JP2019109116A - スケールおよびその製造方法 - Google Patents
スケールおよびその製造方法 Download PDFInfo
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- JP2019109116A JP2019109116A JP2017241624A JP2017241624A JP2019109116A JP 2019109116 A JP2019109116 A JP 2019109116A JP 2017241624 A JP2017241624 A JP 2017241624A JP 2017241624 A JP2017241624 A JP 2017241624A JP 2019109116 A JP2019109116 A JP 2019109116A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000011521 glass Substances 0.000 claims abstract description 24
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 17
- 239000011147 inorganic material Substances 0.000 claims abstract description 17
- 238000005530 etching Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000005240 physical vapour deposition Methods 0.000 claims description 3
- 230000007613 environmental effect Effects 0.000 abstract description 13
- 230000006866 deterioration Effects 0.000 abstract description 10
- 230000035882 stress Effects 0.000 description 19
- 239000000463 material Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000006094 Zerodur Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
Abstract
Description
図1(a)は、第1実施形態に係るスケール100の平面図である。図1(b)は、図1(a)のA−A線断面図である。図1(a)および図1(b)で例示するように、スケール100は、基板10の第1面上に、所定の間隔で複数の格子が配置された目盛格子20を備えた構造を有している。この構成により、スケール100は、所定の光透過特性、所定の光反射特性などの光特性を実現する。
図4(a)は、第2実施形態に係るスケール100aの平面図である。図4(b)は、図4(a)のB−B線断面図である。図4(a)および図4(b)で例示するように、スケール100aが第1実施形態に係るスケール100と異なる点は、目盛格子20の代わりに目盛格子20aが設けられている点である。目盛格子20aが目盛格子20と異なる点は、目盛格子20aの各格子が底部でつながっている点である。すなわち、目盛格子20aは、基板10の第1面上において、層状部21上に複数の格子22が設けられた構造を有する。層状部21は、例えば、基板10の第1面の全面を覆っている。層状部21および格子22は、同一材料によって構成されている。層状部21および格子22を構成する材料は、第1実施形態に係る目盛格子20と同様である。
20,20a 目盛格子
21 層状部
22 格子
30 反射膜
40 応力緩和層
50 被エッチング層
60 レジストパターン
100 スケール
Claims (10)
- 熱膨張係数が1×10−7/K以下の低膨張ガラスで構成された基板と、
前記基板の第1面上に所定の間隔で配置され、熱膨張係数が1×10−7/Kを上回る光透過性無機材料で構成された複数の格子が配置された目盛格子と、を備えることを特徴とするスケール。 - 前記光透過性無機材料の屈折率は、前記低膨張ガラスの屈折率以下であることを特徴とする請求項1記載のスケール。
- 前記光透過性無機材料は、SiO2またはMgF2であることを特徴とする請求項1または2に記載のスケール。
- 前記目盛格子は、前記基板の前記第1面上において、前記光透過性無機材料で構成された層状部上に、前記複数の格子を備える構成を有することを特徴とする請求項1〜3のいずれか一項に記載のスケール。
- 前記層状部は、0.5μm〜2.5μmの厚みを有することを特徴とする請求項4記載のスケール。
- 前記基板の前記第1面と対向する第2面に、前記層状部が前記基板に対して有する応力を緩和する応力緩和層を備えることを特徴とする請求項4または5に記載のスケール。
- 熱膨張係数が1×10−7/K以下の低膨張ガラスで構成された基板上に、熱膨張係数が1×10−7/Kを上回る光透過性無機材料の被エッチング層を形成する工程と、
前記被エッチング層に対してエッチングを行うことで、前記基板上に所定の間隔で複数の格子を形成する工程と、を含むことを特徴とするスケールの製造方法。 - 前記被エッチング層に対してエッチングを行う際に、前記格子以外の箇所の前記基板を露出させることを特徴とする請求項7記載のスケールの製造方法。
- 前記被エッチング層に対してエッチングを行う際に、前記格子以外の箇所の前記基板が露出する前に前記エッチングを終了することを特徴とする請求項7記載のスケールの製造方法。
- 前記基板上に前記被エッチング層を形成する際に、物理気相蒸着法、化学気相蒸着法およびウェットコーティングのいずれかを用いることを特徴とする請求項7〜9のいずれか一項に記載のスケールの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017241624A JP7060370B2 (ja) | 2017-12-18 | 2017-12-18 | スケールおよびその製造方法 |
DE102018009116.4A DE102018009116A1 (de) | 2017-12-18 | 2018-11-20 | Skala und Herstellungsverfahren derselben |
US16/220,368 US11307058B2 (en) | 2017-12-18 | 2018-12-14 | Scale and manufacturing method of the same |
CN201811541825.9A CN109932768A (zh) | 2017-12-18 | 2018-12-17 | 标尺和标尺的制造方法 |
Applications Claiming Priority (1)
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JP2017241624A JP7060370B2 (ja) | 2017-12-18 | 2017-12-18 | スケールおよびその製造方法 |
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Publication Number | Publication Date |
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JP2019109116A true JP2019109116A (ja) | 2019-07-04 |
JP7060370B2 JP7060370B2 (ja) | 2022-04-26 |
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JP2017241624A Active JP7060370B2 (ja) | 2017-12-18 | 2017-12-18 | スケールおよびその製造方法 |
