JP2007175584A - 塗布針固定方法と、それを用いた液状材料塗布機構および欠陥修正装置 - Google Patents
塗布針固定方法と、それを用いた液状材料塗布機構および欠陥修正装置 Download PDFInfo
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- 230000007246 mechanism Effects 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 18
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- 239000011248 coating agent Substances 0.000 title abstract description 7
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- 239000000758 substrate Substances 0.000 claims description 21
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/1336—Illuminating devices
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Abstract
【解決手段】このインク塗布機構4では、塗布針ホルダ24および固定ベース25にそれぞれマグネットM1,M2を設け、マグネットM1,M2間の磁気吸引力によって塗布針ホルダ24の裏面を固定ベース25の基準面Fに吸着させるとともに、マグネットM1,M2間の求心力によって塗布針ホルダ24の端面E1,E2を固定ベース25の基準端面E3,E4に押し付ける。したがって、塗布針ホルダ24を固定ベース25に容易に再現性良く取り付けることができる。
【選択図】図3
Description
また、この発明に係る欠陥修正装置は、基板上の微細領域は、基板上に形成された微細パターンの欠陥部であり、液状材料は欠陥部を修正するための修正液であり、上記液状材料塗布機構および欠陥部を観察するための観察用光学系を含む修正ヘッドと、基板と修正ヘッドを相対的に移動させて位置決めを行う位置決め機構とを備えることを特徴とする。
Claims (5)
- 基板上の微細領域に液状材料を塗布する塗布針を駆動装置の駆動軸に固定する塗布針固定方法であって、
前記塗布針の基端部を塗布針ホルダに固定し、
第1および第2の基準面を有する固定ベースを前記駆動軸の先端部に設け、
前記塗布針ホルダおよび前記固定ベースにそれぞれ第1および第2のマグネットを設け、
前記第1および第2のマグネット間の磁気吸引力によって前記塗布針ホルダを前記第1の基準面に吸着させるとともに、前記第1の基準面に平行な方向の前記第1および第2のマグネットの位置ずれにより生じる前記第1および第2のマグネット間の求心力によって前記塗布針ホルダの端面を前記第2の基準面に押し付けることを特徴とする、塗布針固定方法。 - 塗布針の先端部に付着した液状材料を基板上の微細領域に塗布する液状材料塗布機構であって、
前記塗布針を駆動させる駆動軸を有する駆動装置と、
前記塗布針の基端部が固定された塗布針ホルダと、
第1および第2の基準面を有し、前記駆動軸の先端部に設けられた固定ベースと、
それぞれ前記塗布針ホルダおよび前記固定ベースに設けられた第1および第2のマグネットとを備え、
前記第1および第2のマグネット間の磁気吸引力によって前記塗布針ホルダを前記第1の基準面に吸着させるとともに、前記第1の基準面に平行な方向の前記第1および第2のマグネットの位置ずれにより生じる前記第1および第2のマグネット間の求心力によって前記塗布針ホルダの端面を前記第2の基準面に押し付けることを特徴とする、液状材料塗布機構。 - 前記固定ベースはさらに第3の基準面を有し、
前記第1および第2のマグネットは、前記求心力によって前記塗布針ホルダの2つの端面をそれぞれ前記第2および第3の基準面に押し付けることを特徴とする、請求項2に記載の液状材料塗布機構。 - 前記塗布針ホルダおよび前記固定ベースは非磁性材料で形成されていることを特徴とする、請求項2または請求項3に記載の液状材料塗布機構。
- 前記基板上の微細領域は、前記基板上に形成された微細パターンの欠陥部であり、
前記液状材料は前記欠陥部を修正するための修正液であり、
請求項2から請求項4までのいずれかに記載の液状材料塗布機構および前記欠陥部を観察するための観察用光学系を含む修正ヘッドと、
前記基板と前記修正ヘッドを相対的に移動させて位置決めを行う位置決め機構とを備えることを特徴とする、欠陥修正装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005375316A JP4890024B2 (ja) | 2005-12-27 | 2005-12-27 | 塗布針固定方法と、それを用いた液状材料塗布機構および欠陥修正装置 |
TW095134937A TWI401476B (zh) | 2005-12-27 | 2006-09-21 | 塗敷針之固定方法、利用該針之液狀材料塗敷機構以及缺陷修正裝置 |
KR1020060098332A KR101247399B1 (ko) | 2005-12-27 | 2006-10-10 | 도포침 고정 방법과, 그것을 이용한 액상재료 도포 기구 및결함 수정 장치 |
CN2006101484360A CN1991505B (zh) | 2005-12-27 | 2006-11-09 | 涂敷针固定方法、使用该方法的液状材料涂敷机构及缺陷修正装置 |
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JP2005375316A JP4890024B2 (ja) | 2005-12-27 | 2005-12-27 | 塗布針固定方法と、それを用いた液状材料塗布機構および欠陥修正装置 |
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JP2007175584A true JP2007175584A (ja) | 2007-07-12 |
JP4890024B2 JP4890024B2 (ja) | 2012-03-07 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012176566A1 (ja) * | 2011-06-20 | 2012-12-27 | Ntn株式会社 | 欠陥修正装置および欠陥修正方法 |
JP2015110200A (ja) * | 2013-12-06 | 2015-06-18 | 富士通株式会社 | 液剤塗布方法及び液剤塗布装置 |
JP2018061800A (ja) * | 2016-10-16 | 2018-04-19 | タイズ株式会社 | ぬいぐるみ玩具と装着具との組合せ |
KR101850735B1 (ko) | 2010-11-29 | 2018-04-24 | 주식회사 탑 엔지니어링 | 페이스트 디스펜서 |
