JP6866094B2 - 光学層システム - Google Patents
光学層システム Download PDFInfo
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- JP6866094B2 JP6866094B2 JP2016186468A JP2016186468A JP6866094B2 JP 6866094 B2 JP6866094 B2 JP 6866094B2 JP 2016186468 A JP2016186468 A JP 2016186468A JP 2016186468 A JP2016186468 A JP 2016186468A JP 6866094 B2 JP6866094 B2 JP 6866094B2
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- 230000003287 optical effect Effects 0.000 title claims description 53
- 239000010410 layer Substances 0.000 claims description 138
- 239000000758 substrate Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 2
- 229910000423 chromium oxide Inorganic materials 0.000 claims 2
- 230000000737 periodic effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000006094 Zerodur Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 210000004127 vitreous body Anatomy 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0875—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising two or more metallic layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optical Transform (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
SからA1への境界面およびA1からA2への境界面の反射の間で光のπの位相ずれを達成するために:
2 第2機能面
3 第3機能面
A 第1層スタック
B 第2層スタック
S 基板
層 A1,A2,A3,B1,B2,B3
厚さ dA1,dA2,dA3,dB1,dB2,dB3
Claims (13)
- 位置測定装置のための光学層システムであって、
透明な基板(S)の表面に、それぞれ異なる光学機能を有する少なくとも第1、第2、および第3機能面(1,2,3)が設けられている光学層システムにおいて、
前記第1機能面(1)は、前記第1層スタック(A)により形成され、反射防止層として作用し、
前記第3機能面(3)は、前記第2層スタック(B)により形成され、ミラーとして作用し、
前記第2機能面(2)は、間隔をおいて交互に配置された前記第1および第2層スタック(A,B)により形成され、光回折格子として作用する
ことを特徴とする位置測定装置のための光学層システム。 - 請求項1に記載の光学層システムにおいて、
前記間隔が1mm未満である光学層システム。 - 請求項1に記載の光学層システムにおいて、
前記間隔が50μm未満である光学層システム。 - 請求項1に記載の光学層システムにおいて、
前記間隔が20μm未満である光学層システム。 - 請求項1から4のいずれか1項に記載の光学層システムにおいて、
前記第2機能面(2)が、位相格子である光学層システム。 - 請求項1から5までのいずれか一項に記載の光学式の層システムにおいて、
前記第3機能面(3)が金属ミラーとして形成されており、前記第2層スタック(B)がちょうど2つの層(B1,B2)を含む光学式の層システム。 - 請求項6に記載の光学層システムにおいて、
前記第2層スタック(B)が、
基板(S)に配置されており、金または代替的にアルミニウムまたは銀からなる層(B1)と、層(B1)に配置されており、クロムからなる保護層(B2)とにより構成されている光学層システム。 - 請求項7に記載の光学層システムにおいて、
前記層(B1)が約80nmの厚さを備える光学層システム。 - 請求項1から8までのいずれか一項に記載の光学層システムにおいて、
前記第1層スタック(A)が、次の層:酸化クロムからなり、基板(S)に配置された第1層(A1)、クロムからなる第2層(A2)、および酸化クロムからなる第3層(A3)
から構成されている光学層システム。 - 請求項9に記載の光学層システムにおいて、
前記第1層(A1)および前記第3層(A3)が約90nmの厚さであり、前記第2層(A2)が約100nmの厚さである光学層システム。 - 請求項1から5までのいずれか一項に記載の光学層システムにおいて、
前記第3機能面(3)が誘電性ミラーとして形成されている光学層システム。 - 基準器および走査ヘッドを備える位置測定装置において、
走査ヘッドが、請求項1から11までのいずれか一項に記載の光学層システムを備える走査プレートを含む位置測定装置。 - 請求項12に記載の位置測定装置において、
前記第2機能面(2)が、基準器において参照マークを走査するために用いられる位置測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015218702.0A DE102015218702A1 (de) | 2015-09-29 | 2015-09-29 | Optisches Schichtsystem |
DE102015218702.0 | 2015-09-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017096921A JP2017096921A (ja) | 2017-06-01 |
JP6866094B2 true JP6866094B2 (ja) | 2021-04-28 |
Family
ID=56551160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016186468A Active JP6866094B2 (ja) | 2015-09-29 | 2016-09-26 | 光学層システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US10094961B2 (ja) |
EP (1) | EP3150970B1 (ja) |
JP (1) | JP6866094B2 (ja) |
CN (1) | CN106959478B (ja) |
DE (1) | DE102015218702A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017213330A1 (de) | 2017-08-02 | 2019-02-07 | Dr. Johannes Heidenhain Gmbh | Abtastplatte für eine optische Positionsmesseinrichtung |
