TWI420246B - 顯示裝置及其製造方法及用於製造顯示裝置之光罩 - Google Patents

顯示裝置及其製造方法及用於製造顯示裝置之光罩 Download PDF

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Publication number
TWI420246B
TWI420246B TW095119677A TW95119677A TWI420246B TW I420246 B TWI420246 B TW I420246B TW 095119677 A TW095119677 A TW 095119677A TW 95119677 A TW95119677 A TW 95119677A TW I420246 B TWI420246 B TW I420246B
Authority
TW
Taiwan
Prior art keywords
pattern
dielectric layer
electrode
layer
contact hole
Prior art date
Application number
TW095119677A
Other languages
English (en)
Chinese (zh)
Other versions
TW200705115A (en
Inventor
蔡鍾哲
金時烈
金湘甲
昔俊亨
皇甫尚佑
張元基
李羲國
尹銖浣
金洙真
Original Assignee
三星顯示器有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020050047861A external-priority patent/KR101137735B1/ko
Priority claimed from KR1020050051910A external-priority patent/KR20060131454A/ko
Application filed by 三星顯示器有限公司 filed Critical 三星顯示器有限公司
Publication of TW200705115A publication Critical patent/TW200705115A/zh
Application granted granted Critical
Publication of TWI420246B publication Critical patent/TWI420246B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
    • G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
TW095119677A 2005-06-03 2006-06-02 顯示裝置及其製造方法及用於製造顯示裝置之光罩 TWI420246B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050047861A KR101137735B1 (ko) 2005-06-03 2005-06-03 표시장치, 표시장치의 제조 방법 및 마스크
KR1020050051910A KR20060131454A (ko) 2005-06-16 2005-06-16 표시장치의 제조 방법 및 표시장치의 박막을 패터닝하기위한 마스크

Publications (2)

Publication Number Publication Date
TW200705115A TW200705115A (en) 2007-02-01
TWI420246B true TWI420246B (zh) 2013-12-21

Family

ID=36940471

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095119677A TWI420246B (zh) 2005-06-03 2006-06-02 顯示裝置及其製造方法及用於製造顯示裝置之光罩

Country Status (4)

Country Link
US (2) US8040444B2 (enExample)
EP (1) EP1729169B1 (enExample)
JP (2) JP5250738B2 (enExample)
TW (1) TWI420246B (enExample)

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KR20090078527A (ko) * 2008-01-15 2009-07-20 삼성전자주식회사 표시 기판
JP2010199518A (ja) * 2009-02-27 2010-09-09 Oki Semiconductor Co Ltd 半導体装置の製造方法
TWI413831B (zh) * 2009-03-09 2013-11-01 Pixel Qi Corp 平常黑半穿透液晶顯示器
US8314907B2 (en) * 2009-07-28 2012-11-20 Pixel Qi Corporation Transflective display sub-pixel structures with transmissive area having different sizes and reflective area having equal sizes
US8698716B2 (en) 2010-05-18 2014-04-15 Pixel Qi Corporation Low power consumption transflective liquid crystal displays
US8830426B2 (en) 2010-11-17 2014-09-09 Pixel Qi Corporation Color shift reduction in transflective liquid crystal displays
CN102645839B (zh) * 2011-06-15 2013-11-27 北京京东方光电科技有限公司 一种掩模板及其制造方法
JP6173049B2 (ja) * 2013-06-04 2017-08-02 三菱電機株式会社 表示パネル及びその製造方法、並びに、液晶表示パネル
EP2863291A1 (en) * 2013-10-18 2015-04-22 Applied Materials, Inc. Transparent body for a touch panel manufacturing method and system for manufacturing a transparent body for a touch screen panel
WO2016150730A1 (en) * 2015-03-20 2016-09-29 Koninklijke Philips N.V. High-intensity discharge lamp
CN105068373B (zh) * 2015-09-11 2019-05-31 武汉华星光电技术有限公司 Tft基板结构的制作方法
US10459331B2 (en) * 2017-03-13 2019-10-29 Wuhan China Star Optoelectronics Technology Co., Ltd. Mask structure and COA type array substrate

Citations (2)

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US6661476B1 (en) * 1999-08-30 2003-12-09 Sony Corporation Liquid crystal display device and its manufacturing method
TWI255957B (en) * 1999-03-26 2006-06-01 Hitachi Ltd Liquid crystal display device and method of manufacturing the same

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JP3844913B2 (ja) * 1999-06-28 2006-11-15 アルプス電気株式会社 アクティブマトリックス型液晶表示装置
JP2001324725A (ja) * 2000-05-12 2001-11-22 Hitachi Ltd 液晶表示装置およびその製造方法
KR100848099B1 (ko) * 2002-05-27 2008-07-24 삼성전자주식회사 액정 표시 장치용 박막 트랜지스터 기판
JP2002214641A (ja) * 2001-01-15 2002-07-31 Toshiba Corp 平面表示装置用アレイ基板の製造方法
JP4651826B2 (ja) * 2001-01-31 2011-03-16 Ｎｅｃ液晶テクノロジー株式会社 反射型表示装置及びその製造方法
KR100729767B1 (ko) 2001-01-31 2007-06-20 삼성전자주식회사 액정 표시 장치용 박막 트랜지스터 기판의 제조 방법
JP2003152086A (ja) 2001-11-15 2003-05-23 Semiconductor Energy Lab Co Ltd 半導体装置
KR100443831B1 (ko) * 2001-12-20 2004-08-09 엘지.필립스 엘시디 주식회사 액정표시소자의 제조 방법
KR100475111B1 (ko) * 2001-12-28 2005-03-10 엘지.필립스 엘시디 주식회사 액정표시장치의 제조방법
JP3857142B2 (ja) 2002-01-11 2006-12-13 シャープ株式会社 液晶用マトリクス基板の製造方法
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KR100929675B1 (ko) * 2003-03-24 2009-12-03 삼성전자주식회사 다중 도메인 액정 표시 장치 및 그 박막 트랜지스터 기판
JP4417072B2 (ja) * 2003-03-28 2010-02-17 シャープ株式会社 液晶表示装置用基板及びそれを用いた液晶表示装置
KR100698047B1 (ko) * 2003-04-19 2007-03-23 엘지.필립스 엘시디 주식회사 횡전계형 액정 표시 장치 및 그 제조 방법

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TWI255957B (en) * 1999-03-26 2006-06-01 Hitachi Ltd Liquid crystal display device and method of manufacturing the same
US6661476B1 (en) * 1999-08-30 2003-12-09 Sony Corporation Liquid crystal display device and its manufacturing method

Also Published As

Publication number Publication date
EP1729169A1 (en) 2006-12-06
US8284338B2 (en) 2012-10-09
EP1729169B1 (en) 2017-08-16
JP5250738B2 (ja) 2013-07-31
JP5501402B2 (ja) 2014-05-21
US8040444B2 (en) 2011-10-18
JP2012194564A (ja) 2012-10-11
TW200705115A (en) 2007-02-01
JP2006350327A (ja) 2006-12-28
US20120009842A1 (en) 2012-01-12
US20060274236A1 (en) 2006-12-07

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