JP2006253647A - 半導体発光素子およびその製法 - Google Patents
半導体発光素子およびその製法 Download PDFInfo
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- JP2006253647A JP2006253647A JP2005366961A JP2005366961A JP2006253647A JP 2006253647 A JP2006253647 A JP 2006253647A JP 2005366961 A JP2005366961 A JP 2005366961A JP 2005366961 A JP2005366961 A JP 2005366961A JP 2006253647 A JP2006253647 A JP 2006253647A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
Abstract
【解決手段】 たとえばサファイアなどからなる基板1の表面に窒化物半導体からなる第1導電形層および第2導電形層を含む半導体積層部6が設けられ、その半導体積層部6の表面側の第1導電形層(たとえばp形層5)に電気的に接続して第1電極(たとえばp側電極8)が設けられ、第2導電形層(たとえばn形層3)に電気的に接続して第2電極(たとえばn側電極9)が形成されている。そして、半導体積層部6の少なくともチップ周囲において、半導体積層部が柱状に林立した柱状部6aが残存し、柱状部6aの周囲はn形層3が露出するように、半導体積層部6の一部がエッチングにより除去されている。
【選択図】 図1
Description
3 n形層
4 活性層
5 p形層
6 半導体積層部
6a 柱状半導体積層部(柱状部)
7 透光性導電層
8 p側電極
9 n側電極
10 メサ構造部
Claims (7)
- 基板と、窒化物半導体からなり第1導電形層および第2導電形層を含み、前記基板上に設けられる半導体積層部と、該半導体積層部の表面側の前記第1導電形層に電気的に接続して設けられる第1電極と、前記第2導電形層に電気的に接続して設けられる第2電極とを有する半導体発光素子であって、少なくともチップ周囲において前記第2導電形層が露出するように前記半導体積層部の一部がエッチングされることにより、前記半導体積層部のメサ構造部が形成されると共に、該メサ構造部の周囲に前記半導体積層部が柱状に林立して残存する柱状部が形成されてなる半導体発光素子。
- 前記メサ構造部の側壁と前記柱状部との間隔が少なくとも0.5μm以上設けられてなる請求項1記載の半導体発光素子。
- 前記半導体積層部が前記第1導電形層と第2導電形層との間に活性層を有し、前記柱状部の高さが前記活性層の位置よりも低くなるように頂部がエッチングされてなる請求項1または2記載の半導体発光素子。
- 前記基板が絶縁性基板からなり、前記半導体積層部の一部がエッチングにより除去されて前記第2導電形層を露出させ、該露出した第2導電形層の表面に前記第2電極が設けられ、該第2電極の周囲にも前記柱状部が林立するように形成されてなる請求項1ないし3のいずれか1項記載の半導体発光素子。
- 前記基板が半導体基板からなり、前記第2電極が該半導体基板の裏面に形成されてなる請求項1ないし3のいずれか1項記載の半導体発光素子。
- ウェハ状基板表面に発光層を形成するように窒化物半導体層を積層して半導体積層部を形成し、該半導体積層部が形成されたウェハ状基板を分割してチップ化することにより発光素子チップを形成する半導体発光素子の製法であって、前記ウェハ状基板をチップに分割する部分の前記半導体積層部を、柱状の半導体積層部からなる柱状部が林立して残存するようにマスクを形成して、前記基板側の導電形の半導体層が露出するまでエッチングすることにより半導体積層部からなるメサ構造部の周囲に柱状部を形成し、その後に該柱状部の部分で前記基板を分割することを特徴とする窒化物半導体発光素子の製法。
- 前記半導体積層部をn形層と活性層とp形層とのダブルへテロ構造で形成し、前記柱状部の高さが前記活性層の位置より低くなるように、前記柱状部の頂部をさらにエッチングする請求項6記載の窒化物半導体発光素子の製法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005366961A JP4980615B2 (ja) | 2005-02-08 | 2005-12-20 | 半導体発光素子およびその製法 |
CN2006800043424A CN101116192B (zh) | 2005-02-08 | 2006-02-07 | 半导体发光元件及其制法 |
PCT/JP2006/302026 WO2006085514A1 (ja) | 2005-02-08 | 2006-02-07 | 半導体発光素子およびその製法 |
US11/815,759 US8124985B2 (en) | 2005-02-08 | 2006-02-07 | Semiconductor light emitting device and method for manufacturing the same |
KR1020077017887A KR20070104384A (ko) | 2005-02-08 | 2006-02-07 | 반도체 발광 소자 및 그 제법 |
EP06713169A EP1848043A4 (en) | 2005-02-08 | 2006-02-07 | SEMICONDUCTOR LUMINOUS ELEMENT AND METHOD THEREFOR |
TW095104235A TW200701521A (en) | 2005-02-08 | 2006-02-08 | Semiconductor light emitting element and manufacturing method |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005031682 | 2005-02-08 | ||
JP2005031682 | 2005-02-08 | ||
