JP2006220504A - 半導体集積回路の検査方法 - Google Patents
半導体集積回路の検査方法 Download PDFInfo
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- JP2006220504A JP2006220504A JP2005033407A JP2005033407A JP2006220504A JP 2006220504 A JP2006220504 A JP 2006220504A JP 2005033407 A JP2005033407 A JP 2005033407A JP 2005033407 A JP2005033407 A JP 2005033407A JP 2006220504 A JP2006220504 A JP 2006220504A
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Abstract
【解決手段】 電圧検出前後でOUT端子のレベルが反転し、半導体集積回路6に流れる電流が大きく変化することを利用して、電圧印加電流測定機能を有したDC測定ユニットを1個用いて印加電圧をスイープしながら半導体集積回路6の回路電流を測定し、前記DC測定ユニットの電流変化を捉えることで検出電圧値を測定する。
【選択図】 図1
Description
セイコーインスツルメンル株式会社刊行 「CMOS ICデータブック2003」 (第2-43頁、図19)
2 VDD端子
3 VSS端子
4 OUT端子
5 抵抗
6 NchMOSオープンドレイン出力タイプ半導体集積回路
7 CMOS出力タイプ半導体集積回路
8 発振回路内蔵したCMOS出力タイプ半導体集積回路
9 NchMOSオープンドレイン出力タイプ半導体集積回路の測定波形
10 CMOS出力タイプ半導体集積回路の測定波形
11 発振回路内蔵したCMOS出力タイプ半導体集積回路の測定波形
12 DC測定ユニット
13 DC測定ユニット
Claims (6)
- 電圧検出機能を内蔵した半導体集積回路の電気特性検査において、その検出電圧の電圧レベルを測定する際、電圧印加電流測定機能を有したDC測定ユニットを1個用いて印加電圧をスイープしながら前記半導体集積回路の回路電流を測定し、前記DC測定ユニットの電流変化を捉えることで検出電圧値を測定する半導体集積回路の検査方法。
- 前記半導体集積回路に接続される外部回路の回路電流も合せて測定する請求項1に記載の半導体集積回路の検査方法。
- 前記外部回路は抵抗である請求項2に記載の半導体集積回路の検査方法。
- 前記電流変化は前記半導体集積回路の内部動作により生じる請求項1に記載の半導体集積回路の検査方法。
- 前記内部動作は発振回路の動作である請求項4に記載の半導体集積回路の検査方法。
- 複数のDC測定ユニットを用いて、前記複数のDC測定ユニットと同数の半導体集積回路の検出電圧値を同時に測定する請求項1に記載の半導体集積回路の検査方法。
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JP2005033407A JP4811986B2 (ja) | 2005-02-09 | 2005-02-09 | 半導体集積回路の検査方法 |
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JP2005033407A JP4811986B2 (ja) | 2005-02-09 | 2005-02-09 | 半導体集積回路の検査方法 |
Publications (2)
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JP2006220504A true JP2006220504A (ja) | 2006-08-24 |
JP4811986B2 JP4811986B2 (ja) | 2011-11-09 |
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JP2005033407A Expired - Fee Related JP4811986B2 (ja) | 2005-02-09 | 2005-02-09 | 半導体集積回路の検査方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012069728A (ja) * | 2010-09-24 | 2012-04-05 | Fujitsu Semiconductor Ltd | 電源状態判定回路を有する集積回路 |
CN104614660A (zh) * | 2015-01-09 | 2015-05-13 | 中国电子科技集团公司第五十八研究所 | 基于有源光学水印的硬件木马检测方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03214079A (ja) * | 1990-01-18 | 1991-09-19 | Rohm Co Ltd | Icの入力スレショルド測定装置 |
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2005
- 2005-02-09 JP JP2005033407A patent/JP4811986B2/ja not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03214079A (ja) * | 1990-01-18 | 1991-09-19 | Rohm Co Ltd | Icの入力スレショルド測定装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012069728A (ja) * | 2010-09-24 | 2012-04-05 | Fujitsu Semiconductor Ltd | 電源状態判定回路を有する集積回路 |
CN104614660A (zh) * | 2015-01-09 | 2015-05-13 | 中国电子科技集团公司第五十八研究所 | 基于有源光学水印的硬件木马检测方法 |
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JP4811986B2 (ja) | 2011-11-09 |
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