JP2006350327A5 - - Google Patents
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- Publication number
- JP2006350327A5 JP2006350327A5 JP2006154103A JP2006154103A JP2006350327A5 JP 2006350327 A5 JP2006350327 A5 JP 2006350327A5 JP 2006154103 A JP2006154103 A JP 2006154103A JP 2006154103 A JP2006154103 A JP 2006154103A JP 2006350327 A5 JP2006350327 A5 JP 2006350327A5
- Authority
- JP
- Japan
- Prior art keywords
- dielectric film
- storage electrode
- insulating layer
- electrode
- contact hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 15
- 238000000059 patterning Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 230000005540 biological transmission Effects 0.000 claims 5
- 239000003990 capacitor Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 3
- 238000002834 transmittance Methods 0.000 claims 3
- 238000004380 ashing Methods 0.000 claims 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 1
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims 1
- 229910000423 chromium oxide Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050047861A KR101137735B1 (ko) | 2005-06-03 | 2005-06-03 | 표시장치, 표시장치의 제조 방법 및 마스크 |
| KR10-2005-0047861 | 2005-06-03 | ||
| KR1020050051910A KR20060131454A (ko) | 2005-06-16 | 2005-06-16 | 표시장치의 제조 방법 및 표시장치의 박막을 패터닝하기위한 마스크 |
| KR10-2005-0051910 | 2005-06-16 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012108418A Division JP5501402B2 (ja) | 2005-06-03 | 2012-05-10 | 表示装置及びマスク |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006350327A JP2006350327A (ja) | 2006-12-28 |
| JP2006350327A5 true JP2006350327A5 (enExample) | 2009-07-16 |
| JP5250738B2 JP5250738B2 (ja) | 2013-07-31 |
Family
ID=36940471
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006154103A Active JP5250738B2 (ja) | 2005-06-03 | 2006-06-02 | 表示装置、その製造方法、及びその製造方法で使用されるマスク |
| JP2012108418A Active JP5501402B2 (ja) | 2005-06-03 | 2012-05-10 | 表示装置及びマスク |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012108418A Active JP5501402B2 (ja) | 2005-06-03 | 2012-05-10 | 表示装置及びマスク |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8040444B2 (enExample) |
| EP (1) | EP1729169B1 (enExample) |
| JP (2) | JP5250738B2 (enExample) |
| TW (1) | TWI420246B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090078527A (ko) * | 2008-01-15 | 2009-07-20 | 삼성전자주식회사 | 표시 기판 |
| JP2010199518A (ja) * | 2009-02-27 | 2010-09-09 | Oki Semiconductor Co Ltd | 半導体装置の製造方法 |
| TWI413831B (zh) * | 2009-03-09 | 2013-11-01 | Pixel Qi Corp | 平常黑半穿透液晶顯示器 |
| US8314907B2 (en) * | 2009-07-28 | 2012-11-20 | Pixel Qi Corporation | Transflective display sub-pixel structures with transmissive area having different sizes and reflective area having equal sizes |
| US8698716B2 (en) | 2010-05-18 | 2014-04-15 | Pixel Qi Corporation | Low power consumption transflective liquid crystal displays |
| US8830426B2 (en) | 2010-11-17 | 2014-09-09 | Pixel Qi Corporation | Color shift reduction in transflective liquid crystal displays |
| CN102645839B (zh) * | 2011-06-15 | 2013-11-27 | 北京京东方光电科技有限公司 | 一种掩模板及其制造方法 |
| JP6173049B2 (ja) * | 2013-06-04 | 2017-08-02 | 三菱電機株式会社 | 表示パネル及びその製造方法、並びに、液晶表示パネル |