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US (1) | US11307058B2 (ja) |
JP (1) | JP7060370B2 (ja) |
CN (1) | CN109932768A (ja) |
DE (1) | DE102018009116A1 (ja) |
Families Citing this family (1)
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CN114952023B (zh) * | 2022-06-24 | 2024-01-30 | 长沙麓邦光电科技有限公司 | 用于制备光栅尺的夹具及其联控方法 |
Citations (6)
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JPH08286020A (ja) * | 1995-04-13 | 1996-11-01 | Dr Johannes Heidenhain Gmbh | 位相格子および位相格子の作製方法 |
JP2005114717A (ja) * | 2003-09-16 | 2005-04-28 | Citizen Watch Co Ltd | 光学式エンコーダ |
JP2006053279A (ja) * | 2004-08-10 | 2006-02-23 | Epson Toyocom Corp | 透過型回折素子の製造方法、及び透過型回折素子 |
JP2008242332A (ja) * | 2007-03-29 | 2008-10-09 | Canon Inc | 反射光学素子及び露光装置 |
US20130044050A1 (en) * | 2011-02-11 | 2013-02-21 | Nokia Corporation | Causing Display of Comments Associated with an Object |
JP2017151093A (ja) * | 2016-01-21 | 2017-08-31 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | 光学式の位置測定装置 |
Family Cites Families (15)
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JPH0451201A (ja) | 1990-06-19 | 1992-02-19 | Canon Inc | 透過型回折格子及び該回折格子を用いたエンコーダ |
DE19502727A1 (de) | 1995-01-28 | 1996-08-01 | Heidenhain Gmbh Dr Johannes | Phasengitter |
ATE190408T1 (de) | 1995-11-11 | 2000-03-15 | Heidenhain Gmbh Dr Johannes | Auflicht-phasengitter |
DE19652563A1 (de) | 1996-12-17 | 1998-06-18 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
JP3675314B2 (ja) * | 2000-07-26 | 2005-07-27 | 株式会社島津製作所 | 回折格子 |
US6560020B1 (en) * | 2001-01-16 | 2003-05-06 | Holotek, Llc | Surface-relief diffraction grating |
JP4913345B2 (ja) | 2004-01-26 | 2012-04-11 | 株式会社ミツトヨ | 反射型光電式エンコーダ用スケール、スケールの製造方法及び光電式エンコーダ |
CN100397045C (zh) | 2004-01-26 | 2008-06-25 | 三丰株式会社 | 标尺的制造方法和光电式编码器 |
US20050275944A1 (en) * | 2004-06-11 | 2005-12-15 | Wang Jian J | Optical films and methods of making the same |
JP2008045931A (ja) | 2006-08-11 | 2008-02-28 | Nippon Sheet Glass Co Ltd | 光学式エンコーダのスケールの製造方法 |
JP5434379B2 (ja) | 2009-08-28 | 2014-03-05 | 株式会社ニコン | スケール体、位置検出装置、ステージ装置、及び露光装置 |
JP5965698B2 (ja) * | 2012-03-30 | 2016-08-10 | 株式会社日立ハイテクノロジーズ | 回折格子およびその製造方法 |
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US9720147B2 (en) * | 2014-03-28 | 2017-08-01 | Lumentum Operations Llc | Reflective diffraction grating and fabrication method |
DE102015201230A1 (de) | 2015-01-26 | 2016-07-28 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
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2017
- 2017-12-18 JP JP2017241624A patent/JP7060370B2/ja active Active
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2018
- 2018-11-20 DE DE102018009116.4A patent/DE102018009116A1/de active Pending
- 2018-12-14 US US16/220,368 patent/US11307058B2/en active Active
- 2018-12-17 CN CN201811541825.9A patent/CN109932768A/zh active Pending
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JPH08286020A (ja) * | 1995-04-13 | 1996-11-01 | Dr Johannes Heidenhain Gmbh | 位相格子および位相格子の作製方法 |
JP2005114717A (ja) * | 2003-09-16 | 2005-04-28 | Citizen Watch Co Ltd | 光学式エンコーダ |
JP2006053279A (ja) * | 2004-08-10 | 2006-02-23 | Epson Toyocom Corp | 透過型回折素子の製造方法、及び透過型回折素子 |
JP2008242332A (ja) * | 2007-03-29 | 2008-10-09 | Canon Inc | 反射光学素子及び露光装置 |
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Also Published As
Publication number | Publication date |
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US11307058B2 (en) | 2022-04-19 |
US20190186957A1 (en) | 2019-06-20 |
CN109932768A (zh) | 2019-06-25 |
JP7060370B2 (ja) | 2022-04-26 |
DE102018009116A1 (de) | 2019-06-19 |
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