JP2006194645A - 測定装置及びその調整方法 - Google Patents
測定装置及びその調整方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000005286 illumination Methods 0.000 claims abstract description 95
- 239000013307 optical fiber Substances 0.000 claims abstract description 66
- 210000001747 pupil Anatomy 0.000 claims abstract description 50
- 230000003287 optical effect Effects 0.000 claims abstract description 48
- 238000003384 imaging method Methods 0.000 claims abstract description 42
- 238000012545 processing Methods 0.000 claims abstract description 24
- 238000004458 analytical method Methods 0.000 claims abstract description 15
- 230000010354 integration Effects 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 8
- 244000248349 Citrus limon Species 0.000 description 5
- 235000005979 Citrus limon Nutrition 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
- G01J1/22—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using a variable element in the light-path, e.g. filter, polarising means
- G01J1/24—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using a variable element in the light-path, e.g. filter, polarising means using electric radiation detectors
- G01J1/26—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using a variable element in the light-path, e.g. filter, polarising means using electric radiation detectors adapted for automatic variation of the measured or reference value
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0425—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0448—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0451—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using means for illuminating a slit efficiently, e.g. entrance slit of a photometer or entrance face of fiber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S385/00—Optical waveguides
- Y10S385/901—Illuminating or display apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Microscoopes, Condenser (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【解決手段】 光ファイバ4の出射端面の瞳面状態の「光量ムラ」が比較的大きい場合に、焦点切換用レンズ31により、CCDカメラ18の撮像面の焦点を、ウェハ14の試料から、光ファイバ4の出射端面の照明瞳面に切り換える。画像処理部19で、光ファイバ4の出射端面の照明瞳面の「光量ムラ」を算出・解析し、この解析結果に基づいて、照明光学系内で、光ファイバ4の出射端面の位置を調整する。これにより、光ファイバ4の出射端面の照明瞳面を、「光量ムラ」の少ない箇所に切り換えることができる。
【選択図】 図1
Description
前記試料の像を観察する結像光学系と、
光学像を撮像手段で取り込み、画像処理を行う画像処理手段と、を具備した測定装置において、
前記撮像手段の撮像面の焦点を、前記試料から、前記光ファイバの出射端面の照明瞳面に切り換える焦点切換手段と、
前記画像処理手段で、光ファイバの出射端面の照明瞳面の光量ムラを算出する解析手段と、
前記解析手段の解析結果に基づいて、前記照明光学系内で、光ファイバの出射端面の位置を調整する光ファイバ出射端面位置調整機構と、
を備えることを特徴とする。
前記試料の像を観察する結像光学系と、
光学像を撮像手段で取り込み、画像処理を行う画像処理手段と、を具備した測定装置において、
前記撮像手段の撮像面の焦点を、前記試料から、前記光ファイバの出射端面の照明瞳面に切り換える切換工程と、
前記画像処理手段で、光ファイバの出射端面の照明瞳面の光量ムラを算出する解析工程と、
前記解析工程の解析結果に基づいて、前記照明光学系内で、光ファイバの出射端面の位置を調整する調整工程と、
を備えることを特徴とする。
2,3 光源用第1及び第2リレーレンズ
4 光ファイバ
5,6 照明用第1及び第2リレーレンズ
7 照明開口絞り
8 照明用第3リレーレンズ
9 視野絞り
10 照明用第4リレーレンズ
11 落射プリズム
12 結像絞り
13 第1対物レンズ
14 ウェハ
15 ウェハホルダー
16 移動ステージ
17 第2対物レンズ
18 CCDカメラ(撮像手段)
19 画像処理部
20 光学的拡散板(レモンスキン)
30 光ファイバ出射端面位置調整機構
31 焦点切換用レンズ(焦点切換用手段)
40 照明瞳面(調整前)
41 照明瞳面(調整後)
51 台座部品
52 y移動テーブル
53 x移動テーブル
55 y移動つまみ
56 x移動つまみ
Claims (2)
- 試料へ照明光を供給するための光源を有し、少なくとも光ファイバを介して前記照明光を案内する照明光学系と、
前記試料の像を観察する結像光学系と、
光学像を撮像手段で取り込み、画像処理を行う画像処理手段と、を具備した測定装置において、
前記撮像手段の撮像面の焦点を、前記試料から、前記光ファイバの出射端面の照明瞳面に切り換える焦点切換手段と、
前記画像処理手段で、光ファイバの出射端面の照明瞳面の光量ムラを算出する解析手段と、
前記解析手段の解析結果に基づいて、前記照明光学系内で、光ファイバの出射端面の位置を調整する光ファイバ出射端面位置調整機構と、を備えることを特徴とする測定装置。 - 試料へ照明光を供給するための光源を有し、少なくとも光ファイバを介して前記照明光を案内する照明光学系と、
前記試料の像を観察する結像光学系と、
光学像を撮像手段で取り込み、画像処理を行う画像処理手段と、を具備した測定装置において、
前記撮像手段の撮像面の焦点を、前記試料から、前記光ファイバの出射端面の照明瞳面に切り換える切換工程と、
前記画像処理手段で、光ファイバの出射端面の照明瞳面の光量ムラを算出する解析工程と、
