JP2006119525A5 - - Google Patents
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- Publication number
- JP2006119525A5 JP2006119525A5 JP2004309649A JP2004309649A JP2006119525A5 JP 2006119525 A5 JP2006119525 A5 JP 2006119525A5 JP 2004309649 A JP2004309649 A JP 2004309649A JP 2004309649 A JP2004309649 A JP 2004309649A JP 2006119525 A5 JP2006119525 A5 JP 2006119525A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- refractive index
- layer
- reference wavelength
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000012788 optical film Substances 0.000 claims description 12
- 229910052681 coesite Inorganic materials 0.000 claims description 6
- 229910052906 cristobalite Inorganic materials 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 229910052682 stishovite Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 229910052905 tridymite Inorganic materials 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000006117 anti-reflective coating Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 13
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004309649A JP4612827B2 (ja) | 2004-10-25 | 2004-10-25 | 反射防止膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004309649A JP4612827B2 (ja) | 2004-10-25 | 2004-10-25 | 反射防止膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006119525A JP2006119525A (ja) | 2006-05-11 |
| JP2006119525A5 true JP2006119525A5 (enExample) | 2007-12-06 |
| JP4612827B2 JP4612827B2 (ja) | 2011-01-12 |
Family
ID=36537441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004309649A Expired - Fee Related JP4612827B2 (ja) | 2004-10-25 | 2004-10-25 | 反射防止膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4612827B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2199835B1 (en) | 2007-09-28 | 2018-09-19 | Nikon-Essilor Co., Ltd. | Optical component and manufacturing method of the optical component |
| JP5509616B2 (ja) * | 2008-02-28 | 2014-06-04 | リコーイメージング株式会社 | 反射防止膜、光学部品、交換レンズ及び撮像装置 |
| JP5347145B2 (ja) * | 2009-03-16 | 2013-11-20 | リコーイメージング株式会社 | 反射防止膜及びこれを有する光学部品、並びに前記光学部品を有する交換レンズ及び撮像装置 |
| JP2010250069A (ja) * | 2009-04-15 | 2010-11-04 | Hoya Corp | 反射防止膜、及びこれを有する光学素子 |
| WO2014065371A1 (ja) | 2012-10-25 | 2014-05-01 | 富士フイルム株式会社 | 反射防止多層膜 |
| US9703011B2 (en) | 2013-05-07 | 2017-07-11 | Corning Incorporated | Scratch-resistant articles with a gradient layer |
| US9110230B2 (en) | 2013-05-07 | 2015-08-18 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
| US9366784B2 (en) | 2013-05-07 | 2016-06-14 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
| US9335444B2 (en) | 2014-05-12 | 2016-05-10 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
| US11267973B2 (en) | 2014-05-12 | 2022-03-08 | Corning Incorporated | Durable anti-reflective articles |
| US9790593B2 (en) | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
| JP2018536177A (ja) | 2015-09-14 | 2018-12-06 | コーニング インコーポレイテッド | 高光線透過性かつ耐擦傷性反射防止物品 |
| CN111094200B (zh) | 2018-08-17 | 2022-01-07 | 康宁股份有限公司 | 具有薄的耐久性减反射结构的无机氧化物制品 |
| US20220009824A1 (en) | 2020-07-09 | 2022-01-13 | Corning Incorporated | Anti-glare substrate for a display article including a textured region with primary surface features and secondary surface features imparting a surface roughness that increases surface scattering |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3667260B2 (ja) * | 1994-02-03 | 2005-07-06 | キヤノン株式会社 | 反射防止膜および該反射防止膜を備えた光学系、ならびに該光学系を用いた露光装置やデバイス製造方法 |
| JP3323673B2 (ja) * | 1994-02-03 | 2002-09-09 | キヤノン株式会社 | 反射防止膜および該反射防止膜を備えた光学系、ならびに該光学系を用いた露光装置やデバイス製造方法 |
| JPH0875902A (ja) * | 1994-09-07 | 1996-03-22 | Canon Inc | 多層反射防止膜 |
| JPH11171596A (ja) * | 1997-12-05 | 1999-06-29 | Sony Corp | 反射防止膜 |
| JP2001209038A (ja) * | 1999-11-17 | 2001-08-03 | Nippon Sheet Glass Co Ltd | 液晶表示素子用基板 |
| JP3510845B2 (ja) * | 2000-08-29 | 2004-03-29 | Hoya株式会社 | 反射防止膜を有する光学部材 |
| JP3737075B2 (ja) * | 2002-08-21 | 2006-01-18 | Hoya株式会社 | 光学部材及び反射防止膜 |
-
2004
- 2004-10-25 JP JP2004309649A patent/JP4612827B2/ja not_active Expired - Fee Related
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