JP2006165102A5 - - Google Patents
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- JP2006165102A5 JP2006165102A5 JP2004351209A JP2004351209A JP2006165102A5 JP 2006165102 A5 JP2006165102 A5 JP 2006165102A5 JP 2004351209 A JP2004351209 A JP 2004351209A JP 2004351209 A JP2004351209 A JP 2004351209A JP 2006165102 A5 JP2006165102 A5 JP 2006165102A5
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- JP
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004351209A JP5089860B2 (ja) | 2004-12-03 | 2004-12-03 | 圧電アクチュエータ及び液体吐出ヘッド |
| US11/290,643 US20060119226A1 (en) | 2004-12-03 | 2005-12-01 | Piezoelectric actuator, method of manufacturing same, and liquid ejection head |
| US12/114,577 US7652412B2 (en) | 2004-12-03 | 2008-05-02 | Piezoelectric actuator, method of manufacturing same, and liquid ejection head |
| US12/501,935 US20090271964A1 (en) | 2004-12-03 | 2009-07-13 | Piezoelectric actuator, method of manufacturing same, and liquid ejection head |
| US12/637,368 US8004159B2 (en) | 2004-12-03 | 2009-12-14 | Piezoelctric actuator, method of manufacturing same, and liquid ejection head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004351209A JP5089860B2 (ja) | 2004-12-03 | 2004-12-03 | 圧電アクチュエータ及び液体吐出ヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006165102A JP2006165102A (ja) | 2006-06-22 |
| JP2006165102A5 true JP2006165102A5 (enExample) | 2007-08-23 |
| JP5089860B2 JP5089860B2 (ja) | 2012-12-05 |
Family
ID=36573419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004351209A Expired - Fee Related JP5089860B2 (ja) | 2004-12-03 | 2004-12-03 | 圧電アクチュエータ及び液体吐出ヘッド |
Country Status (2)
| Country | Link |
|---|---|
| US (4) | US20060119226A1 (enExample) |
| JP (1) | JP5089860B2 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7808180B2 (en) * | 2003-05-26 | 2010-10-05 | Koninklijke Philips Electronics N.V. | Thorium-free electrode with improved color stability |
| US7888842B2 (en) * | 2004-02-13 | 2011-02-15 | University Of Maine System Board Of Trustees | Ultra-thin film electrodes and protective layer for high temperature device applications |
| JP2005288853A (ja) * | 2004-03-31 | 2005-10-20 | Brother Ind Ltd | インクジェットヘッドの製造方法及びインクジェットヘッド |
| JP2007181185A (ja) * | 2005-12-01 | 2007-07-12 | Sony Corp | 音響共振器およびその製造方法 |
| JP5391395B2 (ja) * | 2007-10-15 | 2014-01-15 | 日立金属株式会社 | 圧電薄膜付き基板及び圧電素子 |
| JP4784611B2 (ja) | 2008-01-31 | 2011-10-05 | ブラザー工業株式会社 | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 |
| JP5523692B2 (ja) * | 2008-10-21 | 2014-06-18 | Ｔｄｋ株式会社 | 圧電アクチュエータの製造方法 |
| DE102008055123B3 (de) * | 2008-12-23 | 2010-07-22 | Robert Bosch Gmbh | Ultraschallwandler zum Einsatz in einem fluiden Medium |
| JP2010149371A (ja) * | 2008-12-25 | 2010-07-08 | Brother Ind Ltd | 液体移送装置の製造方法 |
| JP5526704B2 (ja) * | 2009-10-26 | 2014-06-18 | Ｔｄｋ株式会社 | 圧電アクチュエータ |
| JP5350418B2 (ja) * | 2011-02-28 | 2013-11-27 | 富士フイルム株式会社 | 共振振動子、共振振動子の製造方法およびこの共振振動子を有する超音波処置具 |
| DE102011081276A1 (de) * | 2011-08-19 | 2013-02-21 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines piezokeramischen Biegewandlers |
