JP2007134577A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2007134577A JP2007134577A JP2005327583A JP2005327583A JP2007134577A JP 2007134577 A JP2007134577 A JP 2007134577A JP 2005327583 A JP2005327583 A JP 2005327583A JP 2005327583 A JP2005327583 A JP 2005327583A JP 2007134577 A JP2007134577 A JP 2007134577A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 55
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000012212 insulator Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 115
- 239000000969 carrier Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 229910021332 silicide Inorganic materials 0.000 description 9
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 9
- 238000002955 isolation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823412—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823468—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823475—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type interconnection or wiring or contact manufacturing related aspects
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28061—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a metal or metal silicide formed by deposition, e.g. sputter deposition, i.e. without a silicidation reaction
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
Abstract
【解決手段】半導体装置は、基板11と、基板11に設けられた半導体領域13と、半導体領域13に設けられ、かつ、第1の方向に延在しかつ半導体領域13上にゲート絶縁膜を介して設けられたゲート電極をそれぞれが有する複数のMISトランジスタを含むトランジスタ群と、トランジスタ群上に設けられた絶縁膜24と、第1の方向に延在しかつ絶縁膜24を分断するように、半導体領域13上でトランジスタ群の両側に設けられた第1及び第2のコンタクト層C1,C2とを具備する。
【選択図】 図1
Description
図1は、本発明の第1の実施形態に係る半導体装置の平面図である。図2は、図1に示したII−IIに沿った断面図である。図3は、図1に示したIII−IIIに沿った断面図である。図4は、図1に示したIV−IVに沿った断面図である。なお、図1には、MISFETのゲート電極のみ示している。また、実際には、ゲート電極及びウェル上にはストレス膜等の絶縁膜が設けられているが、図1ではゲート電極及びウェルの構成が明確になるようにこれらを実線で示している。
第2の実施形態は、p型ウェル13のX方向の両端に、ストレス膜24を分断するコンタクト層を設けるようにして、p型ウェル13に形成された複数のn型MISFETの特性をほぼ均等にしたものである。
第3の実施形態は、任意のソース/ドレイン領域上に設けられたストレス膜24を分断するコンタクト層を複数のコンタクト層で構成したものである。
図8は、本発明の第4の実施形態に係る半導体装置の平面図である。図9は、図8に示したIX−IX線に沿った断面図である。図10は、図8に示したX−X線に沿った断面図である。図11は、図8に示したXI−XI線に沿った断面図である。
Claims (5)
- 基板と、
前記基板に設けられた半導体領域と、
前記半導体領域に設けられ、かつ、第1の方向に延在しかつ前記半導体領域上にゲート絶縁膜を介して設けられたゲート電極をそれぞれが有する複数のMIS(Metal Insulator Semiconductor)トランジスタを含むトランジスタ群と、
前記トランジスタ群上に設けられた絶縁膜と、
前記第1の方向に延在しかつ前記絶縁膜を分断するように、前記半導体領域上で前記トランジスタ群の両側に設けられた第1及び第2のコンタクト層と
を具備することを特徴とする半導体装置。 - 前記第1の方向に延在しかつ前記絶縁膜を分断するように、前記半導体領域上でゲート電極の間に設けられた1つ又は2つ以上の第3のコンタクト層をさらに具備することを特徴とする請求項1に記載の半導体装置。
- 前記コンタクト層はそれぞれ、複数のコンタクト層部分から構成されることを特徴とする請求項1又は2に記載の半導体装置。
- 前記半導体領域は、p型であり、
前記MISトランジスタは、n型であり、
前記絶縁膜は、MISトランジスタのチャネル領域に引っ張りストレスを作用させることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。 - 前記半導体領域は、n型であり、
前記MISトランジスタは、p型であり、
前記絶縁膜は、MISトランジスタのチャネル領域に圧縮ストレスを作用させることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2005327583A JP2007134577A (ja) | 2005-11-11 | 2005-11-11 | 半導体装置 |
US11/482,120 US7514756B2 (en) | 2005-11-11 | 2006-07-07 | Semiconductor device with MISFET |
US12/390,840 US7915688B2 (en) | 2005-11-11 | 2009-02-23 | Semiconductor device with MISFET |
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JP2005327583A JP2007134577A (ja) | 2005-11-11 | 2005-11-11 | 半導体装置 |
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JP2007134577A true JP2007134577A (ja) | 2007-05-31 |
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US (2) | US7514756B2 (ja) |
JP (1) | JP2007134577A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009200244A (ja) * | 2008-02-21 | 2009-09-03 | Toshiba Corp | 半導体装置、およびその製造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007134577A (ja) * | 2005-11-11 | 2007-05-31 | Toshiba Corp | 半導体装置 |
KR101109704B1 (ko) * | 2007-03-29 | 2012-02-08 | 후지쯔 세미컨덕터 가부시키가이샤 | 반도체장치 및 그 제조 방법 |
JP5203669B2 (ja) * | 2007-10-22 | 2013-06-05 | 株式会社東芝 | 半導体装置およびその製造方法 |
JP5305969B2 (ja) * | 2009-02-17 | 2013-10-02 | 株式会社東芝 | 半導体装置 |
US9397217B2 (en) * | 2012-12-28 | 2016-07-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Contact structure of non-planar semiconductor device |
CN104183492A (zh) * | 2013-05-21 | 2014-12-03 | 中芯国际集成电路制造(上海)有限公司 | 应力结构的形成方法 |
FR3069370B1 (fr) * | 2017-07-21 | 2021-10-22 | St Microelectronics Rousset | Circuit integre contenant une structure de leurre |
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JP2009200244A (ja) * | 2008-02-21 | 2009-09-03 | Toshiba Corp | 半導体装置、およびその製造方法 |
JP4568336B2 (ja) * | 2008-02-21 | 2010-10-27 | 株式会社東芝 | 半導体装置、およびその製造方法 |
Also Published As
Publication number | Publication date |
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US7514756B2 (en) | 2009-04-07 |
US20070108471A1 (en) | 2007-05-17 |
US7915688B2 (en) | 2011-03-29 |
US20090159979A1 (en) | 2009-06-25 |
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