JP2007198896A5 - - Google Patents

Download PDF

Info

Publication number
JP2007198896A5
JP2007198896A5 JP2006017561A JP2006017561A JP2007198896A5 JP 2007198896 A5 JP2007198896 A5 JP 2007198896A5 JP 2006017561 A JP2006017561 A JP 2006017561A JP 2006017561 A JP2006017561 A JP 2006017561A JP 2007198896 A5 JP2007198896 A5 JP 2007198896A5
Authority
JP
Japan
Prior art keywords
gravity
amount
center
acquiring
fast axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006017561A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007198896A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006017561A priority Critical patent/JP2007198896A/ja
Priority claimed from JP2006017561A external-priority patent/JP2007198896A/ja
Priority to EP07001652A priority patent/EP1813988A3/en
Priority to US11/627,153 priority patent/US7468798B2/en
Priority to KR1020070008207A priority patent/KR100873531B1/ko
Priority to CNA2007100047309A priority patent/CN101008792A/zh
Priority to TW096103023A priority patent/TW200741814A/zh
Publication of JP2007198896A publication Critical patent/JP2007198896A/ja
Publication of JP2007198896A5 publication Critical patent/JP2007198896A5/ja
Withdrawn legal-status Critical Current

Links

JP2006017561A 2006-01-26 2006-01-26 計測方法 Withdrawn JP2007198896A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006017561A JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法
EP07001652A EP1813988A3 (en) 2006-01-26 2007-01-25 Measurement method
US11/627,153 US7468798B2 (en) 2006-01-26 2007-01-25 System and method for polarization characteristic measurement of optical systems via centroid analysis
KR1020070008207A KR100873531B1 (ko) 2006-01-26 2007-01-26 측정방법
CNA2007100047309A CN101008792A (zh) 2006-01-26 2007-01-26 测量方法
TW096103023A TW200741814A (en) 2006-01-26 2007-01-26 Measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006017561A JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法

Publications (2)

Publication Number Publication Date
JP2007198896A JP2007198896A (ja) 2007-08-09
JP2007198896A5 true JP2007198896A5 (enExample) 2009-04-09

Family

ID=37951862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006017561A Withdrawn JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法

Country Status (6)

Country Link
US (1) US7468798B2 (enExample)
EP (1) EP1813988A3 (enExample)
JP (1) JP2007198896A (enExample)
KR (1) KR100873531B1 (enExample)
CN (1) CN101008792A (enExample)
TW (1) TW200741814A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
US7705998B2 (en) * 2007-09-12 2010-04-27 Infineon Technologies Ag Method for evaluating an optical imaging process
JP5055141B2 (ja) * 2008-01-10 2012-10-24 キヤノン株式会社 評価方法、調整方法、露光装置、およびプログラム
JP5176876B2 (ja) * 2008-10-31 2013-04-03 富士通セミコンダクター株式会社 シミュレーション方法、シミュレーション装置、及びシミュレーションプログラム
JP5359397B2 (ja) * 2009-03-10 2013-12-04 株式会社ニコン 光学部材及び光学機器
DE102009015393B3 (de) * 2009-03-20 2010-09-02 Carl Zeiss Smt Ag Messverfahren und Messsystem zur Messung der Doppelbrechung
CN103528688B (zh) * 2013-07-07 2015-08-19 浙江大学 一种全偏振高光谱干涉成像装置及方法
CN104296676B (zh) * 2014-09-29 2017-04-26 中国科学院光电研究院 基于低频差声光移频器移相的外差点衍射干涉仪
CN104635241B (zh) * 2015-03-05 2018-02-27 北京航空航天大学 一种艇载多光谱高光谱对地观测装置
EP3315950A4 (en) * 2015-06-25 2018-12-19 JFE Steel Corporation Surface flaw detection device, surface flaw detection method, and manufacturing method for steel material
WO2017032525A1 (en) 2015-08-21 2017-03-02 Asml Netherlands B.V. Lithographic method and apparatus
DE102018211853A1 (de) 2018-07-17 2020-01-23 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
CN111176075B (zh) * 2018-11-13 2021-08-10 上海微电子装备（集团）股份有限公司 偏振像差检测装置、物镜测试台及光刻设备
KR102047123B1 (ko) * 2019-05-20 2019-11-20 한국해양과학기술원 시간 영역에서의 계층 식별 방법
CN110307962B (zh) * 2019-06-28 2020-10-27 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法
CN112880987B (zh) * 2019-11-29 2022-05-03 上海微电子装备（集团）股份有限公司 光学元件的偏振性能检测方法及检测系统
US11422086B2 (en) 2020-05-05 2022-08-23 Microsoft Technology Licensing, Llc Efficient reading of birefringent data
US11341620B2 (en) 2020-05-05 2022-05-24 Microsoft Technology Licensing, Llc Background correction for birefringence measurements

