JP2007073684A - パターン形成方法 - Google Patents

パターン形成方法 Download PDF

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Publication number
JP2007073684A
JP2007073684A JP2005258128A JP2005258128A JP2007073684A JP 2007073684 A JP2007073684 A JP 2007073684A JP 2005258128 A JP2005258128 A JP 2005258128A JP 2005258128 A JP2005258128 A JP 2005258128A JP 2007073684 A JP2007073684 A JP 2007073684A
Authority
JP
Japan
Prior art keywords
film
resist
coating
pattern
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005258128A
Other languages
English (en)
Japanese (ja)
Inventor
Kenji Chiba
謙治 千葉
Hirokazu Kato
寛和 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2005258128A priority Critical patent/JP2007073684A/ja
Priority to TW095132426A priority patent/TW200721255A/zh
Priority to KR1020060085053A priority patent/KR100769405B1/ko
Priority to US11/515,933 priority patent/US7638267B2/en
Publication of JP2007073684A publication Critical patent/JP2007073684A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/427—Stripping or agents therefor using plasma means only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
JP2005258128A 2005-09-06 2005-09-06 パターン形成方法 Pending JP2007073684A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005258128A JP2007073684A (ja) 2005-09-06 2005-09-06 パターン形成方法
TW095132426A TW200721255A (en) 2005-09-06 2006-09-01 Pattern forming method
KR1020060085053A KR100769405B1 (ko) 2005-09-06 2006-09-05 패턴 형성 방법
US11/515,933 US7638267B2 (en) 2005-09-06 2006-09-06 Pattern forming method and manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005258128A JP2007073684A (ja) 2005-09-06 2005-09-06 パターン形成方法

Publications (1)

Publication Number Publication Date
JP2007073684A true JP2007073684A (ja) 2007-03-22

Family

ID=37934888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005258128A Pending JP2007073684A (ja) 2005-09-06 2005-09-06 パターン形成方法

Country Status (4)

Country Link
US (1) US7638267B2 (https=)
JP (1) JP2007073684A (https=)
KR (1) KR100769405B1 (https=)
TW (1) TW200721255A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100419A (ja) * 2006-10-18 2008-05-01 Nippon Telegr & Teleph Corp <Ntt> 微細構造作製方法及び装置
JP2014153665A (ja) * 2013-02-13 2014-08-25 Toshiba Corp マスク形成用材料および半導体装置の製造方法
JP2017016070A (ja) * 2015-07-06 2017-01-19 Hoya株式会社 レジストパターン形成方法、インプリント用モールドの製造方法、及びパターン基板の製造方法
JP2017058627A (ja) * 2015-09-18 2017-03-23 株式会社日本触媒 感光性樹脂組成物及びその硬化膜

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5096860B2 (ja) * 2007-10-04 2012-12-12 パナソニック株式会社 パターン形成方法
JP2010118501A (ja) * 2008-11-13 2010-05-27 Toshiba Corp 半導体装置の製造方法
JP5622512B2 (ja) * 2010-10-06 2014-11-12 株式会社東芝 半導体装置の製造方法
US10672619B2 (en) * 2016-12-15 2020-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Material composition and methods thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0745510A (ja) * 1993-08-03 1995-02-14 Hitachi Ltd パタン形成方法
JP2003142381A (ja) * 2001-11-05 2003-05-16 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
JP2003303757A (ja) * 2002-04-10 2003-10-24 Tokyo Ohka Kogyo Co Ltd 水溶性樹脂被覆の形成方法およびこれを用いた微細パターンの形成方法
JP2004031662A (ja) * 2002-06-26 2004-01-29 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
JP2004078034A (ja) * 2002-08-21 2004-03-11 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
WO2004111734A1 (ja) * 2003-06-11 2004-12-23 Tokyo Ohka Kogyo Co., Ltd. ポジ型レジスト組成物、レジスト積層体、およびレジストパターン形成方法
JP2005148597A (ja) * 2003-11-19 2005-06-09 Tokyo Ohka Kogyo Co Ltd パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP2005340720A (ja) * 2004-05-31 2005-12-08 Jsr Corp パターン形成方法及び半導体装置の製造方法
JP2006058600A (ja) * 2004-08-20 2006-03-02 Tokyo Ohka Kogyo Co Ltd パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP2006251646A (ja) * 2005-03-14 2006-09-21 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物、積層体、レジストパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03268427A (ja) 1990-03-19 1991-11-29 Hitachi Ltd 有機樹脂膜のパターン形成方法及び多層配線基板の製造方法
JP3874989B2 (ja) * 2000-03-21 2007-01-31 シャープ株式会社 パターンの形成方法
JP3660280B2 (ja) 2001-07-30 2005-06-15 株式会社半導体先端テクノロジーズ 微細レジストパターンの形成方法
US6551938B1 (en) * 2002-01-25 2003-04-22 Taiwon Semiconductor Manufacturing Company N2/H2 chemistry for dry development in top surface imaging technology
JP4016009B2 (ja) 2004-03-24 2007-12-05 株式会社東芝 パターン形成方法及び半導体装置の製造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0745510A (ja) * 1993-08-03 1995-02-14 Hitachi Ltd パタン形成方法
JP2003142381A (ja) * 2001-11-05 2003-05-16 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
JP2003303757A (ja) * 2002-04-10 2003-10-24 Tokyo Ohka Kogyo Co Ltd 水溶性樹脂被覆の形成方法およびこれを用いた微細パターンの形成方法
JP2004031662A (ja) * 2002-06-26 2004-01-29 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
JP2004078034A (ja) * 2002-08-21 2004-03-11 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
WO2004111734A1 (ja) * 2003-06-11 2004-12-23 Tokyo Ohka Kogyo Co., Ltd. ポジ型レジスト組成物、レジスト積層体、およびレジストパターン形成方法
JP2005148597A (ja) * 2003-11-19 2005-06-09 Tokyo Ohka Kogyo Co Ltd パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP2005340720A (ja) * 2004-05-31 2005-12-08 Jsr Corp パターン形成方法及び半導体装置の製造方法
JP2006058600A (ja) * 2004-08-20 2006-03-02 Tokyo Ohka Kogyo Co Ltd パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP2006251646A (ja) * 2005-03-14 2006-09-21 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物、積層体、レジストパターン形成方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100419A (ja) * 2006-10-18 2008-05-01 Nippon Telegr & Teleph Corp <Ntt> 微細構造作製方法及び装置
JP2014153665A (ja) * 2013-02-13 2014-08-25 Toshiba Corp マスク形成用材料および半導体装置の製造方法
JP2017016070A (ja) * 2015-07-06 2017-01-19 Hoya株式会社 レジストパターン形成方法、インプリント用モールドの製造方法、及びパターン基板の製造方法
JP2017058627A (ja) * 2015-09-18 2017-03-23 株式会社日本触媒 感光性樹脂組成物及びその硬化膜

Also Published As

Publication number Publication date
KR100769405B1 (ko) 2007-10-22
KR20070027454A (ko) 2007-03-09
TW200721255A (en) 2007-06-01
US20070105054A1 (en) 2007-05-10
US7638267B2 (en) 2009-12-29
TWI324791B (https=) 2010-05-11

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