JP2006324667A - 発光素子パッケージ及びその製造方法 - Google Patents
発光素子パッケージ及びその製造方法 Download PDFInfo
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- JP2006324667A JP2006324667A JP2006137259A JP2006137259A JP2006324667A JP 2006324667 A JP2006324667 A JP 2006324667A JP 2006137259 A JP2006137259 A JP 2006137259A JP 2006137259 A JP2006137259 A JP 2006137259A JP 2006324667 A JP2006324667 A JP 2006324667A
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- Prior art keywords
- light emitting
- emitting device
- conductive
- light
- device package
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Abstract
発光素子パッケージ及びその製造方法を提供する。
【解決手段】
ワイヤボンディングを使用せず発光素子を他の素子と電気的に連結することにより、ワイヤボンディングのための空間を縮められてパッケージのサイズを減少することができる。
また、本発明は導電性インターコネクション部を用いて、発光素子にワイヤが存在しなくて、蛍光体の均一な塗布が容易であり、垂直発光光を吸収する面積を縮めて素子の光抽出を向上させることができる。
【選択図】図4
Description
図12は本発明により発光素子をアレイしてパッケージングした状態の断面図であって、上部及び下部それぞれに電極パッド301、302が形成されている複数個の発光素子300a、300bが基板200の上部に存する複数個の導電性パッド213b、213cに対応して接合されている。
サファイア基板708に発光ダイオード、例えば窒化ガリウム系発光ダイオード結晶構造が成長されたウェーハを処理洗浄した後ウェーハの上部p-型GaN表面に真空蒸着でp-型オーミック接触金属を形成させた後熱処理を行なってp-型オーミック接触を完成する。
レーザ光がサファイア基板を容易に透過できるようにする鏡面を形成するため、430μm程度の厚さを有するサファイア基板面をポリシングしてサファイア基板の厚さを約80ないし100μm程度に薄くする。
サブマウント基板に接合する前、それからサファイア基板を分離する前の段階でスクライビング/ブレーキング処理を通じて単位チップに分離する。
高出力発光ダイオードの場合は熱放出効率を向上させるため、サブマウント基板を使用する。この際、基板710の上部にはショートを防止するために絶縁膜720が蒸着されており、その上に導電性パッド、例えばn型導電性パッド715とp型導電性パッド716を形成する。
チップのサファイア面をレーザで照射してサファイア基板を除去する。
サファイア基板が除去されながら露出されたn型層、望ましくはn-窒化ガリウム表面を、必要な場合ポリシング工程や乾式(または湿式)食刻工程を行なった後、n-型オーミック接触金属713を蒸着させる。
GaN(undoped-GaN)層を食刻してn+-GaN層を露出させ、必要な場合n-オーミック接触形成のための金属(例えば、Ti/Al系の金属)を真空蒸着させることもできる。
発光ダイオードの最上部である露出されたn型層と導電性基板上に位置したn-導電性パッド、望ましくはn-オーミック接触金属層とn-導電性パッドの連結経路上に透明性絶縁膜を形成させた後導電性金属を用いた蒸着薄膜パターニングを通じて一つ以上のインターコネクション部を形成させる。
n-導電性パッドを外部電源、例えばリードフレームと連結させるため、金(gold)ワイヤボンディングを行ない、同様にp-導電性パッドもワイヤボンディングを通じて外部電源と連結させる。
その後、エポキシのようなモールディングまたは蛍光体が混合されたモールディングを塗布して発光ダイオード製作を完了する。前記段階(8)と(9)は必要に応じて順序を変更して実施可能である。
(a)第1基板上に成長された発光ダイオードを食刻してn型層を露出させた後n-オーミック接触金属を蒸着させる段階、(b)前記発光ダイオードの上部であるp型層上にp-オーミック接触金属を蒸着させる段階、(c) 前記第1基板の基板面を加工した後単位チップに分離する段階、(d)前記分離された単位チップの第1基板面を導電性パッド部が形成された第2基板上に接合する段階、(e) 前記p-オーミック接触金属面と第2基板上に位置した導電性パッド部を連結する経路上に絶縁膜を形成した後p-オーミック接触金属面と導電性パッドを連結する導電性インターコネクション部を一つ以上形成する段階、及び(g)前記導電性パッド部を外部電源とワイヤボンディングした後蛍光体塗布または蛍光体が混合されたモールディング材処理を行なう段階を含むことができる。
