JP2007012997A5 - - Google Patents

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Publication number
JP2007012997A5
JP2007012997A5 JP2005194037A JP2005194037A JP2007012997A5 JP 2007012997 A5 JP2007012997 A5 JP 2007012997A5 JP 2005194037 A JP2005194037 A JP 2005194037A JP 2005194037 A JP2005194037 A JP 2005194037A JP 2007012997 A5 JP2007012997 A5 JP 2007012997A5
Authority
JP
Japan
Prior art keywords
substrate
unit
drying
processing
supply means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005194037A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007012997A (ja
JP4753641B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005194037A priority Critical patent/JP4753641B2/ja
Priority claimed from JP2005194037A external-priority patent/JP4753641B2/ja
Priority to US11/475,598 priority patent/US7766565B2/en
Publication of JP2007012997A publication Critical patent/JP2007012997A/ja
Publication of JP2007012997A5 publication Critical patent/JP2007012997A5/ja
Application granted granted Critical
Publication of JP4753641B2 publication Critical patent/JP4753641B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005194037A 2005-07-01 2005-07-01 基板処理システム Expired - Lifetime JP4753641B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005194037A JP4753641B2 (ja) 2005-07-01 2005-07-01 基板処理システム
US11/475,598 US7766565B2 (en) 2005-07-01 2006-06-27 Substrate drying apparatus, substrate cleaning apparatus and substrate processing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005194037A JP4753641B2 (ja) 2005-07-01 2005-07-01 基板処理システム

Publications (3)

Publication Number Publication Date
JP2007012997A JP2007012997A (ja) 2007-01-18
JP2007012997A5 true JP2007012997A5 (enrdf_load_stackoverflow) 2007-11-08
JP4753641B2 JP4753641B2 (ja) 2011-08-24

Family

ID=37751075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005194037A Expired - Lifetime JP4753641B2 (ja) 2005-07-01 2005-07-01 基板処理システム

Country Status (1)

Country Link
JP (1) JP4753641B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5192206B2 (ja) 2007-09-13 2013-05-08 株式会社Ｓｏｋｕｄｏ 基板処理装置および基板処理方法
JP5238331B2 (ja) * 2008-04-16 2013-07-17 株式会社Ｓｏｋｕｄｏ 基板処理装置および基板処理システム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04196212A (ja) * 1990-11-27 1992-07-16 Mitsubishi Electric Corp 現像前洗浄装置
JPH0845811A (ja) * 1994-07-27 1996-02-16 Hitachi Ltd パターン形成方法およびそれを用いた半導体集積回路装置の製造方法
JP2001319870A (ja) * 2000-05-11 2001-11-16 Tokyo Electron Ltd 液処理方法
JP4342147B2 (ja) * 2002-05-01 2009-10-14 大日本スクリーン製造株式会社 基板処理装置
JP4525062B2 (ja) * 2002-12-10 2010-08-18 株式会社ニコン 露光装置及びデバイス製造方法、露光システム
KR101016724B1 (ko) * 2003-08-01 2011-02-25 주식회사 동진쎄미켐 감광성 수지 조성물을 제거하기 위한 씬너 조성물

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