CN101008792A - 测量方法 - Google Patents

测量方法 Download PDF

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Publication number
CN101008792A
CN101008792A CNA2007100047309A CN200710004730A CN101008792A CN 101008792 A CN101008792 A CN 101008792A CN A2007100047309 A CNA2007100047309 A CN A2007100047309A CN 200710004730 A CN200710004730 A CN 200710004730A CN 101008792 A CN101008792 A CN 101008792A
Authority
CN
China
Prior art keywords
optical system
formula
light
exp
objective optics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007100047309A
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English (en)
Chinese (zh)
Inventor
塩出吉宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101008792A publication Critical patent/CN101008792A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70566—Polarisation control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0261—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods polarised

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CNA2007100047309A 2006-01-26 2007-01-26 测量方法 Pending CN101008792A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006017561A JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法
JP2006017561 2006-01-26

Publications (1)

Publication Number Publication Date
CN101008792A true CN101008792A (zh) 2007-08-01

Family

ID=37951862

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007100047309A Pending CN101008792A (zh) 2006-01-26 2007-01-26 测量方法

Country Status (6)

Country Link
US (1) US7468798B2 (enExample)
EP (1) EP1813988A3 (enExample)
JP (1) JP2007198896A (enExample)
KR (1) KR100873531B1 (enExample)
CN (1) CN101008792A (enExample)
TW (1) TW200741814A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107735674A (zh) * 2015-06-25 2018-02-23 杰富意钢铁株式会社 表面缺陷检测装置、表面缺陷检测方法及钢材的制造方法
CN111999042A (zh) * 2019-06-28 2020-11-27 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
US7705998B2 (en) * 2007-09-12 2010-04-27 Infineon Technologies Ag Method for evaluating an optical imaging process
JP5055141B2 (ja) * 2008-01-10 2012-10-24 キヤノン株式会社 評価方法、調整方法、露光装置、およびプログラム
JP5176876B2 (ja) * 2008-10-31 2013-04-03 富士通セミコンダクター株式会社 シミュレーション方法、シミュレーション装置、及びシミュレーションプログラム
JP5359397B2 (ja) * 2009-03-10 2013-12-04 株式会社ニコン 光学部材及び光学機器
DE102009015393B3 (de) * 2009-03-20 2010-09-02 Carl Zeiss Smt Ag Messverfahren und Messsystem zur Messung der Doppelbrechung
CN103528688B (zh) * 2013-07-07 2015-08-19 浙江大学 一种全偏振高光谱干涉成像装置及方法
CN104296676B (zh) * 2014-09-29 2017-04-26 中国科学院光电研究院 基于低频差声光移频器移相的外差点衍射干涉仪
CN104635241B (zh) * 2015-03-05 2018-02-27 北京航空航天大学 一种艇载多光谱高光谱对地观测装置
WO2017032525A1 (en) 2015-08-21 2017-03-02 Asml Netherlands B.V. Lithographic method and apparatus
DE102018211853A1 (de) 2018-07-17 2020-01-23 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
CN111176075B (zh) * 2018-11-13 2021-08-10 上海微电子装备（集团）股份有限公司 偏振像差检测装置、物镜测试台及光刻设备
KR102047123B1 (ko) * 2019-05-20 2019-11-20 한국해양과학기술원 시간 영역에서의 계층 식별 방법
CN112880987B (zh) * 2019-11-29 2022-05-03 上海微电子装备（集团）股份有限公司 光学元件的偏振性能检测方法及检测系统
US11422086B2 (en) 2020-05-05 2022-08-23 Microsoft Technology Licensing, Llc Efficient reading of birefringent data
US11341620B2 (en) 2020-05-05 2022-05-24 Microsoft Technology Licensing, Llc Background correction for birefringence measurements

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6404482B1 (en) * 1992-10-01 2002-06-11 Nikon Corporation Projection exposure method and apparatus
JP3413067B2 (ja) 1997-07-29 2003-06-03 キヤノン株式会社 投影光学系及びそれを用いた投影露光装置
US6829041B2 (en) 1997-07-29 2004-12-07 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus having the same
US6342945B1 (en) * 1999-03-31 2002-01-29 Corning Incorporated System and method for measuring polarization mode dispersion suitable for a production environment
JP3339468B2 (ja) * 1999-06-24 2002-10-28 ミノルタ株式会社 プリンタ一体型デジタルカメラ
US6683710B2 (en) * 2001-06-01 2004-01-27 Optical Research Associates Correction of birefringence in cubic crystalline optical systems
JP3634782B2 (ja) 2001-09-14 2005-03-30 キヤノン株式会社 照明装置、それを用いた露光装置及びデバイス製造方法
US6970232B2 (en) * 2001-10-30 2005-11-29 Asml Netherlands B.V. Structures and methods for reducing aberration in integrated circuit fabrication systems
US7453641B2 (en) * 2001-10-30 2008-11-18 Asml Netherlands B.V. Structures and methods for reducing aberration in optical systems
US6995908B2 (en) * 2001-10-30 2006-02-07 Asml Netherlands B.V. Methods for reducing aberration in optical systems
US6844972B2 (en) * 2001-10-30 2005-01-18 Mcguire, Jr. James P. Reducing aberration in optical systems comprising cubic crystalline optical elements
DE10329360B4 (de) 2002-07-01 2008-08-28 Canon K.K. Doppelbrechungsmessgerät, Spannungsentfernungseinrichtung, Polarimeter und Belichtungsgerät
JP2004061515A (ja) 2002-07-29 2004-02-26 Cark Zeiss Smt Ag 光学系による偏光状態への影響を決定する方法及び装置と、分析装置
US6862377B2 (en) * 2002-10-15 2005-03-01 Agilent Technologies, Inc. System and method for PMD measurement from coherent spectral analysis
WO2005003862A1 (de) 2003-07-05 2005-01-13 Carl Zeiss Smt Ag Vorrichtung zur polarisationsspezifischen untersuchung eines optischen systems
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
EP1818658A1 (en) 2006-02-08 2007-08-15 Carl Zeiss SMT AG Method for approximating the influence of an optical system on the state of polarisation of optical radiation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107735674A (zh) * 2015-06-25 2018-02-23 杰富意钢铁株式会社 表面缺陷检测装置、表面缺陷检测方法及钢材的制造方法
CN107735674B (zh) * 2015-06-25 2021-09-17 杰富意钢铁株式会社 表面缺陷检测装置、表面缺陷检测方法及钢材的制造方法
CN111999042A (zh) * 2019-06-28 2020-11-27 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法
CN111999042B (zh) * 2019-06-28 2022-06-28 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法

Also Published As

Publication number Publication date
JP2007198896A (ja) 2007-08-09
TW200741814A (en) 2007-11-01
KR20070078394A (ko) 2007-07-31
US20070171427A1 (en) 2007-07-26
KR100873531B1 (ko) 2008-12-11
EP1813988A2 (en) 2007-08-01
US7468798B2 (en) 2008-12-23
EP1813988A3 (en) 2007-12-05

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