| EP2863291A1 (en) * | 2013-10-18 | 2015-04-22 | Applied Materials, Inc. | Transparent body for a touch panel manufacturing method and system for manufacturing a transparent body for a touch screen panel |
| WO2016150730A1 (en) * | 2015-03-20 | 2016-09-29 | Koninklijke Philips N.V. | High-intensity discharge lamp |
| CN105068373B (zh) * | 2015-09-11 | 2019-05-31 | 武汉华星光电技术有限公司 | Tft基板结构的制作方法 |
| US10459331B2 (en) * | 2017-03-13 | 2019-10-29 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Mask structure and COA type array substrate |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100590753B1 (ko) | 1999-02-27 | 2006-06-15 | 삼성전자주식회사 | 액정표시장치용박막트랜지스터기판및그제조방법 |
| TWI255957B (en) * | 1999-03-26 | 2006-06-01 | Hitachi Ltd | Liquid crystal display device and method of manufacturing the same |
| JP3844913B2 (ja) * | 1999-06-28 | 2006-11-15 | アルプス電気株式会社 | アクティブマトリックス型液晶表示装置 |
| JP4403329B2 (ja) * | 1999-08-30 | 2010-01-27 | ソニー株式会社 | 液晶表示装置の製造方法 |
| JP2001324725A (ja) * | 2000-05-12 | 2001-11-22 | Hitachi Ltd | 液晶表示装置およびその製造方法 |
| KR100848099B1 (ko) * | 2002-05-27 | 2008-07-24 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 기판 |
| JP2002214641A (ja) * | 2001-01-15 | 2002-07-31 | Toshiba Corp | 平面表示装置用アレイ基板の製造方法 |
| JP4651826B2 (ja) * | 2001-01-31 | 2011-03-16 | Nec液晶テクノロジー株式会社 | 反射型表示装置及びその製造方法 |
| KR100729767B1 (ko) | 2001-01-31 | 2007-06-20 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 기판의 제조 방법 |
| JP2003152086A (ja) | 2001-11-15 | 2003-05-23 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| KR100443831B1 (ko) * | 2001-12-20 | 2004-08-09 | 엘지.필립스 엘시디 주식회사 | 액정표시소자의 제조 방법 |
| KR100475111B1 (ko) * | 2001-12-28 | 2005-03-10 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 제조방법 |
| JP3857142B2 (ja) | 2002-01-11 | 2006-12-13 | シャープ株式会社 | 液晶用マトリクス基板の製造方法 |
| JP2003215635A (ja) * | 2002-01-21 | 2003-07-30 | Matsushita Electric Ind Co Ltd | 液晶表示装置およびその製造方法 |
| KR20030074991A (ko) | 2002-03-15 | 2003-09-22 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 어레이 기판 |
| US7042149B2 (en) * | 2002-06-13 | 2006-05-09 | Tfpd Corporation | Circuit array substrate for display device |
| US20070189916A1 (en) * | 2002-07-23 | 2007-08-16 | Heraeus Incorporated | Sputtering targets and methods for fabricating sputtering targets having multiple materials |
| KR100498543B1 (ko) * | 2002-11-07 | 2005-07-01 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이 기판 및 그 제조방법 |
| KR100929675B1 (ko) * | 2003-03-24 | 2009-12-03 | 삼성전자주식회사 | 다중 도메인 액정 표시 장치 및 그 박막 트랜지스터 기판 |
| JP4417072B2 (ja) * | 2003-03-28 | 2010-02-17 | シャープ株式会社 | 液晶表示装置用基板及びそれを用いた液晶表示装置 |
| KR100698047B1 (ko) * | 2003-04-19 | 2007-03-23 | 엘지.필립스 엘시디 주식회사 | 횡전계형 액정 표시 장치 및 그 제조 방법 |
-
2006
- 2006-05-15 US US11/434,487 patent/US8040444B2/en active Active
- 2006-05-31 EP EP06252818.7A patent/EP1729169B1/en active Active
- 2006-06-02 TW TW095119677A patent/TWI420246B/zh active
- 2006-06-02 JP JP2006154103A patent/JP5250738B2/ja active Active
-
2011
- 2011-09-22 US US13/239,759 patent/US8284338B2/en active Active
-
2012
- 2012-05-10 JP JP2012108418A patent/JP5501402B2/ja active Active
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