JP2005366961A JP4980615B2 (ja) | 2005-02-08 | 2005-12-20 | 半導体発光素子およびその製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006253647A true JP2006253647A (ja) | 2006-09-21 |
JP4980615B2 JP4980615B2 (ja) | 2012-07-18 |
Family
ID=36793086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005366961A Expired - Fee Related JP4980615B2 (ja) | 2005-02-08 | 2005-12-20 | 半導体発光素子およびその製法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8124985B2 (ja) |
EP (1) | EP1848043A4 (ja) |
JP (1) | JP4980615B2 (ja) |
KR (1) | KR20070104384A (ja) |
CN (1) | CN101116192B (ja) |
TW (1) | TW200701521A (ja) |
WO (1) | WO2006085514A1 (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008020819A1 (en) * | 2006-08-16 | 2008-02-21 | Tinggi Technologies Private Limited | Improvements in external light efficiency of light emitting diodes |
JP2008131000A (ja) * | 2006-11-24 | 2008-06-05 | Nichia Chem Ind Ltd | 半導体発光素子、半導体発光素子の製造方法及び半導体発光装置 |
US7763477B2 (en) | 2004-03-15 | 2010-07-27 | Tinggi Technologies Pte Limited | Fabrication of semiconductor devices |
US8004001B2 (en) | 2005-09-29 | 2011-08-23 | Tinggi Technologies Private Limited | Fabrication of semiconductor devices for light emission |
US8067269B2 (en) | 2005-10-19 | 2011-11-29 | Tinggi Technologies Private Limted | Method for fabricating at least one transistor |
US8124994B2 (en) | 2006-09-04 | 2012-02-28 | Tinggi Technologies Private Limited | Electrical current distribution in light emitting devices |
US8309377B2 (en) | 2004-04-07 | 2012-11-13 | Tinggi Technologies Private Limited | Fabrication of reflective layer on semiconductor light emitting devices |
US8329556B2 (en) | 2005-12-20 | 2012-12-11 | Tinggi Technologies Private Limited | Localized annealing during semiconductor device fabrication |
KR20150033953A (ko) * | 2013-09-25 | 2015-04-02 | 삼성전자주식회사 | 반도체 발광소자 제조방법 |
JP2017028032A (ja) * | 2015-07-17 | 2017-02-02 | 株式会社トクヤマ | 窒化物半導体発光素子 |
US9871166B2 (en) | 2014-01-20 | 2018-01-16 | Rohm Co., Ltd. | Light emitting device |
WO2018025805A1 (ja) * | 2016-08-02 | 2018-02-08 | スタンレー電気株式会社 | 半導体発光素子及びその製造方法 |
JP2019117905A (ja) * | 2017-12-27 | 2019-07-18 | ローム株式会社 | 半導体発光装置 |
Families Citing this family (12)
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TWI437731B (zh) * | 2009-03-06 | 2014-05-11 | Advanced Optoelectronic Tech | 一種具有提升光取出率之半導體光電元件及其製造方法 |
CN101840968B (zh) * | 2009-03-16 | 2012-03-21 | 展晶科技(深圳)有限公司 | 一种能够提升光取出率的半导体光电元件及其制造方法 |
US10205059B2 (en) * | 2010-02-09 | 2019-02-12 | Epistar Corporation | Optoelectronic device and the manufacturing method thereof |
KR20120137865A (ko) * | 2011-06-13 | 2012-12-24 | 엘지이노텍 주식회사 | 발광소자 및 발광소자 패키지 |
KR101786094B1 (ko) | 2011-06-23 | 2017-10-16 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 패키지, 및 라이트 유닛 |