(interconnection)部’と称し、このインターコネクション部は前述した第1及び第2実施例の導電性ラインの一種である。
210、211、213a、213b、213c、214a、214b、214c、214d、214e、214f : 導電性パッド
300、300a、300b、350: 発光素子
301、302、305、351、352、360 : 電極パッド
310 : 接着剤 311 : 導電性接着剤
400 : 光透過用物質膜 401、402 : トレンチ(Trench)
410 : コーティング膜 420 : 平坦膜
500、521 : 導電性ライン 511、512 : 導電性物質
513 : 導電層 705 : n型層
706 : 活性層 707 : p型層
708 : サファイア基板 709 : ワイヤ
710 : サブマウント 712 : p-型オーミック接触金属
713 : n-型オーミック接触金属 715 : n型導電性パッド
716 : p型導電性パッド 717 : インターコネクション部
718 : 蛍光体 719 : 透明絶縁膜
720 : 絶縁膜
Claims (24)
- 導電性パッドが上部に形成された基板と、
前記基板に実装され、上部及び下部の少なくとも一つに電極パッドが形成されている発光素子と、
前記導電性パッドの一部及び前記発光素子の上部に形成された電極パッドの一部を露出させ、前記導電性パッド及び発光素子を包んでいる光透過用物質膜と、
前記導電性パッドの露出された一部から前記発光素子の電極パッドの露出された一部まで前記光透過用物質膜の表面に沿って形成された導電性ラインとを含んで構成された発光素子パッケージ。 - 前記基板は非伝導性基板であり、
前記導電性パッドから離隔された非伝導性基板の上部領域に他の導電性パッドが形成されていることを特徴とする請求項1に記載の発光素子パッケージ。 - 前記基板は伝導性基板であり、
前記導電性パッドと前記伝導性基板との間には絶縁膜がさらに介されていることを特徴とする請求項1に記載の発光素子パッケージ。 - 前記発光素子は、
赤色光または赤外線光を発光する素子であることを特徴とする請求項1に記載の発光素子パッケージ。 - 一対の導電性パッドが上部に形成された基板と、
前記基板の上部に実装され、上部に一対の電極パッドが形成されている発光素子と、
前記一対の導電性パッドそれぞれの一部及び該一対の電極パッドそれぞれの一部を露出させ、前記導電性パッド及び発光素子を包んでいる光透過用物質膜と、
前記一対の導電性パッドそれぞれの露出された一部から前記一対の電極パッドそれぞれの露出された一部まで前記光透過用物質膜の表面に沿って形成された一対の導電性ラインとを含んで構成される発光素子パッケージ。 - 前記発光素子は、
緑色または青色発光素子であることを特徴とする請求項5に記載の発光素子パッケージ。 - 前記光透過用物質膜は、
光透過の可能な感光物質よりなることを特徴とする請求項1ないし6のいずれか1項に記載の発光素子パッケージ。 - 前記光透過用物質膜の内部には、
前記発光素子から放出される光を波長転換させる蛍光体が分散されていることを特徴とする請求項1ないし6のいずれか1項に記載の発光素子パッケージ。 - 前記光透過用物質膜は、
導電性パッド及び発光素子の形状に沿って形成されていることを特徴とする請求項1ないし6のいずれか1項に記載の発光素子パッケージ。 - 前記光透過用物質膜は、
前記導電性パッド及び発光素子を包み、上部が平坦化されており、
前記導電性ラインは、
前記光透過用物質膜の上部から導電性パッド及び発光素子の電極パッドまでの光透過用物質膜がそれぞれ除去され形成された一対のトレンチに充填された導電性物質と、
前記一対のトレンチに充填された導電性物質を連結するように前記光透過用物質膜の上部に形成された導電層で構成されることを特徴とする請求項1に記載の発光素子パッケージ。 - 前記光透過用物質膜は、
前記導電性パッドから電極パッドまで最短距離に位置する領域に形成されていることを特徴とする請求項1に記載の発光素子パッケージ。 - 前記光透過用物質膜は、
前記発光素子の一部領域にだけ形成されており、
前記光透過用物質膜及び発光素子を包む蛍光体膜がさらに具備されることを特徴とする請求項1ないし6のいずれか1項に記載の発光素子パッケージ。 - 発光素子と、
前記発光素子の外部に配置され、外部電源と電気的に連結された導電性パッドと、
前記発光素子の一面または両面と前記導電性パッドとを連結する一つ以上のインターコネクション部とを含んで具備した発光素子パッケージ。 - 前記インターコネクション部は薄膜蒸着パターニングされることを特徴とする請求項13に記載の発光素子パッケージ。
- 前記インターコネクション部は、
