JP5526704B2 - 圧電アクチュエータ - Google Patents
圧電アクチュエータ Download PDFInfo
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- JP5526704B2 JP5526704B2 JP2009245439A JP2009245439A JP5526704B2 JP 5526704 B2 JP5526704 B2 JP 5526704B2 JP 2009245439 A JP2009245439 A JP 2009245439A JP 2009245439 A JP2009245439 A JP 2009245439A JP 5526704 B2 JP5526704 B2 JP 5526704B2
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- piezoelectric
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- 239000000758 substrate Substances 0.000 claims description 37
- 229910010293 ceramic material Inorganic materials 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 description 19
- 238000005245 sintering Methods 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000443 aerosol Substances 0.000 description 5
- 230000008602 contraction Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
11…第2の電極層。
Claims (2)
- 基板と、
前記基板上に配置され、セラミック材料からなるダミー層と、
前記ダミー層上に配置された第1の電極層と、
前記第1の電極層上に配置され、セラミック材料からなる圧電層と、
前記圧電層上に配置された第2の電極層と、を備え、
前記ダミー層及び前記圧電層は、それぞれ一般式ABO3で表されるペロブスカイト構造を有する化合物により形成され、
前記ダミー層を形成する前記化合物のAサイト成分とBサイト成分とのモル比(A/B)は、前記圧電層を形成する前記化合物のAサイト成分とBサイト成分とのモル比よりも小さいことを特徴とする圧電アクチュエータ。 - 前記基板が金属で構成されていることを特徴とする請求項1記載の圧電アクチュエータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009245439A JP5526704B2 (ja) | 2009-10-26 | 2009-10-26 | 圧電アクチュエータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009245439A JP5526704B2 (ja) | 2009-10-26 | 2009-10-26 | 圧電アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011091310A JP2011091310A (ja) | 2011-05-06 |
JP5526704B2 true JP5526704B2 (ja) | 2014-06-18 |
Family
ID=44109274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009245439A Active JP5526704B2 (ja) | 2009-10-26 | 2009-10-26 | 圧電アクチュエータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5526704B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11168248A (ja) * | 1997-12-04 | 1999-06-22 | Fujitsu Ltd | 圧電素子及びその製造方法 |
JP5089860B2 (ja) * | 2004-12-03 | 2012-12-05 | 富士フイルム株式会社 | 圧電アクチュエータ及び液体吐出ヘッド |
JP2006261656A (ja) * | 2005-02-21 | 2006-09-28 | Brother Ind Ltd | 圧電アクチュエータおよびその製造方法 |
JP2008244201A (ja) * | 2007-03-28 | 2008-10-09 | Brother Ind Ltd | 圧電アクチュエータの製造方法 |
JP5523692B2 (ja) * | 2008-10-21 | 2014-06-18 | Tdk株式会社 | 圧電アクチュエータの製造方法 |
JP2010157648A (ja) * | 2008-12-29 | 2010-07-15 | Brother Ind Ltd | 圧電素子 |
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2009
- 2009-10-26 JP JP2009245439A patent/JP5526704B2/ja active Active
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Publication number | Publication date |
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JP2011091310A (ja) | 2011-05-06 |
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