CN103782399B (zh) * | 2011-08-09 | 2016-11-09 | 三星电子株式会社 | 氮化物半导体发光元件 |
KR20130024089A (ko) | 2011-08-30 | 2013-03-08 | 엘지이노텍 주식회사 | 발광소자 |
CN102832302A (zh) * | 2012-08-31 | 2012-12-19 | 扬州中科半导体照明有限公司 | 一种GaN基LED中N电极的制作方法 |
KR102013363B1 (ko) | 2012-11-09 | 2019-08-22 | 서울바이오시스 주식회사 | 발광 소자 및 그것을 제조하는 방법 |
US9257481B2 (en) | 2012-11-26 | 2016-02-09 | Epistar Corporation | LED arrray including light-guiding structure |
CN103413874A (zh) * | 2013-08-21 | 2013-11-27 | 聚灿光电科技(苏州)有限公司 | Led芯片及其制备方法 |
JP2017005191A (ja) | 2015-06-15 | 2017-01-05 | 株式会社東芝 | 半導体発光装置 |
Citations (3)
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JP2004221529A (ja) * | 2002-10-03 | 2004-08-05 | Nichia Chem Ind Ltd | 発光ダイオード |
WO2005004247A1 (en) * | 2003-07-03 | 2005-01-13 | Epivalley Co., Ltd. | Iii-nitride compound semiconductor light emitting device |
US20050082562A1 (en) * | 2003-10-15 | 2005-04-21 | Epistar Corporation | High efficiency nitride based light emitting device |
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JP3881472B2 (ja) | 1999-04-15 | 2007-02-14 | ローム株式会社 | 半導体発光素子の製法 |
US7304325B2 (en) | 2000-05-01 | 2007-12-04 | Toyoda Gosei Co., Ltd. | Group III nitride compound semiconductor light-emitting device |
DE10224219B4 (de) * | 2002-05-31 | 2010-05-27 | Osram Opto Semiconductors Gmbh | Lichtemittierendes Halbleiterbauelement mit zumindest teilweise voneinander getrennten Lichterzeugungs- und Lichtauskopplungsbereichen |
TWI292961B (en) | 2002-09-05 | 2008-01-21 | Nichia Corp | Semiconductor device and an optical device using the semiconductor device |
US7102175B2 (en) | 2003-04-15 | 2006-09-05 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light-emitting device and method for fabricating the same |
JP2005005679A (ja) * | 2003-04-15 | 2005-01-06 | Matsushita Electric Ind Co Ltd | 半導体発光素子およびその製造方法 |
JP4572597B2 (ja) * | 2003-06-20 | 2010-11-04 | 日亜化学工業株式会社 | 窒化物半導体素子 |
-
2005
- 2005-12-20 JP JP2005366961A patent/JP4980615B2/ja not_active Expired - Fee Related
-
2006
- 2006-02-07 EP EP06713169A patent/EP1848043A4/en not_active Withdrawn
- 2006-02-07 WO PCT/JP2006/302026 patent/WO2006085514A1/ja active Application Filing
- 2006-02-07 US US11/815,759 patent/US8124985B2/en active Active
- 2006-02-07 KR KR1020077017887A patent/KR20070104384A/ko not_active Application Discontinuation
- 2006-02-07 CN CN2006800043424A patent/CN101116192B/zh not_active Expired - Fee Related
- 2006-02-08 TW TW095104235A patent/TW200701521A/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004221529A (ja) * | 2002-10-03 | 2004-08-05 | Nichia Chem Ind Ltd | 発光ダイオード |
