JP2006253395A5 - - Google Patents
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- Publication number
- JP2006253395A5 JP2006253395A5 JP2005067535A JP2005067535A JP2006253395A5 JP 2006253395 A5 JP2006253395 A5 JP 2006253395A5 JP 2005067535 A JP2005067535 A JP 2005067535A JP 2005067535 A JP2005067535 A JP 2005067535A JP 2006253395 A5 JP2006253395 A5 JP 2006253395A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- opening
- forming
- electrode
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims 12
- 229920002120 photoresistant polymer Polymers 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005067535A JP4282625B2 (ja) | 2005-03-10 | 2005-03-10 | 半導体装置及びその製造方法 |
| US11/338,715 US7696531B2 (en) | 2005-03-10 | 2006-01-25 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005067535A JP4282625B2 (ja) | 2005-03-10 | 2005-03-10 | 半導体装置及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006253395A JP2006253395A (ja) | 2006-09-21 |
| JP2006253395A5 true JP2006253395A5 (enExample) | 2007-02-15 |
| JP4282625B2 JP4282625B2 (ja) | 2009-06-24 |
Family
ID=36969916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005067535A Expired - Fee Related JP4282625B2 (ja) | 2005-03-10 | 2005-03-10 | 半導体装置及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7696531B2 (enExample) |
| JP (1) | JP4282625B2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011249728A (ja) * | 2010-05-31 | 2011-12-08 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
| US9519095B2 (en) | 2013-01-30 | 2016-12-13 | Cree, Inc. | Optical waveguides |
| US9625638B2 (en) | 2013-03-15 | 2017-04-18 | Cree, Inc. | Optical waveguide body |
| US9442243B2 (en) | 2013-01-30 | 2016-09-13 | Cree, Inc. | Waveguide bodies including redirection features and methods of producing same |
| US9366396B2 (en) | 2013-01-30 | 2016-06-14 | Cree, Inc. | Optical waveguide and lamp including same |
| US9291320B2 (en) | 2013-01-30 | 2016-03-22 | Cree, Inc. | Consolidated troffer |
| US9869432B2 (en) | 2013-01-30 | 2018-01-16 | Cree, Inc. | Luminaires using waveguide bodies and optical elements |
| US10379278B2 (en) * | 2013-03-15 | 2019-08-13 | Ideal Industries Lighting Llc | Outdoor and/or enclosed structure LED luminaire outdoor and/or enclosed structure LED luminaire having outward illumination |
| US10209429B2 (en) | 2013-03-15 | 2019-02-19 | Cree, Inc. | Luminaire with selectable luminous intensity pattern |
| US10502899B2 (en) * | 2013-03-15 | 2019-12-10 | Ideal Industries Lighting Llc | Outdoor and/or enclosed structure LED luminaire |
| US9366799B2 (en) | 2013-03-15 | 2016-06-14 | Cree, Inc. | Optical waveguide bodies and luminaires utilizing same |
| US9798072B2 (en) | 2013-03-15 | 2017-10-24 | Cree, Inc. | Optical element and method of forming an optical element |
| US9651740B2 (en) | 2014-01-09 | 2017-05-16 | Cree, Inc. | Extraction film for optical waveguide and method of producing same |
| US10416377B2 (en) | 2016-05-06 | 2019-09-17 | Cree, Inc. | Luminaire with controllable light emission |
| US11719882B2 (en) | 2016-05-06 | 2023-08-08 | Ideal Industries Lighting Llc | Waveguide-based light sources with dynamic beam shaping |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0335536A (ja) * | 1989-06-30 | 1991-02-15 | Fujitsu Ltd | 電界効果型半導体装置 |
| JPH04163924A (ja) * | 1990-10-29 | 1992-06-09 | Sony Corp | 電界効果トランジスタ |
| US5362979A (en) * | 1991-02-01 | 1994-11-08 | Philips Electronics North America Corporation | SOI transistor with improved source-high performance |
| US5273933A (en) * | 1991-07-23 | 1993-12-28 | Kabushiki Kaisha Toshiba | Vapor phase growth method of forming film in process of manufacturing semiconductor device |
| JPH05152338A (ja) * | 1991-11-28 | 1993-06-18 | Sanyo Electric Co Ltd | 化合物半導体装置 |
| JPH09289304A (ja) * | 1996-04-19 | 1997-11-04 | Rohm Co Ltd | 半導体装置 |
| JP3035215B2 (ja) * | 1996-05-23 | 2000-04-24 | ローム株式会社 | 半導体装置 |
| JP3353764B2 (ja) | 1999-11-12 | 2002-12-03 | 日本電気株式会社 | 半導体装置の製造方法 |
| JP2001230263A (ja) * | 2001-01-29 | 2001-08-24 | Nec Corp | 電界効果型トランジスタ |
| JP3600544B2 (ja) * | 2001-03-30 | 2004-12-15 | ユーディナデバイス株式会社 | 半導体装置の製造方法 |
| JP3744381B2 (ja) * | 2001-05-17 | 2006-02-08 | 日本電気株式会社 | 電界効果型トランジスタ |
| JP4385206B2 (ja) * | 2003-01-07 | 2009-12-16 | 日本電気株式会社 | 電界効果トランジスタ |
-
2005
- 2005-03-10 JP JP2005067535A patent/JP4282625B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-25 US US11/338,715 patent/US7696531B2/en not_active Expired - Fee Related
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