US10712475B2 (en) | 2017-08-16 | 2020-07-14 | Lumentum Operations Llc | Multi-layer thin film stack for diffractive optical elements |
US10802185B2 (en) | 2017-08-16 | 2020-10-13 | Lumentum Operations Llc | Multi-level diffractive optical element thin film coating |
US11016227B2 (en) * | 2017-09-18 | 2021-05-25 | Lumentum Operations Llc | Diffractive optical element |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4752133A (en) * | 1985-12-19 | 1988-06-21 | Zygo Corporation | Differential plane mirror interferometer |
CN1035135C (zh) * | 1993-06-10 | 1997-06-11 | 清华大学 | 高温全息光栅及其制造方法 |
EP0742455B1 (de) | 1995-04-13 | 2001-12-12 | Dr. Johannes Heidenhain GmbH | Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung |
DE19917950A1 (de) * | 1999-04-21 | 2000-10-26 | Heidenhain Gmbh Dr Johannes | Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung |
AU4742400A (en) * | 1999-09-29 | 2001-04-30 | Ip2H Ag | Process for production of a dielectric multi-layered reflecting coating |
DE10236788A1 (de) * | 2002-08-10 | 2004-03-04 | Dr. Johannes Heidenhain Gmbh | Maßverkörperung in Form eines Amplitudengitters, sowie eine Positionsmesseinrichtung |
US7483198B2 (en) * | 2003-02-12 | 2009-01-27 | Texas Instruments Incorporated | Micromirror device and method for making the same |
US6921177B2 (en) * | 2003-02-24 | 2005-07-26 | Raytheon Company | High precision mirror, and a method of making it |
JP4269788B2 (ja) * | 2003-06-10 | 2009-05-27 | 旭硝子株式会社 | 反射型光変調素子および可変光減衰器 |
FR2864252B1 (fr) * | 2003-12-23 | 2006-04-07 | Jobin Yvon Sas | Reseau de diffraction a empilements multicouches alternes et son procede de fabrication et dispositifs spectroscopiques comportant ces reseaux |
US7256938B2 (en) * | 2004-03-17 | 2007-08-14 | General Atomics | Method for making large scale multilayer dielectric diffraction gratings on thick substrates using reactive ion etching |
DE102005020944A1 (de) * | 2004-05-04 | 2005-12-01 | Friedrich-Schiller-Universität Jena | Diffraktive Elemente mit Antireflex-Eigenschaften |
US7379241B2 (en) * | 2004-12-15 | 2008-05-27 | Polychromix Corporation | High efficiency phase grating having a planar reflector |
DE102006027047A1 (de) * | 2006-06-10 | 2007-12-13 | Dr. Johannes Heidenhain Gmbh | Maßstab mit einem reflektierenden Phasengitter |
JP2011187139A (ja) * | 2010-03-10 | 2011-09-22 | Hitachi Maxell Ltd | グレーティング素子及びその製造方法、並びに、そのグレーティング素子を用いた光ピックアップ装置 |
DE102010043469A1 (de) * | 2010-11-05 | 2012-05-10 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
DE102013211758A1 (de) | 2013-06-21 | 2014-12-24 | Dr. Johannes Heidenhain Gmbh | Interferometer |
CN104914508B (zh) * | 2015-06-29 | 2018-03-02 | 西安交通大学 | 一种Bragg齿面结构的蚀刻衍射光栅波分复用器及其设计方法 |
-
2015
- 2015-09-29 DE DE102015218702.0A patent/DE102015218702A1/de not_active Withdrawn
-
2016
- 2016-07-12 EP EP16178981.3A patent/EP3150970B1/de active Active
- 2016-09-22 CN CN201610843011.5A patent/CN106959478B/zh active Active
- 2016-09-26 JP JP2016186468A patent/JP6866094B2/ja active Active
- 2016-09-29 US US15/279,439 patent/US10094961B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102015218702A1 (de) | 2017-03-30 |
US20170090079A1 (en) | 2017-03-30 |
EP3150970A1 (de) | 2017-04-05 |
CN106959478A (zh) | 2017-07-18 |
CN106959478B (zh) | 2020-07-24 |
JP2017096921A (ja) | 2017-06-01 |
EP3150970B1 (de) | 2019-02-27 |
US10094961B2 (en) | 2018-10-09 |
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