JP2007200615A5 - - Google Patents

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Publication number
JP2007200615A5
JP2007200615A5 JP2006015410A JP2006015410A JP2007200615A5 JP 2007200615 A5 JP2007200615 A5 JP 2007200615A5 JP 2006015410 A JP2006015410 A JP 2006015410A JP 2006015410 A JP2006015410 A JP 2006015410A JP 2007200615 A5 JP2007200615 A5 JP 2007200615A5
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JP
Japan
Prior art keywords
light source
target material
ultraviolet light
extreme ultraviolet
source device
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JP2006015410A
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English (en)
Japanese (ja)
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JP2007200615A (ja
JP5156192B2 (ja
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Priority to JP2006015410A priority Critical patent/JP5156192B2/ja
Priority claimed from JP2006015410A external-priority patent/JP5156192B2/ja
Priority to US11/655,109 priority patent/US7608846B2/en
Publication of JP2007200615A publication Critical patent/JP2007200615A/ja
Publication of JP2007200615A5 publication Critical patent/JP2007200615A5/ja
Application granted granted Critical
Publication of JP5156192B2 publication Critical patent/JP5156192B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006015410A 2006-01-24 2006-01-24 極端紫外光源装置 Expired - Fee Related JP5156192B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006015410A JP5156192B2 (ja) 2006-01-24 2006-01-24 極端紫外光源装置
US11/655,109 US7608846B2 (en) 2006-01-24 2007-01-19 Extreme ultra violet light source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006015410A JP5156192B2 (ja) 2006-01-24 2006-01-24 極端紫外光源装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012094542A Division JP5563012B2 (ja) 2012-04-18 2012-04-18 極端紫外光源装置

Publications (3)

Publication Number Publication Date
JP2007200615A JP2007200615A (ja) 2007-08-09
JP2007200615A5 true JP2007200615A5 (enExample) 2008-12-04
JP5156192B2 JP5156192B2 (ja) 2013-03-06

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JP2006015410A Expired - Fee Related JP5156192B2 (ja) 2006-01-24 2006-01-24 極端紫外光源装置

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US (1) US7608846B2 (enExample)
JP (1) JP5156192B2 (enExample)

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