JP2006178312A - 表面反射型位相格子 - Google Patents

表面反射型位相格子 Download PDF

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Publication number
JP2006178312A
JP2006178312A JP2004373491A JP2004373491A JP2006178312A JP 2006178312 A JP2006178312 A JP 2006178312A JP 2004373491 A JP2004373491 A JP 2004373491A JP 2004373491 A JP2004373491 A JP 2004373491A JP 2006178312 A JP2006178312 A JP 2006178312A
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JP
Japan
Prior art keywords
phase grating
film
reflection type
surface reflection
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004373491A
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English (en)
Japanese (ja)
Other versions
JP2006178312A5 (enExample
Inventor
Tasuke Isano
太輔 伊佐野
Akira Ishizuka
公 石塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004373491A priority Critical patent/JP2006178312A/ja
Priority to US11/317,790 priority patent/US20060140538A1/en
Priority to EP05258041A priority patent/EP1674895A1/en
Publication of JP2006178312A publication Critical patent/JP2006178312A/ja
Publication of JP2006178312A5 publication Critical patent/JP2006178312A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2004373491A 2004-12-24 2004-12-24 表面反射型位相格子 Pending JP2006178312A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004373491A JP2006178312A (ja) 2004-12-24 2004-12-24 表面反射型位相格子
US11/317,790 US20060140538A1 (en) 2004-12-24 2005-12-22 Surface reflection type phase grating
EP05258041A EP1674895A1 (en) 2004-12-24 2005-12-23 Surface reflection type phase grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004373491A JP2006178312A (ja) 2004-12-24 2004-12-24 表面反射型位相格子

Publications (2)

Publication Number Publication Date
JP2006178312A true JP2006178312A (ja) 2006-07-06
JP2006178312A5 JP2006178312A5 (enExample) 2008-06-05

Family

ID=36046253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004373491A Pending JP2006178312A (ja) 2004-12-24 2004-12-24 表面反射型位相格子

Country Status (3)

Country Link
US (1) US20060140538A1 (enExample)
EP (1) EP1674895A1 (enExample)
JP (1) JP2006178312A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031615A (ja) * 2007-07-30 2009-02-12 Shimadzu Corp レプリカ回折格子及びその製造方法
JP2018179866A (ja) * 2017-04-19 2018-11-15 株式会社ミツトヨ 光学式エンコーダ
DE102018009423A1 (de) 2017-12-05 2019-06-06 Mitutoyo Corporation Skala und herstellungsverfahren derselben
DE102018009725A1 (de) 2017-12-28 2019-07-04 Mitutoyo Corporation Skala und Herstellungsverfahren derselben
DE102018009722A1 (de) 2017-12-28 2019-07-04 Mitutoyo Corporation Skala und Herstellungsverfahren derselben
DE102021000801A1 (de) 2020-02-20 2021-08-26 Mitutoyo Corporation Skala
JP2021192010A (ja) * 2020-06-05 2021-12-16 株式会社ミツトヨ スケールおよびその製造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5487592B2 (ja) * 2007-11-06 2014-05-07 セイコーエプソン株式会社 レーザー加工方法
WO2009070121A1 (en) * 2007-11-30 2009-06-04 Hamed Hamid Muhammed Miniaturized all-reflective holographic fourier transform imaging spectrometer based on a new all-reflective interferometer
JP5256906B2 (ja) 2008-07-28 2013-08-07 株式会社リコー 波長選択フィルタ、フィルタ装置、光源装置、光学装置及び屈折率センサ
JP5846686B2 (ja) * 2011-11-22 2016-01-20 株式会社ミツトヨ 光電式エンコーダのスケールの製造方法
DE102012103443B4 (de) * 2012-04-19 2015-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflexionsbeugungsgitter und Verfahren zu dessen Herstellung
US11499848B2 (en) * 2016-03-31 2022-11-15 Pixart Imaging Inc. Marker product and related optical detection system
KR20190110595A (ko) * 2017-01-30 2019-09-30 알토 유니버시티 파운데이션 에스알 플라즈몬 장치
CN110389235B (zh) * 2018-04-18 2021-10-08 原相科技股份有限公司 标记产品及其相关光学侦测系统
CN108732670A (zh) * 2018-07-09 2018-11-02 中国科学院上海光学精密机械研究所 一种800纳米中心波长的金属介质膜宽带脉宽压缩光栅
FR3095281B1 (fr) 2019-04-19 2021-08-27 Horiba France Sas Réseau de diffraction en réflexion résistant à un flux lumineux à impulsions ultra-courtes de forte puissance crête et son procédé de fabrication
CN109959983A (zh) * 2019-04-26 2019-07-02 上海集成电路研发中心有限公司 一种平面光栅及其制备方法
CN113238310A (zh) * 2021-04-30 2021-08-10 中国建筑材料科学研究总院有限公司 一种平坦化的二维光栅及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0484713A (ja) * 1990-07-27 1992-03-18 Sokkia Co Ltd 光学式エンコーダの目盛ディスク
JP2004514794A (ja) * 2000-12-07 2004-05-20 サイマー，　インコーポレイテッド 複製された回折格子のための保護膜
JP2005308718A (ja) * 2004-01-26 2005-11-04 Mitsutoyo Corp 反射型光電式エンコーダ用スケール、スケールの製造方法及び光電式エンコーダ