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6404482B1 (en) * 1992-10-01 2002-06-11 Nikon Corporation Projection exposure method and apparatus
JP3413067B2 (ja) 1997-07-29 2003-06-03 キヤノン株式会社 投影光学系及びそれを用いた投影露光装置
US6829041B2 (en) 1997-07-29 2004-12-07 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus having the same
US6342945B1 (en) * 1999-03-31 2002-01-29 Corning Incorporated System and method for measuring polarization mode dispersion suitable for a production environment
JP3339468B2 (ja) * 1999-06-24 2002-10-28 ミノルタ株式会社 プリンタ一体型デジタルカメラ
US6683710B2 (en) * 2001-06-01 2004-01-27 Optical Research Associates Correction of birefringence in cubic crystalline optical systems
JP3634782B2 (ja) 2001-09-14 2005-03-30 キヤノン株式会社 照明装置、それを用いた露光装置及びデバイス製造方法
US6970232B2 (en) * 2001-10-30 2005-11-29 Asml Netherlands B.V. Structures and methods for reducing aberration in integrated circuit fabrication systems
US7453641B2 (en) * 2001-10-30 2008-11-18 Asml Netherlands B.V. Structures and methods for reducing aberration in optical systems
US6995908B2 (en) * 2001-10-30 2006-02-07 Asml Netherlands B.V. Methods for reducing aberration in optical systems
US6844972B2 (en) * 2001-10-30 2005-01-18 Mcguire, Jr. James P. Reducing aberration in optical systems comprising cubic crystalline optical elements
DE10329360B4 (de) 2002-07-01 2008-08-28 Canon K.K. Doppelbrechungsmessgerät, Spannungsentfernungseinrichtung, Polarimeter und Belichtungsgerät
JP2004061515A (ja) 2002-07-29 2004-02-26 Cark Zeiss Smt Ag 光学系による偏光状態への影響を決定する方法及び装置と、分析装置
US6862377B2 (en) * 2002-10-15 2005-03-01 Agilent Technologies, Inc. System and method for PMD measurement from coherent spectral analysis
WO2005003862A1 (de) 2003-07-05 2005-01-13 Carl Zeiss Smt Ag Vorrichtung zur polarisationsspezifischen untersuchung eines optischen systems
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
EP1818658A1 (en) 2006-02-08 2007-08-15 Carl Zeiss SMT AG Method for approximating the influence of an optical system on the state of polarisation of optical radiation

Similar Documents

Publication Publication Date Title
JP2007198896A5 (enExample)
CN206131961U (zh) 曲轴曲柄销轴颈分度检具
JP2011504589A5 (enExample)
Li et al. A chiral sensor based on weak measurement for the determination of Proline enantiomers in diverse measuring circumstances
CN201331416Y (zh) 轿车动力总成质心、转动惯量测量装置
SG152187A1 (en) Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
WO2005119169A3 (en) Beam profile complex reflectance system and method for thin film and critical dimension measurements
CN105606294B (zh) 静压气体止推轴承气膜面的气体压强分布测量装置及方法
CN103411890B (zh) 一种旋转补偿器型椭偏仪的系统误差评估及消除方法
JP2014190705A5 (enExample)
CN103292738A (zh) 一种球面面形误差绝对检测方法
AR087797A1 (es) Metodo y sistema para determinar el desfasaje de un sensor
CN101266215A (zh) 数字光弹性中的一种全场剪应力自动确定方法
JP2016527501A5 (enExample)
ATE545857T1 (de) Verfahren und vorrichtung zum messen der konzentration biologischer komponenten
JP2011017702A5 (enExample)
CN104931140A (zh) 四次测量型全Stokes参数偏振仪的参数优化方法
CN102507158B (zh) 四分之一波片相位延迟量分布实时测量装置和测量方法
CN102645281B (zh) 一种利用起偏分束棱镜测量偏振度的方法
CN103630336B (zh) 基于随机快轴方位角延迟阵列的动态干涉测量方法
RU2010126861A (ru) Способ проверки качества функционирования стенда для определения массоцентровочных и массоинерционных характеристик твердого тела вращения
JP2004329888A5 (enExample)
JP2002318169A5 (enExample)
DE602005008474D1 (de) Metrologische charakterisierung mikroelektronischer schaltungen
FR2835603A1 (fr) Procede et dispositif de mesure optique du deplacement et/ou de la deformation d'un objet dans au moins une direction