JP2006275910A - 位置センシング装置及び位置センシング方法 - Google Patents

位置センシング装置及び位置センシング方法 Download PDF

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Publication number
JP2006275910A
JP2006275910A JP2005098172A JP2005098172A JP2006275910A JP 2006275910 A JP2006275910 A JP 2006275910A JP 2005098172 A JP2005098172 A JP 2005098172A JP 2005098172 A JP2005098172 A JP 2005098172A JP 2006275910 A JP2006275910 A JP 2006275910A
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JP
Japan
Prior art keywords
position sensing
change
electromagnetic wave
sensing device
phase
Prior art date
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Pending
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JP2005098172A
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English (en)
Japanese (ja)
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JP2006275910A5 (enExample
Inventor
Michitoku Shioda
道徳 塩田
Toshihiko Onouchi
敏彦 尾内
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005098172A priority Critical patent/JP2006275910A/ja
Priority to US11/387,729 priority patent/US7701587B2/en
Publication of JP2006275910A publication Critical patent/JP2006275910A/ja
Publication of JP2006275910A5 publication Critical patent/JP2006275910A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2005098172A 2005-03-30 2005-03-30 位置センシング装置及び位置センシング方法 Pending JP2006275910A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005098172A JP2006275910A (ja) 2005-03-30 2005-03-30 位置センシング装置及び位置センシング方法
US11/387,729 US7701587B2 (en) 2005-03-30 2006-03-24 Position sensing apparatus, and position sensing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005098172A JP2006275910A (ja) 2005-03-30 2005-03-30 位置センシング装置及び位置センシング方法

Publications (2)

Publication Number Publication Date
JP2006275910A true JP2006275910A (ja) 2006-10-12
JP2006275910A5 JP2006275910A5 (enExample) 2008-05-22

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JP2005098172A Pending JP2006275910A (ja) 2005-03-30 2005-03-30 位置センシング装置及び位置センシング方法

Country Status (2)

Country Link
US (1) US7701587B2 (enExample)
JP (1) JP2006275910A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009075071A (ja) * 2007-08-31 2009-04-09 Canon Inc 検査物に関する距離調整装置及び方法、検査装置及び方法

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US7630588B2 (en) * 2003-06-25 2009-12-08 Canon Kabushiki Kaisha High frequency electrical signal control device and sensing system
JP4533044B2 (ja) * 2003-08-27 2010-08-25 キヤノン株式会社 センサ
JP4136858B2 (ja) * 2003-09-12 2008-08-20 キヤノン株式会社 位置検出装置、及び情報入力装置
JP2005157601A (ja) 2003-11-25 2005-06-16 Canon Inc 電磁波による積層状物体計数装置及び計数方法
JP4217646B2 (ja) * 2004-03-26 2009-02-04 キヤノン株式会社 認証方法及び認証装置
JP4546326B2 (ja) * 2004-07-30 2010-09-15 キヤノン株式会社 センシング装置
JP4390147B2 (ja) * 2005-03-28 2009-12-24 キヤノン株式会社 周波数可変発振器
JP4250603B2 (ja) * 2005-03-28 2009-04-08 キヤノン株式会社 テラヘルツ波の発生素子、及びその製造方法
JP4402026B2 (ja) 2005-08-30 2010-01-20 キヤノン株式会社 センシング装置
JP4773839B2 (ja) * 2006-02-15 2011-09-14 キヤノン株式会社 対象物の情報を検出する検出装置
JP4481946B2 (ja) 2006-03-17 2010-06-16 キヤノン株式会社 検出素子及び画像形成装置
JP5132146B2 (ja) * 2006-03-17 2013-01-30 キヤノン株式会社 分析方法、分析装置、及び検体保持部材
JP4898472B2 (ja) * 2006-04-11 2012-03-14 キヤノン株式会社 検査装置
JP4709059B2 (ja) * 2006-04-28 2011-06-22 キヤノン株式会社 検査装置及び検査方法
JP5006642B2 (ja) * 2006-05-31 2012-08-22 キヤノン株式会社 テラヘルツ波発振器
JP5196750B2 (ja) 2006-08-25 2013-05-15 キヤノン株式会社 発振素子
JP4873746B2 (ja) * 2006-12-21 2012-02-08 キヤノン株式会社 発振素子
US7737402B2 (en) * 2007-08-31 2010-06-15 Canon Kabushiki Kaisha Distance adjusting apparatus and method, and object examining apparatus and method
JP5144175B2 (ja) * 2007-08-31 2013-02-13 キヤノン株式会社 電磁波を用いる検査装置及び検査方法
US7869036B2 (en) * 2007-08-31 2011-01-11 Canon Kabushiki Kaisha Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information
JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
JP4834718B2 (ja) * 2008-01-29 2011-12-14 キヤノン株式会社 パルスレーザ装置、テラヘルツ発生装置、テラヘルツ計測装置及びテラヘルツトモグラフィー装置
JP5357531B2 (ja) * 2008-02-05 2013-12-04 キヤノン株式会社 情報取得装置及び情報取得方法
JP5028529B2 (ja) * 2008-10-14 2012-09-19 国立大学法人東北大学 試料分析方法
JP5623061B2 (ja) * 2008-12-12 2014-11-12 キヤノン株式会社 検査装置及び検査方法
JP5665305B2 (ja) * 2008-12-25 2015-02-04 キヤノン株式会社 分析装置
JP5612842B2 (ja) 2009-09-07 2014-10-22 キヤノン株式会社 発振器
US8462002B2 (en) 2010-06-18 2013-06-11 The Invention Science Fund I, Llc Personal telecommunication device with target-based exposure control
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009075071A (ja) * 2007-08-31 2009-04-09 Canon Inc 検査物に関する距離調整装置及び方法、検査装置及び方法

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US7701587B2 (en) 2010-04-20
US20060227340A1 (en) 2006-10-12

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