WO2005004247A1 (en) * | 2003-07-03 | 2005-01-13 | Epivalley Co., Ltd. | Iii-nitride compound semiconductor light emitting device |
US20050082562A1 (en) * | 2003-10-15 | 2005-04-21 | Epistar Corporation | High efficiency nitride based light emitting device |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7763477B2 (en) | 2004-03-15 | 2010-07-27 | Tinggi Technologies Pte Limited | Fabrication of semiconductor devices |
US8309377B2 (en) | 2004-04-07 | 2012-11-13 | Tinggi Technologies Private Limited | Fabrication of reflective layer on semiconductor light emitting devices |
US8004001B2 (en) | 2005-09-29 | 2011-08-23 | Tinggi Technologies Private Limited | Fabrication of semiconductor devices for light emission |
US8067269B2 (en) | 2005-10-19 | 2011-11-29 | Tinggi Technologies Private Limted | Method for fabricating at least one transistor |
US8329556B2 (en) | 2005-12-20 | 2012-12-11 | Tinggi Technologies Private Limited | Localized annealing during semiconductor device fabrication |
US8395167B2 (en) | 2006-08-16 | 2013-03-12 | Tinggi Technologies Private Limited | External light efficiency of light emitting diodes |
WO2008020819A1 (en) * | 2006-08-16 | 2008-02-21 | Tinggi Technologies Private Limited | Improvements in external light efficiency of light emitting diodes |
US8124994B2 (en) | 2006-09-04 | 2012-02-28 | Tinggi Technologies Private Limited | Electrical current distribution in light emitting devices |
JP2008131000A (ja) * | 2006-11-24 | 2008-06-05 | Nichia Chem Ind Ltd | 半導体発光素子、半導体発光素子の製造方法及び半導体発光装置 |
KR20150033953A (ko) * | 2013-09-25 | 2015-04-02 | 삼성전자주식회사 | 반도체 발광소자 제조방법 |
KR102075988B1 (ko) * | 2013-09-25 | 2020-03-02 | 삼성전자주식회사 | 반도체 발광소자 제조방법 |
US9871166B2 (en) | 2014-01-20 | 2018-01-16 | Rohm Co., Ltd. | Light emitting device |
JP2017028032A (ja) * | 2015-07-17 | 2017-02-02 | 株式会社トクヤマ | 窒化物半導体発光素子 |
TWI715601B (zh) * | 2015-07-17 | 2021-01-11 | 日商斯坦雷電氣股份有限公司 | 氮化物半導體發光元件 |
WO2018025805A1 (ja) * | 2016-08-02 | 2018-02-08 | スタンレー電気株式会社 | 半導体発光素子及びその製造方法 |
US10727371B2 (en) | 2016-08-02 | 2020-07-28 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element and method for producing same |
JP2019117905A (ja) * | 2017-12-27 | 2019-07-18 | ローム株式会社 | 半導体発光装置 |
JP7010692B2 (ja) | 2017-12-27 | 2022-01-26 | ローム株式会社 | 半導体発光装置 |
Also Published As
Publication number | Publication date |
---|---|
CN101116192A (zh) | 2008-01-30 |
CN101116192B (zh) | 2011-04-06 |
US20100019257A1 (en) | 2010-01-28 |
JP4980615B2 (ja) | 2012-07-18 |
KR20070104384A (ko) | 2007-10-25 |
US8124985B2 (en) | 2012-02-28 |
WO2006085514A1 (ja) | 2006-08-17 |
TW200701521A (en) | 2007-01-01 |
TWI377696B (ja) | 2012-11-21 |
EP1848043A4 (en) | 2011-11-30 |
EP1848043A1 (en) | 2007-10-24 |
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