Family Cites Families (11)

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GB896934A (en) * 1959-05-21 1962-05-23 Ass Elect Ind Improvements relating to diffraction gratings
JPS5092148A (enExample) * 1973-12-14 1975-07-23
US4281894A (en) * 1980-01-21 1981-08-04 The Perkin-Elmer Corporation Very low absorption, low efficiency laser beamsampler
JPH0624747B2 (ja) * 1990-10-15 1994-04-06 セキノス株式会社 微細加工を施した射出成形用コアの作成方法
DE4303975A1 (de) * 1993-02-11 1994-08-18 Heidenhain Gmbh Dr Johannes Teilungsträger
ATE210832T1 (de) * 1995-04-13 2001-12-15 Heidenhain Gmbh Dr Johannes Ma stab und verfahren zur herstellung eines ma stabes sowie positionsmesseinrichtung
DE19652563A1 (de) * 1996-12-17 1998-06-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
DE10200293B4 (de) * 2002-01-07 2007-12-20 Carl Zeiss Laser Optics Gmbh Optische Anordnung sowie Verfahren zur Herstellung einer solchen
US6930053B2 (en) * 2002-03-25 2005-08-16 Sanyo Electric Co., Ltd. Method of forming grating microstructures by anodic oxidation
CN100397045C (zh) * 2004-01-26 2008-06-25 三丰株式会社 标尺的制造方法和光电式编码器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0484713A (ja) * 1990-07-27 1992-03-18 Sokkia Co Ltd 光学式エンコーダの目盛ディスク
JP2004514794A (ja) * 2000-12-07 2004-05-20 サイマー，　インコーポレイテッド 複製された回折格子のための保護膜
JP2005308718A (ja) * 2004-01-26 2005-11-04 Mitsutoyo Corp 反射型光電式エンコーダ用スケール、スケールの製造方法及び光電式エンコーダ

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031615A (ja) * 2007-07-30 2009-02-12 Shimadzu Corp レプリカ回折格子及びその製造方法
JP2018179866A (ja) * 2017-04-19 2018-11-15 株式会社ミツトヨ 光学式エンコーダ
DE102018009423A1 (de) 2017-12-05 2019-06-06 Mitutoyo Corporation Skala und herstellungsverfahren derselben
DE102018009725A1 (de) 2017-12-28 2019-07-04 Mitutoyo Corporation Skala und Herstellungsverfahren derselben
DE102018009722A1 (de) 2017-12-28 2019-07-04 Mitutoyo Corporation Skala und Herstellungsverfahren derselben
CN110030894A (zh) * 2017-12-28 2019-07-19 株式会社三丰 标尺及其制造方法
JP2019120499A (ja) * 2017-12-28 2019-07-22 株式会社ミツトヨ スケールおよびその製造方法
US11054286B2 (en) 2017-12-28 2021-07-06 Mitutoyo Corporation Scale and manufacturing method of the same
JP7140495B2 (ja) 2017-12-28 2022-09-21 株式会社ミツトヨ スケールおよびその製造方法
DE102021000801A1 (de) 2020-02-20 2021-08-26 Mitutoyo Corporation Skala
US11808611B2 (en) 2020-02-20 2023-11-07 Mitutoyo Corporation Scale
JP2021192010A (ja) * 2020-06-05 2021-12-16 株式会社ミツトヨ スケールおよびその製造方法

Also Published As

Publication number Publication date
EP1674895A1 (en) 2006-06-28
US20060140538A1 (en) 2006-06-29

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