前記解析工程の解析結果に基づいて、前記照明光学系内で、光ファイバの出射端面の位置を調整する調整工程と、を備えることを特徴とする測定装置の調整方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005004499A JP4701723B2 (ja) | 2005-01-11 | 2005-01-11 | 測定装置及びその調整方法 |
US11/326,434 US7250597B2 (en) | 2005-01-11 | 2006-01-06 | Measuring and adjustment device for an alignment optical system and adjustment method thereof |
TW095100597A TWI373602B (en) | 2005-01-11 | 2006-01-06 | Measuring device and adjustment method thereof |
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JP2005004499A JP4701723B2 (ja) | 2005-01-11 | 2005-01-11 | 測定装置及びその調整方法 |
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JP2006194645A true JP2006194645A (ja) | 2006-07-27 |
JP4701723B2 JP4701723B2 (ja) | 2011-06-15 |
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US (1) | US7250597B2 (ja) |
JP (1) | JP4701723B2 (ja) |
TW (1) | TWI373602B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104238044A (zh) * | 2014-07-11 | 2014-12-24 | 北京工业大学 | 一种简单高效的微结构光纤端面成像系统 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109936696B (zh) * | 2019-02-28 | 2020-09-29 | 深圳大学 | 基于神经网络的光纤端面自动对焦的方法和相关装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217630A (ja) * | 1985-07-16 | 1987-01-26 | Nippon Kogaku Kk <Nikon> | 照明用フアイバ−束検査装置 |
JPH04106805U (ja) * | 1991-02-27 | 1992-09-16 | 株式会社小糸製作所 | 車輌用照明灯 |
JP2001272606A (ja) * | 2000-03-24 | 2001-10-05 | Olympus Optical Co Ltd | 照明光学系及び照明光学系を備えた顕微鏡 |
JP2002023062A (ja) * | 2000-07-07 | 2002-01-23 | Nikon Corp | レーザ顕微鏡の照明光学系の調整方法 |
JP2003021787A (ja) * | 2001-07-06 | 2003-01-24 | Nikon Corp | 観察装置 |
JP2006047672A (ja) * | 2004-08-04 | 2006-02-16 | Nikon Corp | 顕微鏡 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5552892A (en) * | 1994-05-24 | 1996-09-03 | Nikon Corporation | Illumination optical system, alignment apparatus, and projection exposure apparatus using the same |
US6760148B2 (en) * | 1998-03-24 | 2004-07-06 | Xtera Communications, Inc. | Nonlinear polarization amplifiers in nonzero dispersion shifted fiber |
US6663560B2 (en) * | 1999-12-17 | 2003-12-16 | Digital Optical Imaging Corporation | Methods and apparatus for imaging using a light guide bundle and a spatial light modulator |
JP4457461B2 (ja) | 2000-02-29 | 2010-04-28 | 株式会社ニコン | 重ね合わせ測定装置および方法 |
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2005
- 2005-01-11 JP JP2005004499A patent/JP4701723B2/ja active Active
-
2006
- 2006-01-06 TW TW095100597A patent/TWI373602B/zh active
- 2006-01-06 US US11/326,434 patent/US7250597B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217630A (ja) * | 1985-07-16 | 1987-01-26 | Nippon Kogaku Kk <Nikon> | 照明用フアイバ−束検査装置 |
JPH04106805U (ja) * | 1991-02-27 | 1992-09-16 | 株式会社小糸製作所 | 車輌用照明灯 |
JP2001272606A (ja) * | 2000-03-24 | 2001-10-05 | Olympus Optical Co Ltd | 照明光学系及び照明光学系を備えた顕微鏡 |
JP2002023062A (ja) * | 2000-07-07 | 2002-01-23 | Nikon Corp | レーザ顕微鏡の照明光学系の調整方法 |
JP2003021787A (ja) * | 2001-07-06 | 2003-01-24 | Nikon Corp | 観察装置 |
JP2006047672A (ja) * | 2004-08-04 | 2006-02-16 | Nikon Corp | 顕微鏡 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104238044A (zh) * | 2014-07-11 | 2014-12-24 | 北京工业大学 | 一种简单高效的微结构光纤端面成像系统 |
CN104238044B (zh) * | 2014-07-11 | 2016-02-17 | 北京工业大学 | 一种简单高效的微结构光纤端面成像系统 |
Also Published As
Publication number | Publication date |
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US7250597B2 (en) | 2007-07-31 |
US20060151679A1 (en) | 2006-07-13 |
TW200624767A (en) | 2006-07-16 |
TWI373602B (en) | 2012-10-01 |
JP4701723B2 (ja) | 2011-06-15 |
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