US9960007B2 (en) | 2015-09-11 | 2018-05-01 | Toshiba Memory Corporation | Electron beam irradiation device |
EP3845316A4 (en) * | 2018-08-31 | 2022-05-18 | NTN Corporation | APPLICATION NEEDLE COMPONENT, APPLICATION NEEDLE ASSEMBLY, APPLICATION COMPONENT AND APPLICATION DEVICE |
WO2022181689A1 (ja) * | 2021-02-25 | 2022-09-01 | Ntn株式会社 | 塗布機構及び塗布装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6587945B2 (ja) | 2016-01-27 | 2019-10-09 | Ntn株式会社 | 塗布機構、塗布装置、被塗布対象物の製造方法、および基板の製造方法 |
Citations (3)
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JPS62200511A (ja) * | 1986-02-27 | 1987-09-04 | Fuji Photo Film Co Ltd | ヘツドブロツク |
JPH07146219A (ja) * | 1993-11-22 | 1995-06-06 | Shimadzu Corp | オートサンプラー |
JP2000321996A (ja) * | 1999-05-06 | 2000-11-24 | Ntn Corp | 表示基板の欠陥修正方法および欠陥修正装置 |
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JP3034438B2 (ja) * | 1994-03-31 | 2000-04-17 | キヤノン株式会社 | カラーフィルタの製造装置 |
JP2997642B2 (ja) * | 1996-02-29 | 2000-01-11 | エヌティエヌ株式会社 | 欠陥修正装置 |
KR100740239B1 (ko) * | 1999-10-19 | 2007-07-18 | 동경 엘렉트론 주식회사 | 도포처리장치 및 도포처리방법 |
JP4058428B2 (ja) * | 2004-08-12 | 2008-03-12 | Ntn株式会社 | 修正装置および修正方法、プラズマディスプレイパネルの修正装置およびプラズマディスプレイパネルの修正方法 |
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2005
- 2005-12-27 JP JP2005375316A patent/JP4890024B2/ja active Active
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- 2006-09-21 TW TW095134937A patent/TWI401476B/zh active
- 2006-10-10 KR KR1020060098332A patent/KR101247399B1/ko active IP Right Grant
- 2006-11-09 CN CN2006101484360A patent/CN1991505B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS62200511A (ja) * | 1986-02-27 | 1987-09-04 | Fuji Photo Film Co Ltd | ヘツドブロツク |
JPH07146219A (ja) * | 1993-11-22 | 1995-06-06 | Shimadzu Corp | オートサンプラー |
JP2000321996A (ja) * | 1999-05-06 | 2000-11-24 | Ntn Corp | 表示基板の欠陥修正方法および欠陥修正装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101850735B1 (ko) | 2010-11-29 | 2018-04-24 | 주식회사 탑 엔지니어링 | 페이스트 디스펜서 |
WO2012176566A1 (ja) * | 2011-06-20 | 2012-12-27 | Ntn株式会社 | 欠陥修正装置および欠陥修正方法 |
JP2013003437A (ja) * | 2011-06-20 | 2013-01-07 | Ntn Corp | 欠陥修正装置および欠陥修正方法 |
JP2015110200A (ja) * | 2013-12-06 | 2015-06-18 | 富士通株式会社 | 液剤塗布方法及び液剤塗布装置 |
US9960007B2 (en) | 2015-09-11 | 2018-05-01 | Toshiba Memory Corporation | Electron beam irradiation device |
JP2018061800A (ja) * | 2016-10-16 | 2018-04-19 | タイズ株式会社 | ぬいぐるみ玩具と装着具との組合せ |
EP3845316A4 (en) * | 2018-08-31 | 2022-05-18 | NTN Corporation | APPLICATION NEEDLE COMPONENT, APPLICATION NEEDLE ASSEMBLY, APPLICATION COMPONENT AND APPLICATION DEVICE |
US11654450B2 (en) | 2018-08-31 | 2023-05-23 | Ntn Corporation | Application needle member, application needle member assembly, application member, and application apparatus |
WO2022181689A1 (ja) * | 2021-02-25 | 2022-09-01 | Ntn株式会社 | 塗布機構及び塗布装置 |
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Publication number | Publication date |
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TW200724983A (en) | 2007-07-01 |
KR101247399B1 (ko) | 2013-03-25 |
CN1991505A (zh) | 2007-07-04 |
TWI401476B (zh) | 2013-07-11 |
KR20070068998A (ko) | 2007-07-02 |
JP4890024B2 (ja) | 2012-03-07 |
CN1991505B (zh) | 2010-05-26 |
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