JP2007158566A - 圧電振動片および圧電デバイス - Google Patents
圧電振動片および圧電デバイス Download PDFInfo
- Publication number
- JP2007158566A JP2007158566A JP2005348791A JP2005348791A JP2007158566A JP 2007158566 A JP2007158566 A JP 2007158566A JP 2005348791 A JP2005348791 A JP 2005348791A JP 2005348791 A JP2005348791 A JP 2005348791A JP 2007158566 A JP2007158566 A JP 2007158566A
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- JP
- Japan
- Prior art keywords
- vibrating piece
- piezoelectric vibrating
- piezoelectric
- package
- corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000013078 crystal Substances 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 16
- 239000010453 quartz Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 235000014676 Phragmites communis Nutrition 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000002585 base Substances 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 244000273256 Phragmites communis Species 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 102100035353 Cyclin-dependent kinase 2-associated protein 1 Human genes 0.000 description 1
- 101000737813 Homo sapiens Cyclin-dependent kinase 2-associated protein 1 Proteins 0.000 description 1
- 101001139126 Homo sapiens Krueppel-like factor 6 Proteins 0.000 description 1
- 101000710013 Homo sapiens Reversion-inducing cysteine-rich protein with Kazal motifs Proteins 0.000 description 1
- 101000661816 Homo sapiens Suppression of tumorigenicity 18 protein Proteins 0.000 description 1
- 101000661807 Homo sapiens Suppressor of tumorigenicity 14 protein Proteins 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005348791A JP2007158566A (ja) | 2005-12-02 | 2005-12-02 | 圧電振動片および圧電デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005348791A JP2007158566A (ja) | 2005-12-02 | 2005-12-02 | 圧電振動片および圧電デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007158566A true JP2007158566A (ja) | 2007-06-21 |
| JP2007158566A5 JP2007158566A5 (enExample) | 2008-12-11 |
Family
ID=38242375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005348791A Pending JP2007158566A (ja) | 2005-12-02 | 2005-12-02 | 圧電振動片および圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007158566A (enExample) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194631A (ja) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | ウエハ、ウエハ研磨装置、ウエハ研磨方法、圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |
| CN103944531A (zh) * | 2013-01-18 | 2014-07-23 | 精工爱普生株式会社 | 振动元件、振子、振荡器、电子设备以及移动体 |
| JP2014209719A (ja) * | 2013-03-29 | 2014-11-06 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2017108379A (ja) * | 2015-11-27 | 2017-06-15 | 株式会社大真空 | 圧電振動子 |
| JP2019009619A (ja) * | 2017-06-23 | 2019-01-17 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2021061500A (ja) * | 2019-10-04 | 2021-04-15 | 日本電波工業株式会社 | ブランクを搭載する台座、振動子及び発振器 |
| JP2021072588A (ja) * | 2019-11-01 | 2021-05-06 | 日本電波工業株式会社 | 圧電デバイス及びその製造方法 |
| JP2025144483A (ja) * | 2024-03-19 | 2025-10-02 | 台灣晶技股▲ふん▼有限公司 | 水晶発振器及びその製造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6363209A (ja) * | 1986-09-04 | 1988-03-19 | Matsushima Kogyo Co Ltd | 圧電振動子の製造方法 |
| JP2000013169A (ja) * | 1998-06-18 | 2000-01-14 | Toyo Commun Equip Co Ltd | 圧電振動子 |
| JP2003318697A (ja) * | 2002-04-25 | 2003-11-07 | Seiko Instruments Inc | Atカット水晶振動子 |
| JP2005012635A (ja) * | 2003-06-20 | 2005-01-13 | Toyo Commun Equip Co Ltd | 圧電デバイス |
| JP2005217727A (ja) * | 2004-01-29 | 2005-08-11 | Daishinku Corp | 圧電振動デバイス |
-
2005
- 2005-12-02 JP JP2005348791A patent/JP2007158566A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6363209A (ja) * | 1986-09-04 | 1988-03-19 | Matsushima Kogyo Co Ltd | 圧電振動子の製造方法 |
| JP2000013169A (ja) * | 1998-06-18 | 2000-01-14 | Toyo Commun Equip Co Ltd | 圧電振動子 |
| JP2003318697A (ja) * | 2002-04-25 | 2003-11-07 | Seiko Instruments Inc | Atカット水晶振動子 |
| JP2005012635A (ja) * | 2003-06-20 | 2005-01-13 | Toyo Commun Equip Co Ltd | 圧電デバイス |
| JP2005217727A (ja) * | 2004-01-29 | 2005-08-11 | Daishinku Corp | 圧電振動デバイス |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194631A (ja) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | ウエハ、ウエハ研磨装置、ウエハ研磨方法、圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |
| CN103944531A (zh) * | 2013-01-18 | 2014-07-23 | 精工爱普生株式会社 | 振动元件、振子、振荡器、电子设备以及移动体 |
| JP2014138413A (ja) * | 2013-01-18 | 2014-07-28 | Seiko Epson Corp | 振動素子、振動子、発振器、電子機器および移動体 |
| CN103944531B (zh) * | 2013-01-18 | 2018-03-16 | 精工爱普生株式会社 | 振动元件、振子、振荡器、电子设备以及移动体 |
| JP2014209719A (ja) * | 2013-03-29 | 2014-11-06 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2017108379A (ja) * | 2015-11-27 | 2017-06-15 | 株式会社大真空 | 圧電振動子 |
| JP2019009619A (ja) * | 2017-06-23 | 2019-01-17 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| US11177429B2 (en) | 2017-06-23 | 2021-11-16 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and vehicle |
| JP7077539B2 (ja) | 2017-06-23 | 2022-05-31 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2021061500A (ja) * | 2019-10-04 | 2021-04-15 | 日本電波工業株式会社 | ブランクを搭載する台座、振動子及び発振器 |
| JP7365182B2 (ja) | 2019-10-04 | 2023-10-19 | 日本電波工業株式会社 | 振動子及び発振器 |
| JP2021072588A (ja) * | 2019-11-01 | 2021-05-06 | 日本電波工業株式会社 | 圧電デバイス及びその製造方法 |
| JP7396858B2 (ja) | 2019-11-01 | 2023-12-12 | 日本電波工業株式会社 | 圧電デバイス及びその製造方法 |
| JP2025144483A (ja) * | 2024-03-19 | 2025-10-02 | 台灣晶技股▲ふん▼有限公司 | 水晶発振器及びその製造方法 |
| US12456951B1 (en) | 2024-03-19 | 2025-10-28 | Txc Corporation | Quartz oscillator and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
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| A521 | Request for written amendment filed |
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| A621 | Written request for application examination |
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