JP2007264609A5 - - Google Patents
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- Publication number
- JP2007264609A5 JP2007264609A5 JP2007043512A JP2007043512A JP2007264609A5 JP 2007264609 A5 JP2007264609 A5 JP 2007264609A5 JP 2007043512 A JP2007043512 A JP 2007043512A JP 2007043512 A JP2007043512 A JP 2007043512A JP 2007264609 A5 JP2007264609 A5 JP 2007264609A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- layer
- semiconductor device
- manufacturing
- element formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims 15
- 239000011941 photocatalyst Substances 0.000 claims 12
- 239000004065 semiconductor Substances 0.000 claims 12
- 230000015572 biosynthetic process Effects 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 11
- 238000000034 method Methods 0.000 claims 10
- 150000002894 organic compounds Chemical class 0.000 claims 9
- 230000001678 irradiating effect Effects 0.000 claims 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- 239000004973 liquid crystal related substance Substances 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000006096 absorbing agent Substances 0.000 claims 1
- 229910000416 bismuth oxide Inorganic materials 0.000 claims 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims 1
- 150000002484 inorganic compounds Chemical class 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 230000001699 photocatalysis Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 229910001887 tin oxide Inorganic materials 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 229910001930 tungsten oxide Inorganic materials 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007043512A JP5288581B2 (ja) | 2006-03-03 | 2007-02-23 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006058729 | 2006-03-03 | ||
| JP2006058729 | 2006-03-03 | ||
| JP2007043512A JP5288581B2 (ja) | 2006-03-03 | 2007-02-23 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012158299A Division JP5546055B2 (ja) | 2006-03-03 | 2012-07-17 | 表示装置、表示モジュール及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007264609A JP2007264609A (ja) | 2007-10-11 |
| JP2007264609A5 true JP2007264609A5 (cg-RX-API-DMAC7.html) | 2010-02-18 |
| JP5288581B2 JP5288581B2 (ja) | 2013-09-11 |
Family
ID=38637604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007043512A Expired - Fee Related JP5288581B2 (ja) | 2006-03-03 | 2007-02-23 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5288581B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5222479B2 (ja) * | 2006-03-03 | 2013-06-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2010072319A (ja) * | 2008-09-18 | 2010-04-02 | Toshiba Mobile Display Co Ltd | 表示素子の製造方法 |
| KR102321189B1 (ko) | 2013-12-02 | 2021-11-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 및 그 제조방법 |
| CN117279467A (zh) * | 2016-10-07 | 2023-12-22 | 株式会社半导体能源研究所 | 玻璃衬底的清洗方法、半导体装置的制造方法及玻璃衬底 |
| JP6910127B2 (ja) * | 2016-10-21 | 2021-07-28 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| WO2018150940A1 (ja) * | 2017-02-20 | 2018-08-23 | 東洋紡株式会社 | ポリエステルフィルムとその用途 |
| KR102561983B1 (ko) | 2017-03-16 | 2023-08-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 및 반도체 장치 |
| WO2019069352A1 (ja) * | 2017-10-02 | 2019-04-11 | シャープ株式会社 | 表示デバイスの製造方法、表示デバイスの製造装置 |
| CN114762024A (zh) * | 2019-12-26 | 2022-07-15 | Ａｇｃ株式会社 | 柔性透明电子器件的制造方法以及物品 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01245038A (ja) * | 1988-03-27 | 1989-09-29 | Matsushita Electric Works Ltd | 無機物粒子分散樹脂の含浸方法 |
| JPH0649270A (ja) * | 1992-07-28 | 1994-02-22 | Toray Ind Inc | 複合組成物 |
| JP2001206979A (ja) * | 2000-01-25 | 2001-07-31 | Jsr Corp | 無機粒子含有樹脂組成物、転写フィルムおよびそれを用いたプラズマディスプレイパネルの製造方法 |
| JP2002329584A (ja) * | 2001-02-28 | 2002-11-15 | Print Labo Kk | Ｅｌ発光装置 |
| JP2003098977A (ja) * | 2001-09-19 | 2003-04-04 | Sony Corp | 素子の転写方法、素子の配列方法、及び画像表示装置の製造方法 |
| JP4836445B2 (ja) * | 2003-12-12 | 2011-12-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2006049800A (ja) * | 2004-03-10 | 2006-02-16 | Seiko Epson Corp | 薄膜デバイスの供給体、薄膜デバイスの供給体の製造方法、転写方法、半導体装置の製造方法及び電子機器 |
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2007
- 2007-02-23 JP JP2007043512A patent/JP5288581B2/ja not_active Expired - Fee Related