15. The system of claim 14, wherein the prober assembly further includes a frame, and each of the plurality of contact heads can be disposed in a direction parallel to the frame, a cantilever direction relative to the frame, or a combination thereof. 15. The system of claim 14, wherein the prober assembly further includes a frame, and each of the plurality of contact heads is movable to a parallel position relative to the frame length or a cantilever position relative to the frame length. 15. The system of claim 14 , further comprising at least two prober assemblies movably connected to the inspection table by a motor. A chamber having an inspection table therein;
The system of claim 14 , further comprising a plurality of test columns coupled to the upper surface of the chamber. Is movable in a first direction inspection table along the inspection path adjacent to the plurality of testing columns, according to claim 14, wherein the prober assembly moves in the first direction together with the inspection and selectively coupled to the testing table table system. 23. The system of claim 22, wherein the prober assembly moves in the first direction independently of movement of the inspection table. The inspection table is movable in the first direction, the prober assembly is selectively moved in the first direction together with or independent of the inspection table, and each of the plurality of contact heads is orthogonal to the first direction. The system of claim 14, which moves in two directions. The prober assembly of claim 1, wherein the frame includes a guide bar and each contact head assembly includes a housing having a carriage assembly movably coupled to the guide bar. 26. The prober assembly of claim 25, wherein each contact head assembly further includes a pivot portion coupled to a biasing member for switching the orientation of the contact head assembly relative to the frame. 21. The system of claim 20 , wherein each of the plurality of test columns includes an electron beam column.