JP2007103892A - 半導体素子のトランジスタ形成方法 - Google Patents
半導体素子のトランジスタ形成方法 Download PDFInfo
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- JP2007103892A JP2007103892A JP2005362831A JP2005362831A JP2007103892A JP 2007103892 A JP2007103892 A JP 2007103892A JP 2005362831 A JP2005362831 A JP 2005362831A JP 2005362831 A JP2005362831 A JP 2005362831A JP 2007103892 A JP2007103892 A JP 2007103892A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 79
- 238000000034 method Methods 0.000 title claims abstract description 64
- 125000006850 spacer group Chemical group 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 30
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 claims abstract description 14
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000007983 Tris buffer Substances 0.000 claims description 15
- -1 spacer nitride Chemical class 0.000 claims description 12
- 239000007864 aqueous solution Substances 0.000 claims description 8
- 239000000872 buffer Substances 0.000 claims description 8
- 230000002378 acidificating effect Effects 0.000 claims description 5
- ORJFXWYTRPGGRK-UHFFFAOYSA-N hydroxy-tris(2-methylbutan-2-yloxy)silane Chemical compound CCC(C)(C)O[Si](O)(OC(C)(C)CC)OC(C)(C)CC ORJFXWYTRPGGRK-UHFFFAOYSA-N 0.000 claims description 3
- HLDBBQREZCVBMA-UHFFFAOYSA-N hydroxy-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C HLDBBQREZCVBMA-UHFFFAOYSA-N 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 25
- 238000000151 deposition Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 6
- NRQNMMBQPIGPTB-UHFFFAOYSA-N methylaluminum Chemical compound [CH3].[Al] NRQNMMBQPIGPTB-UHFFFAOYSA-N 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 150000004819 silanols Chemical class 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/02304—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment formation of intermediate layers, e.g. buffer layers, layers to improve adhesion, lattice match or diffusion barriers
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【解決手段】半導体基板100上に複数のゲートスタック110を形成する段階と;前記半導体基板100上に気体状態のトリメチルアルミニウム及びトリス(tert-アルコキシ)シラノールを交互に供給することで、前記複数のゲートスタック110上にスペーサ酸化膜118を形成する段階と;を含んで半導体素子のトランジスタ形成方法を構成する。
【選択図】図1(D)
Description
Claims (6)
- 半導体基板上に複数のゲートスタックを形成する段階と、
前記半導体基板上に気体状態のトリメチルアルミニウム及びトリス(tert-アルコキシ)シラノールを交互に供給することで、前記複数のゲートスタック上にスペーサ酸化膜を形成する段階と、
を含むことを特徴とする半導体素子のトランジスタ形成方法。 - 前記ゲートスタックの形成段階後、前記複数のゲートスタックの表面を酸化する段階と、
前記複数のゲートスタック両側の半導体基板内にLDD領域を形成する段階と、
前記複数のゲートスタック上にバッファ酸化膜及びスペーサ窒化膜を順次形成する段階と、
をさらに含むことを特徴とする請求項1に記載の半導体素子のトランジスタ形成方法。 - 前記トリス(tert-アルコキシ)シラノールは、トリス(tert-ブトキシ)シラノールまたはトリス(tert-ペントキシ)シラノールであることを特徴とする請求項1または請求項2に記載の半導体素子のトランジスタ形成方法。
- 前記スペーサ酸化膜の形成段階は、常圧以下の圧力及び225〜250℃の温度で行うことを特徴とする請求項1または請求項2に記載の半導体素子のトランジスタ形成方法。
- 前記スペーサ酸化膜の形成段階前に、前記半導体基板の表面を酸性水溶液で洗浄する段階をさらに含むことを特徴とする請求項1または2に記載の半導体素子のトランジスタ形成方法。
- 前記酸性水溶液は、HF水溶液であることを特徴とする請求項5に記載の半導体素子のトランジスタ形成方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050092374A KR100675897B1 (ko) | 2005-09-30 | 2005-09-30 | 반도체 소자의 트랜지스터 형성 방법 |
Publications (1)
Publication Number | Publication Date |
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JP2007103892A true JP2007103892A (ja) | 2007-04-19 |
Family
ID=37902424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005362831A Pending JP2007103892A (ja) | 2005-09-30 | 2005-12-16 | 半導体素子のトランジスタ形成方法 |
Country Status (4)
Country | Link |
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US (1) | US20070077717A1 (ja) |
JP (1) | JP2007103892A (ja) |
KR (1) | KR100675897B1 (ja) |
TW (1) | TWI278938B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7902074B2 (en) | 2006-04-07 | 2011-03-08 | Micron Technology, Inc. | Simplified pitch doubling process flow |
US10483109B2 (en) * | 2016-04-12 | 2019-11-19 | Tokyo Electron Limited | Self-aligned spacer formation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020127763A1 (en) * | 2000-12-28 | 2002-09-12 | Mohamed Arafa | Sidewall spacers and methods of making same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20030001827A (ko) * | 2001-06-28 | 2003-01-08 | 삼성전자 주식회사 | 이중 게이트 산화막을 갖는 반도체 소자의 제조방법 |
US6638879B2 (en) * | 2001-12-06 | 2003-10-28 | Macronix International Co., Ltd. | Method for forming nitride spacer by using atomic layer deposition |
KR100996816B1 (ko) * | 2002-03-28 | 2010-11-25 | 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 | 이산화규소 나노라미네이트의 증기증착 |
US6664156B1 (en) * | 2002-07-31 | 2003-12-16 | Chartered Semiconductor Manufacturing, Ltd | Method for forming L-shaped spacers with precise width control |
US20060038293A1 (en) * | 2004-08-23 | 2006-02-23 | Rueger Neal R | Inter-metal dielectric fill |
-
2005
- 2005-09-30 KR KR1020050092374A patent/KR100675897B1/ko not_active IP Right Cessation
- 2005-12-15 US US11/303,225 patent/US20070077717A1/en not_active Abandoned
- 2005-12-16 JP JP2005362831A patent/JP2007103892A/ja active Pending
-
2006
- 2006-01-06 TW TW095100577A patent/TWI278938B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020127763A1 (en) * | 2000-12-28 | 2002-09-12 | Mohamed Arafa | Sidewall spacers and methods of making same |
Also Published As
Publication number | Publication date |
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KR100675897B1 (ko) | 2007-02-02 |
US20070077717A1 (en) | 2007-04-05 |
TWI278938B (en) | 2007-04-11 |
TW200713462A (en) | 2007-04-01 |
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