| US9136820B2 (en) * | 2012-07-31 | 2015-09-15 | Tdk Corporation | Piezoelectric device |
| US9070394B1 (en) | 2013-03-18 | 2015-06-30 | Magnecomp Corporation | Suspension microactuator with wrap-around electrode on inactive constraining layer |
| US9330694B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | HDD microactuator having reverse poling and active restraining layer |
| US11205449B2 (en) | 2013-03-18 | 2021-12-21 | Magnecomp Corporation | Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension |
| US10607642B2 (en) | 2013-03-18 | 2020-03-31 | Magnecomp Corporation | Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension |
| US9117468B1 (en) | 2013-03-18 | 2015-08-25 | Magnecomp Corporation | Hard drive suspension microactuator with restraining layer for control of bending |
| US9741376B1 (en) | 2013-03-18 | 2017-08-22 | Magnecomp Corporation | Multi-layer PZT microactuator having a poled but inactive PZT constraining layer |
| US9330698B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having multi-layer PZT microactuator with active PZT constraining layers |
| US20150162523A1 (en) * | 2013-12-06 | 2015-06-11 | Murata Manufacturing Co., Ltd. | Piezoelectric device |
| JP5757354B2 (ja) * | 2014-04-09 | 2015-07-29 | ブラザー工業株式会社 | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 |
| US10128431B1 (en) | 2015-06-20 | 2018-11-13 | Magnecomp Corporation | Method of manufacturing a multi-layer PZT microactuator using wafer-level processing |
| KR102506301B1 (ko) * | 2018-09-04 | 2023-03-07 | 카티르가마순다람 수리아쿠마르 | 음향 변환기와 관련 제작 및 패키징 기술 |
| TW202243295A (zh) * | 2021-04-22 | 2022-11-01 | 達運精密工業股份有限公司 | 震動模組及其製造方法 |
| US20230099440A1 (en) * | 2021-09-28 | 2023-03-30 | Skyworks Global Pte. Ltd. | Piezoelectric mems device with thermal compensation from different material properties |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3441754A (en) * | 1966-05-31 | 1969-04-29 | Linden Lab Inc | Base mounted piezoelectric transducer assembly having intermediate stress absorbing member |
| US4719383A (en) * | 1985-05-20 | 1988-01-12 | The United States Of America As Represented By The United States Department Of Energy | Piezoelectric shear wave resonator and method of making same |
| US5064788A (en) * | 1986-09-16 | 1991-11-12 | Lanxide Technology Company, Lp | Production of ceramic and ceramic-metal composite articles with surface coatings |
| US5173253A (en) * | 1987-10-26 | 1992-12-22 | Kabushiki Kaisha Toshiba | Low expansion cast iron |
| US4825117A (en) * | 1987-11-27 | 1989-04-25 | General Electric Company | Temperature compensated piezoelectric transducer assembly |
| SG83626A1 (en) * | 1989-07-11 | 2001-10-16 | Seiko Epson Corp | Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film |
| JP3039971B2 (ja) * | 1989-09-19 | 2000-05-08 | 株式会社日立製作所 | 接合型圧電装置及び製造方法並びに接合型圧電素子 |
| US5009690A (en) * | 1990-03-09 | 1991-04-23 | The United States Of America As Represented By The United States Department Of Energy | Method of bonding single crystal quartz by field-assisted bonding |
