JP4612827B2 - 反射防止膜 - Google Patents

反射防止膜 Download PDF

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Publication number
JP4612827B2
JP4612827B2 JP2004309649A JP2004309649A JP4612827B2 JP 4612827 B2 JP4612827 B2 JP 4612827B2 JP 2004309649 A JP2004309649 A JP 2004309649A JP 2004309649 A JP2004309649 A JP 2004309649A JP 4612827 B2 JP4612827 B2 JP 4612827B2
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JP
Japan
Prior art keywords
film
layer
refractive index
wavelength
reflectance
Prior art date
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Expired - Fee Related
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JP2004309649A
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English (en)
Japanese (ja)
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JP2006119525A5 (enExample
JP2006119525A (ja
Inventor
光治 沢村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004309649A priority Critical patent/JP4612827B2/ja
Publication of JP2006119525A publication Critical patent/JP2006119525A/ja
Publication of JP2006119525A5 publication Critical patent/JP2006119525A5/ja
Application granted granted Critical
Publication of JP4612827B2 publication Critical patent/JP4612827B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP2004309649A 2004-10-25 2004-10-25 反射防止膜 Expired - Fee Related JP4612827B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004309649A JP4612827B2 (ja) 2004-10-25 2004-10-25 反射防止膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004309649A JP4612827B2 (ja) 2004-10-25 2004-10-25 反射防止膜

Publications (3)

Publication Number Publication Date
JP2006119525A JP2006119525A (ja) 2006-05-11
JP2006119525A5 JP2006119525A5 (enExample) 2007-12-06
JP4612827B2 true JP4612827B2 (ja) 2011-01-12

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ID=36537441

Family Applications (1)

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JP2004309649A Expired - Fee Related JP4612827B2 (ja) 2004-10-25 2004-10-25 反射防止膜

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JP (1) JP4612827B2 (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9726786B2 (en) 2014-05-12 2017-08-08 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
US10444408B2 (en) 2013-05-07 2019-10-15 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US10948629B2 (en) 2018-08-17 2021-03-16 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures
US11002885B2 (en) 2015-09-14 2021-05-11 Corning Incorporated Scratch-resistant anti-reflective articles
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US11667565B2 (en) 2013-05-07 2023-06-06 Corning Incorporated Scratch-resistant laminates with retained optical properties
US12352924B2 (en) 2020-07-09 2025-07-08 Corning Incorporated Display articles with diffractive, antiglare surfaces and methods of making the same

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2701672C (en) 2007-09-28 2017-10-24 Nikon-Essilor Co., Ltd. Optical component and method for manufacturing the same
JP5509616B2 (ja) * 2008-02-28 2014-06-04 リコーイメージング株式会社 反射防止膜、光学部品、交換レンズ及び撮像装置
JP5347145B2 (ja) * 2009-03-16 2013-11-20 リコーイメージング株式会社 反射防止膜及びこれを有する光学部品、並びに前記光学部品を有する交換レンズ及び撮像装置
JP2010250069A (ja) * 2009-04-15 2010-11-04 Hoya Corp 反射防止膜、及びこれを有する光学素子
JP5796140B2 (ja) 2012-10-25 2015-10-21 富士フイルム株式会社 反射防止多層膜

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3667260B2 (ja) * 1994-02-03 2005-07-06 キヤノン株式会社 反射防止膜および該反射防止膜を備えた光学系、ならびに該光学系を用いた露光装置やデバイス製造方法
JP3323673B2 (ja) * 1994-02-03 2002-09-09 キヤノン株式会社 反射防止膜および該反射防止膜を備えた光学系、ならびに該光学系を用いた露光装置やデバイス製造方法
JPH0875902A (ja) * 1994-09-07 1996-03-22 Canon Inc 多層反射防止膜
JPH11171596A (ja) * 1997-12-05 1999-06-29 Sony Corp 反射防止膜
JP2001209038A (ja) * 1999-11-17 2001-08-03 Nippon Sheet Glass Co Ltd 液晶表示素子用基板
JP3510845B2 (ja) * 2000-08-29 2004-03-29 Ｈｏｙａ株式会社 反射防止膜を有する光学部材
JP3737075B2 (ja) * 2002-08-21 2006-01-18 Ｈｏｙａ株式会社 光学部材及び反射防止膜

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US12195384B2 (en) 2013-05-07 2025-01-14 Corning Incorporated Scratch-resistant laminates with retained optical properties
US11667565B2 (en) 2013-05-07 2023-06-06 Corning Incorporated Scratch-resistant laminates with retained optical properties
US11714213B2 (en) 2013-05-07 2023-08-01 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US10444408B2 (en) 2013-05-07 2019-10-15 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US11231526B2 (en) 2013-05-07 2022-01-25 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US10436945B2 (en) 2014-05-12 2019-10-08 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US12421398B2 (en) 2014-05-12 2025-09-23 Corning Incorporated Durable anti-reflective articles
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9726786B2 (en) 2014-05-12 2017-08-08 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US10995404B2 (en) 2014-08-01 2021-05-04 Corning Incorporated Scratch-resistant materials and articles including the same
US10837103B2 (en) 2014-08-01 2020-11-17 Corning Incorporated Scratch-resistant materials and articles including the same
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
US11002885B2 (en) 2015-09-14 2021-05-11 Corning Incorporated Scratch-resistant anti-reflective articles
US11698475B2 (en) 2015-09-14 2023-07-11 Corning Incorporated Scratch-resistant anti-reflective articles
US11906699B2 (en) 2018-08-17 2024-02-20 Corning Incorporated Inorganic oxide articles with thin, durable anti reflective structures
US10948629B2 (en) 2018-08-17 2021-03-16 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures
US12352924B2 (en) 2020-07-09 2025-07-08 Corning Incorporated Display articles with diffractive, antiglare surfaces and methods of making the same

Also Published As

Publication number Publication date
JP2006119525A (ja) 2006-05-11

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