JP2006350327A5 - - Google Patents

Download PDF

Info

Publication number
JP2006350327A5
JP2006350327A5 JP2006154103A JP2006154103A JP2006350327A5 JP 2006350327 A5 JP2006350327 A5 JP 2006350327A5 JP 2006154103 A JP2006154103 A JP 2006154103A JP 2006154103 A JP2006154103 A JP 2006154103A JP 2006350327 A5 JP2006350327 A5 JP 2006350327A5
Authority
JP
Japan
Prior art keywords
dielectric film
storage electrode
insulating layer
electrode
contact hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006154103A
Other languages
English (en)
Japanese (ja)
Other versions
JP5250738B2 (ja
JP2006350327A (ja
Filing date
Publication date
Priority claimed from KR1020050047861A external-priority patent/KR101137735B1/ko
Priority claimed from KR1020050051910A external-priority patent/KR20060131454A/ko
Application filed filed Critical
Publication of JP2006350327A publication Critical patent/JP2006350327A/ja
Publication of JP2006350327A5 publication Critical patent/JP2006350327A5/ja
Application granted granted Critical
Publication of JP5250738B2 publication Critical patent/JP5250738B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006154103A 2005-06-03 2006-06-02 表示装置、その製造方法、及びその製造方法で使用されるマスク Active JP5250738B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020050047861A KR101137735B1 (ko) 2005-06-03 2005-06-03 표시장치, 표시장치의 제조 방법 및 마스크
KR10-2005-0047861 2005-06-03
KR1020050051910A KR20060131454A (ko) 2005-06-16 2005-06-16 표시장치의 제조 방법 및 표시장치의 박막을 패터닝하기위한 마스크
KR10-2005-0051910 2005-06-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012108418A Division JP5501402B2 (ja) 2005-06-03 2012-05-10 表示装置及びマスク

Publications (3)

Publication Number Publication Date
JP2006350327A JP2006350327A (ja) 2006-12-28
JP2006350327A5 true JP2006350327A5 (enExample) 2009-07-16
JP5250738B2 JP5250738B2 (ja) 2013-07-31

Family

ID=36940471

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006154103A Active JP5250738B2 (ja) 2005-06-03 2006-06-02 表示装置、その製造方法、及びその製造方法で使用されるマスク
JP2012108418A Active JP5501402B2 (ja) 2005-06-03 2012-05-10 表示装置及びマスク

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012108418A Active JP5501402B2 (ja) 2005-06-03 2012-05-10 表示装置及びマスク

Country Status (4)

Country Link
US (2) US8040444B2 (enExample)
EP (1) EP1729169B1 (enExample)
JP (2) JP5250738B2 (enExample)
TW (1) TWI420246B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090078527A (ko) * 2008-01-15 2009-07-20 삼성전자주식회사 표시 기판
JP2010199518A (ja) * 2009-02-27 2010-09-09 Oki Semiconductor Co Ltd 半導体装置の製造方法
TWI413831B (zh) * 2009-03-09 2013-11-01 Pixel Qi Corp 平常黑半穿透液晶顯示器
US8314907B2 (en) * 2009-07-28 2012-11-20 Pixel Qi Corporation Transflective display sub-pixel structures with transmissive area having different sizes and reflective area having equal sizes
US8698716B2 (en) 2010-05-18 2014-04-15 Pixel Qi Corporation Low power consumption transflective liquid crystal displays
US8830426B2 (en) 2010-11-17 2014-09-09 Pixel Qi Corporation Color shift reduction in transflective liquid crystal displays
CN102645839B (zh) * 2011-06-15 2013-11-27 北京京东方光电科技有限公司 一种掩模板及其制造方法
JP6173049B2 (ja) * 2013-06-04 2017-08-02 三菱電機株式会社 表示パネル及びその製造方法、並びに、液晶表示パネル
EP2863291A1 (en) * 2013-10-18 2015-04-22 Applied Materials, Inc. Transparent body for a touch panel manufacturing method and system for manufacturing a transparent body for a touch screen panel
WO2016150730A1 (en) * 2015-03-20 2016-09-29 Koninklijke Philips N.V. High-intensity discharge lamp
CN105068373B (zh) * 2015-09-11 2019-05-31 武汉华星光电技术有限公司 Tft基板结构的制作方法
US10459331B2 (en) * 2017-03-13 2019-10-29 Wuhan China Star Optoelectronics Technology Co., Ltd. Mask structure and COA type array substrate