Ag、Cu、Au、Al、Ti、Ni、Cr、Rh、Ir、Mo、W、Co、Zn、Cd、Ru、In、Os、Fe及びSnで構成された群から選択された1種以上の金属で製造されることを特徴とする請求項13または14に記載の発光素子パッケージ。 - 前記インターコネクション部により発光ダイオード部の表面と導電性パッド部が連結される連結経路上に絶縁膜が形成され、前記絶縁膜上に前記インターコネクション部が形成され、インターコネクション部と連結される発光ダイオード部のコンタクト部は電気的に連結されることを特徴とする請求項13または14に記載の発光素子パッケージ。
- 導電性パッドが上部に形成された基板に、上部及び下部の少なくとも一つに電極パッドが形成されている発光素子を実装する段階と、
前記導電性パッドの一部及び前記発光素子の上部に形成された電極パッドの一部を露出させ、前記導電性パッド及び発光素子を包む光透過用物質膜を形成する段階と、
前記導電性パッドの露出された一部から前記発光素子の電極パッドの露出された一部まで前記光透過用物質膜の表面に沿って導電性ラインを形成する段階とを含んで構成される発光素子パッケージの製造方法。 - 前記光透過用物質膜は、
光透過用物質を前記導電性パッド及び発光素子にコーティングして膜を形成し、前記導電性パッドの一部及び前記発光素子の上部に形成された電極パッドの一部が露出されるように、前記膜を選択的に除去する工程を行なって形成することを特徴とする請求項17に記載の発光素子パッケージの製造方法。 - 前記膜は、
スプレイコーティング法で形成することを特徴とする請求項18に記載の発光素子パッケージの製造方法。 - 前記光透過用物質膜を形成することは、
前記導電性パッド及び発光素子を包み、上部が平坦化された平坦膜を形成する工程と、
前記平坦膜の上部から導電性パッド及び発光素子の電極パッドまでの平坦膜がそれぞれ除去され形成された一対のトレンチを形成する工程と、
前記一対のトレンチに導電性物質を充填し、充填された導電性物質を連結する導電層を形成する工程を行なうことを特徴とする請求項17に記載の発光素子パッケージの製造方法。 - 一対の導電性パッドが上部に形成された基板上部に一対の電極パッドが形成されている発光素子を接合する段階と、
前記一対の導電性パッドそれぞれの一部及び前記一対の電極パッドそれぞれの一部を露出させ、前記導電性パッド及び発光素子を包んでいる光透過用物質膜を形成する段階と、
前記一対の導電性パッドそれぞれの露出された一部から前記一対の電極パッドそれぞれの露出された一部まで前記光透過用物質膜の表面に沿って形成された一対の導電性ラインを形成する段階を含んで構成される発光素子パッケージの製造方法。 - 前記光透過用物質膜は、
光透過の可能な感光物質よりなることを特徴とする請求項17または21に記載の発光素子パッケージの製造方法。 - 前記光透過用物質膜の内部には、
前記発光素子から放出される光を波長転換させる蛍光体が分散されていることを特徴とする請求項17または21に記載の発光素子パッケージの製造方法。 - 前記伝導性ラインは、
リフトオフ工程またはハードマスク工程を行なって形成することを特徴とする請求項17または21に記載の発光素子パッケージの製造方法。。
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JP2009302542A (ja) * | 2008-06-13 | 2009-12-24 | Samsung Electronics Co Ltd | 発光素子、発光素子を含む発光装置、発光素子の製造方法および発光素子を含む発光装置の製造方法 |
KR100993045B1 (ko) * | 2009-10-23 | 2010-11-08 | 엘지이노텍 주식회사 | 발광소자 칩 및 발광소자 패키지 |
JP2011181921A (ja) * | 2010-02-26 | 2011-09-15 | Samsung Led Co Ltd | マルチセルアレイを有する半導体発光装置及びその製造方法 |
KR101144616B1 (ko) * | 2010-04-28 | 2012-05-11 | 하나 마이크론(주) | 발광다이오드 패키지 제조 방법 |
JP2012529772A (ja) * | 2009-06-10 | 2012-11-22 | ブリッジラックス インコーポレイテッド | 基板から電気的に絶縁されたp型およびn型のコンタクトをもつ薄膜LED |
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US7683539B2 (en) | 2010-03-23 |
EP1724848A3 (en) | 2012-06-27 |
JP4664861B2 (ja) | 2011-04-06 |
CN1866561A (zh) | 2006-11-22 |
EP1724848B1 (en) | 2018-08-15 |
EP1724848A2 (en) | 2006-11-22 |
KR20060118840A (ko) | 2006-11-24 |
US20060261292A1 (en) | 2006-11-23 |
KR101047683B1 (ko) | 2011-07-08 |
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