JPWO2006104045A1 - 波長フィルタ - Google Patents
波長フィルタ Download PDFInfo
- Publication number
- JPWO2006104045A1 JPWO2006104045A1 JP2006522173A JP2006522173A JPWO2006104045A1 JP WO2006104045 A1 JPWO2006104045 A1 JP WO2006104045A1 JP 2006522173 A JP2006522173 A JP 2006522173A JP 2006522173 A JP2006522173 A JP 2006522173A JP WO2006104045 A1 JPWO2006104045 A1 JP WO2006104045A1
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- 239000000758 substrate Substances 0.000 claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims description 33
- 239000011521 glass Substances 0.000 claims description 5
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 12
- 238000003475 lamination Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 12
- 238000001228 spectrum Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Integrated Circuits (AREA)
- Optical Filters (AREA)
Abstract
Description
F(h)=f(h)/Λ
で表せる。
nin≦ns<n(h=h2〜h3)<n(h=h1〜h2) (6)
nin≦ns<n(h=h2〜h3)<n(h=h3〜h4) (7)
幅 0.487um (WG1)
幅 0.626um
幅 0.487um (WG2)
幅 0.626um
幅 0.487um (WG3)
(基板側)
幅 0.441um (WG1)
幅 0.630um
幅 0.693um
幅 0.630um
幅 0.490um (WG2)
(基板側)
Claims (7)
- 基板面上において、X方向に延伸する第1の部分と第1の部分の材料の屈折率よりも高い屈折率の材料からなり、第1の部分に沿ってX方向に延伸する第2の部分とを、基板面上においてX方向と垂直なY方向に、使用する光の波長よりも短い一定の周期で交互に配置した格子からなる波長フィルタであって、各第1の部分の、Y方向でかつ基板面に垂直な断面形状は、基板面からZ方向に所定の距離を隔てた所定の距離の範囲において、Y方向の幅が周囲部分の幅よりも広くなるように突起した部分を少なくとも1つ備え、当該所定の距離の範囲の、基板面に平行な領域によって分割される、基板面に平行な複数の導波層を形成し、当該複数の導波層の反射する光の波長帯域が重なりながらシフトして単一の導波層の反射する光の波長帯域よりも広い波長帯域の光を反射するように構成された波長フィルタ。
- 前記所定の距離の範囲を変えることにより、前記複数の導波層の反射する光の波長帯域が重なりながらシフトするように構成された請求項1に記載の波長フィルタ。
- 前記複数の導波層の平均屈折率を変えることにより、前記複数の導波層の反射する光の波長帯域が重なりながらシフトするように構成された請求項1に記載の波長フィルタ。
- 前記第1の部分の材料が、ガラス、プラスチックまたはケイ素のいずれかである請求項1から3のいずれかに記載の波長フィルタ。
- 前記第2の部分の材料が、酸化チタン、フッ化マグネシウムまたは酸化ケイ素のいずれかである請求項1から4のいずれかに記載の波長フィルタ。
- 前記第2の部分の材料が、ゲルマニウムまたはセレン化亜鉛のいずれかである請求項1から4のいずれかに記載の波長フィルタ。
- 請求項1から6のいずれかに記載の波長フィルタの製造方法であって、前記X方向からビームを照射して前記断面形状を描画するステップを含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005089232 | 2005-03-25 | ||
JP2005089232 | 2005-03-25 | ||
PCT/JP2006/305985 WO2006104045A1 (ja) | 2005-03-25 | 2006-03-24 | 波長フィルタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4139420B2 JP4139420B2 (ja) | 2008-08-27 |
JPWO2006104045A1 true JPWO2006104045A1 (ja) | 2008-09-04 |
Family
ID=37053303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006522173A Expired - Fee Related JP4139420B2 (ja) | 2005-03-25 | 2006-03-24 | 波長フィルタ |
Country Status (3)
Country | Link |
---|---|
US (1) | US7729053B2 (ja) |
JP (1) | JP4139420B2 (ja) |
WO (1) | WO2006104045A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4986763B2 (ja) * | 2007-08-09 | 2012-07-25 | 日本航空電子工業株式会社 | 表面プラズモン素子 |
WO2011044439A1 (en) * | 2009-10-08 | 2011-04-14 | The Penn State Research Foundation | Multi-spectral filters, mirrors and antireflective coatings with subwavelength periodic features for optical devices |
JP2012014068A (ja) * | 2010-07-02 | 2012-01-19 | Olympus Corp | 光学素子 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2890984B2 (ja) * | 1992-06-30 | 1999-05-17 | 日産自動車株式会社 | 自然光の反射、干渉作用を有する構造体 |
US5472798A (en) * | 1993-07-16 | 1995-12-05 | Nissan Motor Co., Ltd. | Coloring structure having reflecting and interfering functions |
JP3550775B2 (ja) * | 1995-02-08 | 2004-08-04 | 日産自動車株式会社 | 発色構造体 |
JP3483379B2 (ja) * | 1995-12-08 | 2004-01-06 | 田中貴金属工業株式会社 | 発色構造体 |
US6212312B1 (en) * | 1999-09-17 | 2001-04-03 | U.T. Battelle, Llc | Optical multiplexer/demultiplexer using resonant grating filters |
JP2002258031A (ja) | 2001-02-28 | 2002-09-11 | Canon Inc | カラーフィルタ、その製造方法および液晶パネル |
JP3711446B2 (ja) * | 2001-03-05 | 2005-11-02 | 独立行政法人科学技術振興機構 | 波長フィルタ |
-
2006
- 2006-03-24 WO PCT/JP2006/305985 patent/WO2006104045A1/ja active Application Filing
- 2006-03-24 JP JP2006522173A patent/JP4139420B2/ja not_active Expired - Fee Related
- 2006-03-24 US US10/594,583 patent/US7729053B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20080007832A1 (en) | 2008-01-10 |
US7729053B2 (en) | 2010-06-01 |
JP4139420B2 (ja) | 2008-08-27 |
WO2006104045A1 (ja) | 2006-10-05 |
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