JP2006242679A - 基板検査装置及び基板検査装置の組み立て方法 - Google Patents

基板検査装置及び基板検査装置の組み立て方法 Download PDF

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JP2006242679A
JP2006242679A JP2005057071A JP2005057071A JP2006242679A JP 2006242679 A JP2006242679 A JP 2006242679A JP 2005057071 A JP2005057071 A JP 2005057071A JP 2005057071 A JP2005057071 A JP 2005057071A JP 2006242679 A JP2006242679 A JP 2006242679A
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base
substrate
base portion
unit
portions
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JP2005057071A
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JP2006242679A5 (zh
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Shuya Jogasaki
修哉 城ヶ崎
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Olympus Corp
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Olympus Corp
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JP2005057071A 2005-03-02 2005-03-02 基板検査装置及び基板検査装置の組み立て方法 Pending JP2006242679A (ja)

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JP2005057071A JP2006242679A (ja) 2005-03-02 2005-03-02 基板検査装置及び基板検査装置の組み立て方法

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JP2005057071A JP2006242679A (ja) 2005-03-02 2005-03-02 基板検査装置及び基板検査装置の組み立て方法

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JP2006242679A true JP2006242679A (ja) 2006-09-14
JP2006242679A5 JP2006242679A5 (zh) 2008-04-17

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006308334A (ja) * 2005-04-26 2006-11-09 Horiba Ltd パネル部材検査装置及びそれに適用される位置情報補正プログラム
WO2008035752A1 (fr) * 2006-09-22 2008-03-27 Olympus Corporation Appareil d'inspection de substrat
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法
JP2008139050A (ja) * 2006-11-30 2008-06-19 Hitachi Kokusai Electric Inc 線幅測定装置
JP2009060066A (ja) * 2007-09-04 2009-03-19 Dainippon Screen Mfg Co Ltd 処理装置
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
JP2009092553A (ja) * 2007-10-10 2009-04-30 Olympus Corp 基板検査装置
JP2010091628A (ja) * 2008-10-03 2010-04-22 Hitachi High-Technologies Corp 表示用パネル露光装置および露光方法並びに表示用パネル露光装置の組立てまたは調整方法
JP2011069655A (ja) * 2009-09-24 2011-04-07 Hitachi High-Technologies Corp ガラス基板の検査装置
JP2014110358A (ja) * 2012-12-04 2014-06-12 National Institute Of Advanced Industrial & Technology 製造ラインを構成するためのユニットとその組み立て方法
TWI577624B (zh) * 2016-09-30 2017-04-11 均豪精密工業股份有限公司 翹曲板材搬送物流系統
CN107879109A (zh) * 2016-09-30 2018-04-06 均豪精密工业股份有限公司 翘曲板材搬送物流系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0378459U (zh) * 1989-11-28 1991-08-08
JPH08140789A (ja) * 1994-11-16 1996-06-04 Fuji Electric Co Ltd ショーケースの組立用治具および組立方法
JP2004279335A (ja) * 2003-03-18 2004-10-07 Olympus Corp 基板検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0378459U (zh) * 1989-11-28 1991-08-08
JPH08140789A (ja) * 1994-11-16 1996-06-04 Fuji Electric Co Ltd ショーケースの組立用治具および組立方法
JP2004279335A (ja) * 2003-03-18 2004-10-07 Olympus Corp 基板検査装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006308334A (ja) * 2005-04-26 2006-11-09 Horiba Ltd パネル部材検査装置及びそれに適用される位置情報補正プログラム
JP4519705B2 (ja) * 2005-04-26 2010-08-04 株式会社堀場製作所 パネル部材検査装置及びそれに適用される位置情報補正プログラム
JPWO2008035752A1 (ja) * 2006-09-22 2010-01-28 オリンパス株式会社 基板検査装置
WO2008035752A1 (fr) * 2006-09-22 2008-03-27 Olympus Corporation Appareil d'inspection de substrat
JP2008082703A (ja) * 2006-09-25 2008-04-10 Olympus Corp 基板検査装置および基板検査方法
JP2008139050A (ja) * 2006-11-30 2008-06-19 Hitachi Kokusai Electric Inc 線幅測定装置
JP2009060066A (ja) * 2007-09-04 2009-03-19 Dainippon Screen Mfg Co Ltd 処理装置
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
JP2009092553A (ja) * 2007-10-10 2009-04-30 Olympus Corp 基板検査装置
JP2010091628A (ja) * 2008-10-03 2010-04-22 Hitachi High-Technologies Corp 表示用パネル露光装置および露光方法並びに表示用パネル露光装置の組立てまたは調整方法
JP2011069655A (ja) * 2009-09-24 2011-04-07 Hitachi High-Technologies Corp ガラス基板の検査装置
JP2014110358A (ja) * 2012-12-04 2014-06-12 National Institute Of Advanced Industrial & Technology 製造ラインを構成するためのユニットとその組み立て方法
TWI577624B (zh) * 2016-09-30 2017-04-11 均豪精密工業股份有限公司 翹曲板材搬送物流系統
CN107879109A (zh) * 2016-09-30 2018-04-06 均豪精密工业股份有限公司 翘曲板材搬送物流系统
KR101851618B1 (ko) 2016-09-30 2018-04-24 갈란트 프리시젼 머시닝 캄파니, 리미티드 휨 판재 반송 물류 시스템

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