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590753B1 (ko) 1999-02-27 2006-06-15 삼성전자주식회사 액정표시장치용박막트랜지스터기판및그제조방법
TWI255957B (en) * 1999-03-26 2006-06-01 Hitachi Ltd Liquid crystal display device and method of manufacturing the same
JP3844913B2 (ja) * 1999-06-28 2006-11-15 アルプス電気株式会社 アクティブマトリックス型液晶表示装置
JP4403329B2 (ja) * 1999-08-30 2010-01-27 ソニー株式会社 液晶表示装置の製造方法
JP2001324725A (ja) * 2000-05-12 2001-11-22 Hitachi Ltd 液晶表示装置およびその製造方法
KR100848099B1 (ko) * 2002-05-27 2008-07-24 삼성전자주식회사 액정 표시 장치용 박막 트랜지스터 기판
JP2002214641A (ja) * 2001-01-15 2002-07-31 Toshiba Corp 平面表示装置用アレイ基板の製造方法
JP4651826B2 (ja) * 2001-01-31 2011-03-16 Nec液晶テクノロジー株式会社 反射型表示装置及びその製造方法
KR100729767B1 (ko) 2001-01-31 2007-06-20 삼성전자주식회사 액정 표시 장치용 박막 트랜지스터 기판의 제조 방법
JP2003152086A (ja) 2001-11-15 2003-05-23 Semiconductor Energy Lab Co Ltd 半導体装置
KR100443831B1 (ko) * 2001-12-20 2004-08-09 엘지.필립스 엘시디 주식회사 액정표시소자의 제조 방법
KR100475111B1 (ko) * 2001-12-28 2005-03-10 엘지.필립스 엘시디 주식회사 액정표시장치의 제조방법
JP3857142B2 (ja) 2002-01-11 2006-12-13 シャープ株式会社 液晶用マトリクス基板の製造方法
JP2003215635A (ja) * 2002-01-21 2003-07-30 Matsushita Electric Ind Co Ltd 液晶表示装置およびその製造方法
KR20030074991A (ko) 2002-03-15 2003-09-22 삼성전자주식회사 액정 표시 장치용 박막 트랜지스터 어레이 기판
US7042149B2 (en) * 2002-06-13 2006-05-09 Tfpd Corporation Circuit array substrate for display device
US20070189916A1 (en) * 2002-07-23 2007-08-16 Heraeus Incorporated Sputtering targets and methods for fabricating sputtering targets having multiple materials
KR100498543B1 (ko) * 2002-11-07 2005-07-01 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이 기판 및 그 제조방법
KR100929675B1 (ko) * 2003-03-24 2009-12-03 삼성전자주식회사 다중 도메인 액정 표시 장치 및 그 박막 트랜지스터 기판
JP4417072B2 (ja) * 2003-03-28 2010-02-17 シャープ株式会社 液晶表示装置用基板及びそれを用いた液晶表示装置
KR100698047B1 (ko) * 2003-04-19 2007-03-23 엘지.필립스 엘시디 주식회사 횡전계형 액정 표시 장치 및 그 제조 방법

Similar Documents

Publication Publication Date Title
JP2006350327A5 (enExample)
US8305536B2 (en) Liquid crystal display device and method for fabricating the same including conductive layer pattern covering data line and active layer within opening of passivation layer
CN100511653C (zh) 薄膜晶体管及其应用的显示元件的制造方法
KR100914588B1 (ko) 액정 표시 장치의 하부기판 제조방법
TWI330407B (en) Method of manufacturing thin film transistor and display device applied with the same
KR20000001757A (ko) 액정표시장치의 제조방법
JP2007114734A (ja) 液晶表示装置用アレイ基板及びその製造方法
TWI730799B (zh) 影像感測器的製造方法及對準標記結構
JP4834235B2 (ja) グレートーン露光用フォトマスク
TWI364575B (en) Method of manufacturing liquid crystal display device
JP2006210595A5 (enExample)
JP2008066723A5 (enExample)
JP2004241769A5 (enExample)
CN101424847B (zh) Tft-lcd像素结构及其制造方法
US7332098B2 (en) Phase shift mask and fabricating method thereof
KR20010109681A (ko) 프린지 필드 구동 액정 표시장치의 제조방법
KR101016960B1 (ko) 액정표시장치용 어레이 기판의 제조 방법
KR101658514B1 (ko) 반사투과형 액정표시장치용 어레이 기판의 제조방법
CN102629586B (zh) 一种阵列基板及其制作方法和显示装置
KR20070068594A (ko) 박막 트랜지스터와 이의 제조 방법 및 박막 트랜지스터제조용 마스크
CN100401152C (zh) 图案化工艺与接触窗
KR101616919B1 (ko) 박막 트랜지스터 어레이 기판의 제조방법
CN112310120B (zh) 显示面板及显示面板的制备方法
JP2004303646A5 (enExample)
KR101227408B1 (ko) 액정표시장치용 어레이 기판 및 그 제조방법