| EP0526048B1 (en) * | 1991-07-18 | 1997-11-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia |
| JP3238492B2 (ja) * | 1992-10-19 | 2001-12-17 | 株式会社タイセー | 圧電センサ |
| JPH08167740A (ja) | 1994-12-10 | 1996-06-25 | Horiba Ltd | 焦電型赤外線薄膜素子 |
| JP3487319B2 (ja) | 1995-10-24 | 2004-01-19 | セイコーエプソン株式会社 | 積層型インクジェット式記録ヘッド |
| JP3813740B2 (ja) * | 1997-07-11 | 2006-08-23 | Ｔｄｋ株式会社 | 電子デバイス用基板 |
| JPH1187791A (ja) | 1997-09-02 | 1999-03-30 | Seiko Epson Corp | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
| JPH1197636A (ja) | 1997-09-16 | 1999-04-09 | Hitachi Ltd | 強誘電体メモリおよびその製造方法 |
| CN1329196C (zh) * | 1998-02-18 | 2007-08-01 | 索尼株式会社 | 压电致动器及其制造方法和喷墨打印头 |
| JP3379479B2 (ja) * | 1998-07-01 | 2003-02-24 | セイコーエプソン株式会社 | 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、 |
| JP4357659B2 (ja) * | 1998-10-26 | 2009-11-04 | セイコーインスツル株式会社 | 圧電体装置及びその製造方法 |
| JP2001354497A (ja) | 2000-06-07 | 2001-12-25 | Matsushita Electric Ind Co Ltd | 強誘電体膜の製造方法 |
| JP4352161B2 (ja) | 2000-07-11 | 2009-10-28 | 富士フイルム株式会社 | インクジェットヘッド及びインクジェットヘッドの製造方法 |
| EP1324401A1 (en) * | 2000-09-27 | 2003-07-02 | Matsushita Electric Industrial Co., Ltd. | Dielectric thin film element, actuator comprising it, ink jet head, and ink jet recorder. |
| JP5019247B2 (ja) | 2000-11-24 | 2012-09-05 | Ｔｄｋ株式会社 | 電子デバイス用基板 |
| US6515402B2 (en) * | 2001-01-24 | 2003-02-04 | Koninklijke Philips Electronics N.V. | Array of ultrasound transducers |
| JP2003136714A (ja) | 2001-11-05 | 2003-05-14 | Hitachi Metals Ltd | 液体吐出ヘッドおよびその製造方法 |
| US6906451B2 (en) * | 2002-01-08 | 2005-06-14 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator |
| JP4100953B2 (ja) * | 2002-04-18 | 2008-06-11 | キヤノン株式会社 | Ｓｉ基板上に単結晶酸化物導電体を有する積層体及びそれを用いたアクチュエーター及びインクジェットヘッドとその製造方法 |
| US7276994B2 (en) * | 2002-05-23 | 2007-10-02 | Murata Manufacturing Co., Ltd. | Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter |
| JP4240445B2 (ja) * | 2002-05-31 | 2009-03-18 | 独立行政法人産業技術総合研究所 | 超高配向窒化アルミニウム薄膜を用いた圧電素子とその製造方法 |
| JP2004128492A (ja) | 2002-09-13 | 2004-04-22 | Matsushita Electric Ind Co Ltd | 圧電体薄膜素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置 |
| US20040051763A1 (en) * | 2002-09-13 | 2004-03-18 | Shogo Matsubara | Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor |
| US7230367B2 (en) * | 2003-11-07 | 2007-06-12 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric resonator, production method thereof, filter, duplexer, and communication device |
| JP2006100622A (ja) | 2004-09-30 | 2006-04-13 | Canon Inc | ユニモルフ型圧電膜素子、液体吐出ヘッド、およびユニモルフ型圧電膜素子の製造方法 |
| JP4858670B2 (ja) * | 2004-12-20 | 2012-01-18 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法及び液体噴射装置 |
-
2004
- 2004-12-03 JP JP2004351209A patent/JP5089860B2/ja not_active Expired - Fee Related
-
2005
- 2005-12-01 US US11/290,643 patent/US20060119226A1/en not_active Abandoned
-
2008
- 2008-05-02 US US12/114,577 patent/US7652412B2/en not_active Expired - Fee Related
-
2009
- 2009-07-13 US US12/501,935 patent/US20090271964A1/en not_active Abandoned
- 2009-12-14 US US12/637,368 patent/US8004159B2/en not_active Expired - Fee Related